Tag lithography [at least 200 articles] Export

Recent papers classified by the tag lithography.

	Ultraflat Nanosphere Lithography: A New Method to Fabricate Flat Nanostructures [My Copy] Advanced Materials, Vol. 12, No. 20. (2000), pp. 1515-1519. by W. Frey, C. K. Woods, A. Chilkoti posted to ultraflat template stripping lithography by akriesch on 2009-11-28 01:13:29 as along with 1 person lisawenjing
	Lithography Options for the 32 nm Half Pitch Node and Beyond [My Copy] Circuits and Systems I: Regular Papers, IEEE Transactions on, Vol. 56, No. 8. (28 July 2009), pp. 1884-1891. by R. Gronheid, G. Vandenberghe, K. Ronse, et al.E. Hendrickx, V. Wiaux, A. M. Goethals, P. Jansen, M. Maenhoudt, R. Jonckheere posted to lithography by phlip on 2009-11-25 22:04:15 as
	Template-Assisted Three-Dimensional Nanolithography via Geometrically Irreversible Processing [My Copy] Nano Letters, Vol. 0, No. 0. (0000) by Xindi Yu, Huigang Zhang, John K. Oliverio, Paul V. Braun posted to microsphere lithography fabrication crystal by rodney on 2009-11-23 22:47:10 as
	Vertically Coupled Polymer Microdisk Resonators Fabricated by Photolithography Technique [My Copy] Electronic Components and Technology Conference, 2007. ECTC '07. Proceedings. 57th (25 June 2007), pp. 2035-2040. by Lin Luan, Sang-Yeon Cho, Nan Jokerst posted to waveguide ultraviolet ring_resonator polymeric lithography experiment disk_resonator by kristgy on 2009-11-13 15:59:21 as along with 1 person gagnon_d
	Large single-molecule fluorescence enhancements produced by a bowtie nanoantenna [My Copy] Nature Photonics, Vol. 3, No. 11. (18 October 2009), pp. 654-657. by Anika Kinkhabwala, Zongfu Yu, Shanhui Fan, Yuri Avlasevich, Klaus Mullen, W. E. Moerner posted to sms sers lithography by samjlord to the group moernerlab on 2009-10-30 19:50:29 as along with 3 people dalyx ishiken kadisake
	Fine-tuned profile simulation of holographically exposed photoresist gratings [My Copy] Optics Communications, Vol. 154, No. 1-3. (15 August 1998), pp. 109-118. by C. Zanke posted to lithography by eyliu on 2009-10-24 20:37:32 as
	The optimization of photoresist profile for sub-90nm technology [My Copy] Metrology, Inspection, and Process Control for Microlithography XXI, Vol. 6518, No. 1. (2007), 65184K. by Haengleem Jeon, Cheonman Shim, Jiho Hong, Jaewon Han, Keeho Kim edited by Chas N. Archie posted to lithography by eyliu on 2009-10-24 20:35:18 as
	Detection of a Biomarker for Alzheimer's Disease from Synthetic and Clinical Samples Using a Nanoscale Optical Biosensor [My Copy] Journal of the American Chemical Society, Vol. 127, No. 7. (1 February 2005), pp. 2264-2271. by Amanda J. Haes, Lei Chang, William L. Klein, Richard P. Van Duyne posted to spectroscopy silver protein nsl lspr lithography csf antibody alzheimers by Buntworthy on 2009-10-22 17:00:16 as along with 1 person jennychen
	A Comparative Analysis of Localized and Propagating Surface Plasmon Resonance Sensors: The Binding of Concanavalin A to a Monosaccharide Functionalized Self-Assembled Monolayer [My Copy] Journal of the American Chemical Society, Vol. 126, No. 39. (1 October 2004), pp. 12669-12676. by Chanda R. Yonzon, Eunhee Jeoung, Shengli Zou, George C. Schatz, Milan Mrksich, Richard P. Van Duyne posted to spr spectroscopy silver protein nsl nanoparticle lspr lithography kinetics gold afm by Buntworthy on 2009-10-22 16:57:47 as
	Localized surface plasmon resonance spectroscopy and sensing. [My Copy] Annual review of physical chemistry, Vol. 58 (26 October 2007), pp. 267-297. by Katherine A. Willets, Richard P. Van Duyne posted to spectroscopy silver sers review nsl lspr lithography by Buntworthy on 2009-10-22 16:17:57 as along with 3 people and 2 groups loison samjlord rodney moernerlab Kopelman_Group
