Sun, 27 Jul 2008 07:14:49 BST CiteULike: norris's Marcus http://www.citeulike.org/user/norris/author/Marcus CiteULike.org en-gb Copyright © 2004-2008 citeulike.org http://www.citeulike.org/user/norris/article/1074601 <i>Applied Physics Letters, Vol. 88, No. 14. (2006)</i><br /><br />Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our 20×20 array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed. ©2006 American Institute of Physics Two-dimensional array of coupled nanomechanical resonators Maxim Zalalutdinov Jeffrey Baldwin Martin Marcus Robert Reichenbach Jeevak Parpia Brian Houston doi:10.1063/1.2190448 Applied Physics Letters, Vol. 88, No. 14. (2006) 2007-01-29T15:54:40-00:00 2006 Applied Physics Letters 88 14 AIP damping phonons quantum http://www.citeulike.org/user/norris/article/699273 <i>Applied Physics Letters, Vol. 86, No. 18. (2005)</i><br /><br />The temperature dependence (15–320  K) of the acoustic dissipation was studied for some lower vibrational modes of a suspended silicon plate 1.5  µm thick. Our oscillator was exposed to the laboratory environment prior to measurement, laser annealed while in a cryogenic vacuum, and remeasured. We find a dissipation peak at 160  K, similar to results by others, and a second dissipation peak near 30  K. Annealing reduced the dissipation at 160  K by as much as a factor of 10, and gave quality factors as high as 1.4×106 at 470  kHz and our lowest temperature. Our data support the idea that the 160  K peak is related to adsorbates, and show this mechanism is important at room temperature. Post-anneal room-temperature dissipation appears to be limited by thermoelastic loss for certain modes. Effects of annealing and temperature on acoustic dissipation in a micromechanical silicon oscillator Hans Haucke Xiao Liu JF Vignola BH Houston MH Marcus JW Baldwin doi:10.1063/1.1921354 Applied Physics Letters, Vol. 86, No. 18. (2005) 2006-06-17T15:00:50-00:00 2005 Applied Physics Letters 86 18 AIP damping plates thermoelasticity