Sun, 27 Jul 2008 07:20:41 BST CiteULike: norris's Photiadis http://www.citeulike.org/user/norris/author/Photiadis CiteULike.org en-gb Copyright © 2004-2008 citeulike.org http://www.citeulike.org/user/norris/article/2740859 <i>Journal of Physics: Conference Series 92 (2007)</i> Surface induced phonon decay rates in thin film nano-structures Douglas Photiadis Journal of Physics: Conference Series 92 (2007) 2008-04-30T21:08:51-00:00 2007 Journal of Physics: Conference Series 92 thermoelasticity http://www.citeulike.org/user/norris/article/699191 <i>Journal of Applied Physics, Vol. 97, No. 2. (2005)</i><br /><br />The room-temperature quality factors of silicon micromechanical oscillators have been investigated by scanning laser vibrometry. One of the flexural modes has very little attachment loss to its environment, which enables us to study internal loss mechanisms. After several consecutive annealing steps up to 800  °C, the quality factor Q has increased from 8×104 to 6.0×105. However, the Q decays to 1.4×105 over six months in air. We conclude that near-surface lattice defects caused by reactive-ion etching and surface adsorbates are the main source of internal loss while surface adsorbates are responsible for the time dependence. We also discuss the thermoelastic limit in terms of Zener's theory and flexural modal components of thin plates with vibratory volume change, and compare it with our results. A loss mechanism study of a very high Q silicon micromechanical oscillator Xiao Liu JF Vignola HJ Simpson BR Lemon BH Houston DM Photiadis doi:10.1063/1.1819980 Journal of Applied Physics, Vol. 97, No. 2. (2005) 2006-06-17T14:41:37-00:00 2005 Journal of Applied Physics 97 2 AIP damping plates thermoelasticity