	Single Silver Nanoparticles as Real-Time Optical Sensors with Zeptomole Sensitivity [My Copy] Nano Letters, Vol. 3, No. 8. (1 August 2003), pp. 1057-1062. by Adam D. McFarland, Richard P. Van Duyne posted to thiol spectroscopy single silver sam nsl lspr lithography dark-field by Buntworthy on 2009-10-22 11:38:02 as
	Localized Surface Plasmon Resonance Nanosensor: A High-Resolution Distance-Dependence Study Using Atomic Layer Deposition [My Copy] The Journal of Physical Chemistry B, Vol. 109, No. 43. (1 November 2005), pp. 20522-20528. by Alyson V. Whitney, Jeffrey W. Elam, Shengli Zou, et al.Alex V. Zinovev, Peter C. Stair, George C. Schatz, Richard P. Van Duyne posted to spectroscopy silver sem qcm nsl lspr lithography ellipsometry aluminium ald by Buntworthy on 2009-10-22 11:29:35 as
	CMOS compatible cost-efficient fabrication of SOI grating couplers [My Copy] Microelectronic Engineering, Vol. 86, No. 4-6. (April 2009), pp. 1114-1116. by Jens Bolten, Jens Hofrichter, Nikolaj Moll, et al.Sophie Schönenberger, Folkert Horst, Bert J. Offrein, Thorsten Wahlbrink, Thomas Mollenhauer, Heinrich Kurz posted to soi silicon_oxide silicon lithography hsq grating fiber_optics electron_beam coupler by kristgy on 2009-10-20 21:47:20 as along with 1 person antelius
	Recent developments in nanofabrication using scanning near-field optical microscope lithography [My Copy] Optics & Laser Technology, Vol. 39, No. 3. (April 2007), pp. 514-526. by A. Tseng posted to snom lithography by akriesch on 2009-10-18 01:46:28 as
	Plasmonic nano lithography? with a high scan speed contact probe [My Copy] Opt. Express, Vol. 17, No. 22. (26 October 2009), pp. 19476-19485. by Yongwoo Kim, Seok Kim, Howon Jung, Eungman Lee, Jae W. Hahn posted to superlens plasmonic lithography by akriesch on 2009-10-14 19:30:56 as
	Label-free biosensor by protein grating coupler on planar optical waveguides [My Copy] Opt. Lett., Vol. 33, No. 15. (1 August 2008), pp. 1735-1737. by Zhian Lai, Yuli Wang, Nancy Allbritton, G. P. Li, Mark Bachman posted to waveguide silicon_nitride protein pmma lithography grating gops electron_beam bsa biosensor by kristgy on 2009-10-13 13:03:34 as
	Fabrication and characterization of low-loss polymeric waveguides and micro-resonators [My Copy] Journal of the European Optical Society: Rapid Publications, Vol. 1 (12 July 2006) by Jacob Scheuer, Amnon Yariv posted to waveguide thesis_theory theory su-8 ring_resonator polymeric lithography hardcopy experiment electron_beam by kristgy on 2009-10-09 15:32:26 as
	Nano-Confinement Induced Chain Alignment in Ordered P3HT Nanostructures Defined by Nanoimprint Lithography [My Copy] ACS Nano, Vol. 0, No. 0. (0000) by Mukti Aryal, Krutarth Trivedi, Wenchuang W. Hu posted to polymer_morphology nanoimprint_lithography lithography conjugated_polymer alignment by MurphysLab on 2009-09-28 23:20:55 as
	Recent progress in high resolution lithography [My Copy] Polymers for Advanced Technologies, Vol. 17, No. 2. (2006), pp. 94-103. by Daniel Bratton, Da Yang, Junyan Dai, Christopher K. Ober posted to poss lithography by jjschwab on 2009-09-28 21:07:00 as
	Nanoparticle-assisted surface immobilization of phospholipid liposomes. [My Copy] Journal of the American Chemical Society, Vol. 128, No. 28. (19 July 2006), pp. 9026-9027. by Liangfang Zhang, Liang Hong, Yan Yu, Sung Chul C. Bae, Steve Granick posted to vesicle tethered nanoparticle lithography lipid gold fluorescence afm by Buntworthy on 2009-09-16 15:25:45 as
