Surface adhesion reduction in silicon microstructures using femtosecond laser pulses Export

@article{citeulike:1616717, abstract = {Not Available}, author = {Tien, N. C. and Jeong, S. and Phinney, L. M. and Fushinobu, K. and Bokor, J.}, citeulike-article-id = {1616717}, citeulike-linkout-0 = {http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1996ApPhL..68..197T}, journal = {Applied Physics Letters}, keywords = {adhesion, fabrication, femtosecond, laser, lithography, microstructures, photolithography, pulses, silicon, surface}, month = {January}, pages = {197--199}, posted-at = {2007-09-03 21:33:42}, priority = {2}, title = {Surface adhesion reduction in silicon microstructures using femtosecond laser pulses}, url = {http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1996ApPhL..68..197T}, volume = {68}, year = {1996} }

TY - JOUR ID - citeulike:1616717 L3 - citeulike-article-id:1616717 N2 - Not Available JF - Applied Physics Letters EP - 199 TI - Surface adhesion reduction in silicon microstructures using femtosecond laser pulses VL - 68 SP - 197 KW - adhesion KW - fabrication KW - femtosecond KW - laser KW - lithography KW - microstructures KW - photolithography KW - pulses KW - silicon KW - surface AU - Tien, NC AU - Jeong, S AU - Phinney, LM AU - Fushinobu, K AU - Bokor, J PY - 1996/January// UR - http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1996ApPhL..68..197T ER -