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Group: LTM_LETI_etching - with tag optical-emission-spectroscopy [3 articles]

Recent papers posted by members of the LTM_LETI_etching group with tag optical-emission-spectroscopy
  • Inductively coupled Cl2/O2 plasma: experimental investigation and modelling
    Vacuum, Vol. 75, No. 11-12. (2004), pp. 237-246.
    by Efremov, Dong-Pyo Kim, Chang-Il Kim
    posted to cl2-o2 icp optical-emission-spectroscopy by these_morel to the group LTM_LETI_etching on 2008-01-30 13:06:03 as read
  • Optical Emission Spectrometry of Plasma in Low-Damage Sub-100 nm Tungsten Gate Reactive Ion Etching Process for Compound Semiconductor Transistors
    Japanese Journal of Applied Physics, Vol. 45, No. 10B. (2006), pp. 8364-8369.
    by Xu Li, Haiping Zhou, Chris DW Wilkinson, Iain G Thayne
    posted to optical-emission-spectroscopy tungsten by these_morel to the group LTM_LETI_etching on 2006-12-14 14:15:27 as *****
  • Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
    Journal of Applied Physics, Vol. 51, No. 6. (1980), pp. 3134-3136.
    by JW Coburn, M Chen
    posted to actinometry optical-emission-spectroscopy plasmas by these_morel to the group LTM_LETI_etching on 2006-12-14 13:48:38 as read
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