	Size-Dependent Optical Properties of $VO2$ Nanoparticle Arrays [My Copy] Physical Review Letters, Vol. 93, No. 17. (Oct 2004), 177403. by R. Lopez, L. C. Feldman, R. F. Haglund posted to vo2 nanocrystals lithography by Herve on 2009-09-09 09:20:22 as
	Multichannel silicon WDM ring filters fabricated with DUV lithography [My Copy] Optics Communications, Vol. 281, No. 17. (01 September 2008), pp. 4302-4306. by J. Lee, S. Park, G. Kim posted to ultraviolet soi silicon_oxide silicon ring_resonator lithography by kristgy on 2009-09-06 16:12:38 as
	A Novel Approach To Produce Biologically Relevant Chemical Patterns at the Nanometer Scale: Selective Molecular Assembly Patterning Combined with Colloidal Lithography [My Copy] Langmuir, Vol. 18, No. 22. (1 October 2002), pp. 8580-8586. by Roger Michel, Ilya Reviakine, Duncan Sutherland, et al.Christian Fokas, Gabor Csucs, Gaudenz Danuser, Nicholas D. Spencer, Marcus Textor posted to vesicle titanium tethered silicon lithography lipid fluorescence afm by Buntworthy on 2009-09-04 16:19:52 as
	Specific Self-Assembly of Single Lipid Vesicles in Nanoplasmonic Apertures in Gold [My Copy] Advanced Materials, Vol. 20, No. 8. (2008), pp. 1436-1442. by Andreas B. Dahlin, Magnus P. Jonsson, Fredrik Höök posted to vesicle thiol tethered silicon plasmon peg nanoparticle lithography lipid gold dna by Buntworthy on 2009-08-26 22:31:19 as
	Sub-10-nm nanolithography with a scanning helium beam [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, No. 4. (2009), pp. L18-L20. by Vadim Sidorkin, Emile van Veldhoven, Emile van der Drift, Paul Alkemade, Huub Salemink, Diederik Maas posted to lithography fabrication by akhuettel on 2009-08-17 17:51:15 as along with 1 person karlberggren
	Conformal contact and pattern stability of stamps used for soft lithography [My Copy] Journal of Applied Physics, Vol. 88, No. 7. (2000), pp. 4310-4318. by Alexander Bietsch, Bruno Michel posted to stamp printing lithography journalclub contact conformal by rodney on 2009-08-04 19:14:38 as
	Fabrication of gold dots for DNA based nano-sensors [My Copy] Nanosensing: Materials, Devices, and Systems III, Vol. 6769, No. 1. (2007), 67690H. by Mashiur Rahman, B. Scott Day, Huan Cao, Aaron Gin, Michael L. Norton edited by M. Saif Islam, Achyut K. Dutta posted to array dna gold lithography proj2 thiol by Buntworthy on 2009-07-30 21:50:50 as
	High confinement micron-scale silicon nitride high Q ring resonator [My Copy] Opt. Express, Vol. 17, No. 14. (6 July 2009), pp. 11366-11370. by Alexander Gondarenko, Jacob S. Levy, Michal Lipson posted to citing_me electron_beam experiment fabrication lithography lpcvd man-2400 reflow ring_resonator sidewall_roughness silicon_nitride silicon_oxide by kristgy on 2009-07-24 09:28:14 as
	Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit [My Copy] Physical Review Letters, Vol. 85, No. 13. (25 Sep 2000), pp. 2733-2736. by Agedi N. Boto, Pieter Kok, Daniel S. Abrams, Samuel L. Braunstein, Colin P. Williams, Jonathan P. Dowling posted to entanglement lithography sub-wavelength-resolution by Kricki on 2009-07-24 09:21:24 as along with 1 person mankei
	A reflective microring notch filter and sensor [My Copy] Opt. Express, Vol. 17, No. 13. (22 June 2009), pp. 10731-10737. by Haishan Sun, Antao Chen, Larry R. Dalton posted to electron_beam experiment lithography multiplex polymeric ring_resonator simulation su-8 waveguide by kristgy on 2009-07-24 09:11:09 as
	Extreme ultraviolet holographic lithography: Initial results [My Copy] Applied Physics Letters, Vol. 90, No. 2. (2007), 023116. by Yang C. Cheng, Artak Isoyan, John Wallace, Mumit Khan, Franco Cerrina posted to extreme holographic lithography ultraviolet by isoyan on 2009-06-24 04:31:21 as
	Immersion lithography at 157 nm [My Copy] The 45th international conference on electron, ion, and photon beam technology and nanofabrication, Vol. 19, No. 6. (2001), pp. 2353-2356. by M. Switkes, M. Rothschild posted to ellipsometry immersion lithography by eyliu on 2009-06-17 17:44:34 as
	Resolution enhancement of 157 nm lithography by liquid immersion [My Copy] Journal of Microlithography, Microfabrication, and Microsystems, Vol. 1, No. 3. (2002), pp. 225-228. by M. Switkes, M. Rothschild posted to ellipsometry immersion lithography by eyliu on 2009-06-17 17:43:22 as
	Beat the diffraction limit in 3D direct laser writing in photosensitive glass [My Copy] Opt. Express, Vol. 17, No. 12. (8 June 2009), pp. 10304-10318. by Matthieu Bellec, Arnaud Royon, Bruno Bousquet, et al.Kevin Bourhis, Mona Treguer, Thierry Cardinal, Martin Richardson, Lionel Canioni posted to lithography super-resolution by samjlord to the group moernerlab on 2009-06-10 21:23:39 as
	Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization [My Copy] Science, Vol. 324, No. 5929. (15 May 2009), pp. 910-913. by Linjie Li, Rafael R. Gattass, Erez Gershgoren, Hana Hwang, John T. Fourkas posted to lithography polymers super-resolution by samjlord to the group moernerlab on 2009-05-20 16:50:44 as along with 1 person marissalee
	Two-Color Single-Photon Photoinitiation and Photoinhibition for Subdiffraction Photolithography [My Copy] Science, Vol. 324, No. 5929. (15 May 2009), pp. 913-917. by Timothy F. Scott, Benjamin A. Kowalski, Amy C. Sullivan, Christopher N. Bowman, Robert R. Mcleod posted to lithography polymers super-resolution by samjlord to the group moernerlab on 2009-05-20 16:50:32 as along with 2 people rosema marissalee
	Tailoring the atomic structure of graphene nanoribbons by scanning tunnelling microscope lithography [My Copy] Nat Nano, Vol. 3, No. 7. (July 2008), pp. 397-401. by Levente Tapaszto, Gergely Dobrik, Philippe Lambin, Laszlo P. Biro posted to lithography nanofabrication by ZhaoZhang to the group Macroelectronics on 2009-04-26 22:12:15 as
	Nanoimprint Lithography for Hybrid Plastic Electronics [My Copy] Nano Letters, Vol. 3, No. 4. (1 April 2003), pp. 443-445. by Michael C. Mcalpine, Robin S. Friedman, Charles M. Lieber posted to lithography nanofabrication by ZhaoZhang to the group Macroelectronics on 2009-04-26 21:33:32 as
	Sub-20-nm Alignment in Nanoimprint Lithography Using Moire Fringe [My Copy] Nano Letters, Vol. 6, No. 11. (1 November 2006), pp. 2626-2629. by Nianhua Li, Wei Wu, Stephen Y. Chou posted to lithography nanofabrication by ZhaoZhang to the group Macroelectronics on 2009-04-26 21:31:36 as
	Imprint Lithography with 25-Nanometer Resolution [My Copy] Science, Vol. 272, No. 5258. (5 April 1996), pp. 85-87. by Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom posted to lithography nanofabrication by ZhaoZhang to the group Macroelectronics on 2009-04-26 21:29:00 as along with 1 person ozzy24
	Softlithographie [My Copy] Angewandte Chemie, Vol. 110, No. 5. (1998), pp. 568-594. by Younan Xia, George m posted to lithography by tkn on 2009-04-07 07:34:10 as
	SOFT LITHOGRAPHY [My Copy] Annual Review of Materials Science, Vol. 28, No. 1. (1998), pp. 153-184. by Younan Xia, George M. Whitesides posted to lithography by tkn on 2009-04-07 07:29:08 as along with 3 people sberglu armani bescarff
	Soft Lithography [My Copy] Angewandte Chemie International Edition, Vol. 37, No. 5. (1998), pp. 550-575. by Younan Xia, George M. Whitesides posted to lithography by tkn on 2009-04-07 07:27:03 as along with 4 people abhishek_tiwari ratnam_auce kristgy freddan
	Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography [My Copy] Opt. Lett., Vol. 34, No. 6. (15 March 2009), pp. 845-847. by Vadakke M. Murukeshan, Kandammathe V. Sreekanth posted to lithography nano plasmonic by akriesch on 2009-04-06 23:41:58 as
	Optimization of HSQ resist e-beam processing technique on GaAs material [My Copy] Microelectronic Engineering, Vol. 75, No. 2. (August 2004), pp. 177-182. by D. Lauvernier posted to electron_beam experiment gallium_arsenide hsq lithography processing by kristgy on 2009-03-29 16:18:32 as
	Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 5. (2003), pp. 2018-2025. by W. Henschel, Y. M. Georgiev, H. Kurz posted to electron_beam experiment hsq lithography processing by kristgy on 2009-03-29 16:15:29 as
	Three-dimensional siloxane resist for the formation of nanopatterns with minimum linewidth fluctuations [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 1. (1998), pp. 69-76. by Hideo Namatsu, Yasuo Takahashi, Kenji Yamazaki, Toru Yamaguchi, Masao Nagase, Kenji Kurihara posted to electron_beam experiment first_paper hsq lithography processing by kristgy on 2009-03-29 16:13:20 as
	Technologies for nanofluidic systems: top-down vs. bottom-up-a review [My Copy] Lab Chip, Vol. 5, No. 5. (2005), pp. 492-500. by D. Mijatovic, J. C. T. Eijkel, Berg posted to bottum-up fabrication fluidics imprint lithography nano review self-assembly top-down by jsyi on 2009-03-08 05:42:30 as
	Floating Tip Nanolithography [My Copy] Nano Letters, Vol. 8, No. 7. (1 July 2008), pp. 2017-2022. by Alexander A. Milner, Kaiyin Zhang, Yehiam Prior posted to fabrication lithography nano by jsyi on 2009-03-07 08:44:53 as
	Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane) [My Copy] Analytical Chemistry, Vol. 70, No. 23. (1 December 1998), pp. 4974-4984. by David C. Duffy, J. Cooper McDonald, Olivier J. A. Schueller, George M. Whitesides posted to lithography pdms soft_lithography by tsjipko on 2009-03-06 12:29:50 as along with 4 people and 1 group quanwang abhishek_tiwari armani alexfuerstenberg moernerlab

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fabrication	58
photolithography	51
photoresist	34
resist	32
electron_beam	29
su-8	22
optical	20
immersion	17
nanoimprint	17
processing	17
submicron	16
6781	15
development	15
interference	15
collapse	14
hardcopy	14
experiment	13
arrays	12
surface	12
holographic	11
patterns	11
silicon	11
photomask	10
nanofabrication	9
pattern	9
polymers	9
review	9
euv	8
holography	8
optics	8
polymeric	8
waveguide	8
gratings	7
laser	7
ring_resonator	7
silver	7
adhesion	6
afm	6
aspect-ratio	6
dry	6
exposure	6
field	6
imprint	6
nanoparticles	6
super-resolution	6
gold	5
grating	5
hsq	5
interferometry	5
lspr	5
metrology	5
microstructures	5
nsl	5
self-assembly	5
simulation	5
spectroscopy	5
achromatic	4
amplified	4
contact	4
crossbar	4
dfm	4
diffraction	4
emission	4
fluorescence	4
glass	4
grids	4
large-field	4
lasers	4
nano	4
nanospheres	4
nanostructures	4
parameters	4
patterning	4
plasmonics	4
pmma	4
prolith2	4
silicon_oxide	4
subresolution	4
superresolution	4
templating	4
tension	4
ultraviolet	4
water	4
100_citations	3
array	3
costs	3
dna	3
dye	3
ebeam	3
holes	3
iron	3
masks	3
mems	3
nanoparticle	3
printing	3
profile	3
protein	3
sidewall_roughness	3
sub-wavelength	3
vesicle	3

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