Tag mems [at least 200 articles] Export

Recent papers classified by the tag mems.

	Binary-Coded 4.25-bit W-Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters [My Copy] Microwave Theory and Techniques, IEEE Transactions on, Vol. 57, No. 11. (09 October 2009), pp. 2834-2840. by N. Somjit, G. Stemme, J. Oberhammer posted to silicon phase_shifter mst_papers microwave mems kth_papers by kristgy on 2009-11-19 09:07:38 as
	The development of micro-gyroscope technology [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 11. (2009), 113001. by Kai Liu, Weiping Zhang, Wenyuan Chen, et al.Kai Li, Fuyan Dai, Feng Cui, Xiaosheng Wu, Gaoyin Ma, Qijun Xiao posted to review mems gyroscope by z3phyr on 2009-11-14 16:26:51 as
	Micro-optical fiber switch for a large number of interconnects using a deformable mirror [My Copy] Photonics Technology Letters, IEEE, Vol. 14, No. 3. (07 August 2002), pp. 301-303. by Y. A. Peter, F. Gonte, H. P. Herzig, R. Dandliker posted to optical_switch mirror mems me8254 by devinberg on 2009-10-12 15:49:24 as
	Electrostatic micro torsion mirrors for an optical switch matrix [My Copy] Microelectromechanical Systems, Journal of, Vol. 5, No. 4. (06 August 2002), pp. 231-237. by H. Toshiyoshi, H. Fujita posted to optical_switch mems me8254 electrostatic by devinberg on 2009-10-09 15:04:32 as
	The lateral instability problem in electrostatic comb drive actuators: modeling and feedback control [My Copy] Journal of Micromechanics and Microengineering, Vol. 16, No. 7. (July 2006), pp. 1233-1241. by B. Borovic, F. L. Lewis, A. Q. Liu, E. S. Kolesar, D. Popa posted to notes mems displacements comb-drive by devinberg on 2009-09-30 16:18:40 as
	Design and modeling for comb drive actuator with enlarged static displacement [My Copy] Sensors and Actuators A: Physical, Vol. 115, No. 2-3. (September 2004), pp. 530-539. by C. Chen posted to notes mems displacements comb-drive by devinberg on 2009-09-30 16:15:03 as
	Design of large deflection electrostatic actuators [My Copy] Microelectromechanical Systems, Journal of, Vol. 12, No. 3. (25 June 2003), pp. 335-343. by J. D. Grade, H. Jerman, T. W. Kenny posted to notes mems displacements comb-drive by devinberg on 2009-09-30 16:11:55 as
	Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators [My Copy] Journal of Micromechanics and Microengineering (2003), pp. 178-183. by G. Zhou, P. Dowd posted to notes mems comb-drive by devinberg on 2009-09-30 16:01:16 as
	Optically-Interrogated Zero-Power MEMS Magnetometer [My Copy] Microelectromechanical Systems, Journal of, Vol. 16, No. 2. (10 April 2007), pp. 336-343. by D. J. Vasquez, J. W. Judy posted to power mems magnetometer by seonghyok on 2009-09-28 15:02:06 as
	High-aspect-ratio Si vertical micromirror arrays for optical switching [My Copy] Microelectromechanical Systems, Journal of, Vol. 7, No. 2. (06 August 2002), pp. 207-213. by W. H. Juan, S. W. Pang posted to notes mems fabrication comb-drive actuator by devinberg on 2009-09-28 14:58:11 as
	General treatment of optical forces and potentials in mechanically variable photonic systems [My Copy] Opt. Express, Vol. 17, No. 20. (28 September 2009), pp. 18116-18135. by Peter T. Rakich, Milo? A. Popovic, Zheng Wang posted to waveguide theory opto_mechanical optics mems by kristgy on 2009-09-27 11:24:18 as
	Travel range extension of a MEMS electrostatic microactuator [My Copy] Control Systems Technology, IEEE Transactions on, Vol. 13, No. 1. (27 December 2004), pp. 138-145. by D. Piyabongkarn, Y. Sun, R. Rajamani, A. Sezen, B. J. Nelson posted to notes microactuator mems comb-drive by devinberg on 2009-09-24 16:55:12 as
	Piezoelectric MEMS sensors: state-of-the-art and perspectives [My Copy] Measurement Science and Technology, Vol. 20, No. 9. (2009), 092001. by S. Tadigadapa, K. Mateti posted to review quartz_crystal_microbalance piezoelectrics mems by sniklas on 2009-09-24 08:19:11 as
	Polysilicon MEMS accelerometers exposed to shocks: numerical–experimental investigation [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 3. (2009), 035023. by Aldo Ghisi, Stanislaw Kalicinski, Stefano Mariani, Ingrid D. Wolf, Alberto Corigliano posted to shocks mems drop_test accelerometer by findroot on 2009-09-22 09:00:44 as
	MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS [My Copy] Annual Review of Fluid Mechanics, Vol. 30, No. 1. (1998), pp. 579-612. by Chih M. Ho, Yu C. Tai posted to review mems by 6rheology on 2009-09-18 01:26:15 as along with 1 person saketvora
	Radiation-pressure cooling and optomechanical instability of a micromirror [My Copy] Nature, Vol. 444, No. 7115. (02 November 2006), pp. 71-74. by O. Arcizet, P. F. Cohadon, T. Briant, M. Pinard, A. Heidmann posted to self-cooling radiation_pressure quantum micromirror mems laser fabry-perot by actionfarsi on 2009-09-03 20:18:27 as along with 4 people JackSankey magalb wmppaul gheinrich
	Free-space micromachined optical switches for optical networking [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of In Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 5, No. 1. (1999), pp. 4-9. by L. Y. Lin, E. L. Goldstein, R. W. Tkach posted to optics mems by nfarring on 2009-09-02 18:25:21 as
	Self-cooling of a micromirror by radiation pressure [My Copy] Nature, Vol. 444, No. 7115. (02 November 2006), pp. 67-70. by S. Gigan, H. R. Bohm, M. Paternostro, et al.F. Blaser, G. Langer, J. B. Hertzberg, K. C. Schwab, D. Bauerle, M. Aspelmeyer, A. Zeilinger posted to self-cooling micromirror mems fabry-perot by actionfarsi on 2009-08-31 17:12:02 as along with 4 people JackSankey akhuettel wmppaul gheinrich
	Damping of a micro-resonator torsion mirror in rarefied gas ambient [My Copy] Journal of Micromechanics and Microengineering, Vol. 15, No. 9. (September 2005), pp. 1762-1769. by Adi Minikes, Izhak Bucher, Gal Avivi posted to vibration squeeze mirror mems film damping by bucher on 2009-08-31 10:19:51 as
	On the synthesis of micro-electromechanical filters using structural dynamics [My Copy] Journal of Micromechanics and Microengineering, Vol. 18, No. 12. (2008), 125018. by A. Elka, I. Bucher posted to mems filters electromechanical by bucher on 2009-08-31 10:11:16 as along with 1 person z3phyr
	A virtual prototype manufacturing software system for MEMS [My Copy] Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The Ninth Annual International Workshop on In Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The Ninth Annual International Workshop on (1996), pp. 122-126. by Yie He, R. Harris, G. Napadenski, F. Maseeh posted to notes mems comb-drive by devinberg on 2009-08-12 16:37:17 as
	Friction and fracture properties of polysilicon coated with self-assembled monolayers [My Copy] Wear, Vol. 260, No. 1-2. (January 2006), pp. 209-214. by J. Ding, P. Wong, J. Yang posted to coatings friction mems notes by devinberg on 2009-08-10 21:19:55 as
	Nanotribology of anti-friction coatings in MEMS [My Copy] JOM Journal of the Minerals, Metals and Materials Society, Vol. 57, No. 9. (1 September 2005), pp. 55-61. by Michael Chandross, Christian Lorenz, Gary Grest, Mark Stevens, Edmund Webb posted to coatings friction mems notes by devinberg on 2009-08-10 20:37:36 as
	Optimization of an electromagnetic comb drive actuator [My Copy] Sensors and Actuators A: Physical (20 August 2008) by S. Schonhardt, J. Korvink, J. Mohr, U. Hollenbach, U. Wallrabe posted to comb-drive mems notes valve by devinberg on 2009-07-08 16:59:31 as
	Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms [My Copy] Microsystem Technologies, Vol. 5, No. 4. (25 July 1999), pp. 161-165. by D. Kamiya, T. Hayama, M. Horie posted to comb-drive mems notes valve by devinberg on 2009-07-08 16:55:38 as
	Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantilevers [My Copy] Journal of Micromechanics and Microengineering, Vol. 16, No. 10. (October 2006), pp. 2077-2085. by Rose, F., Hattori, et al. M., Kobayashi, D., Toshiyoshi, H., Fujita, H., Kawakatsu, H. posted to mems stiction by msterner on 2009-06-11 12:15:13 as
	Surface tension-powered self-assembly of microstructures - the state-of-the-art [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 12, No. 4. (2003), pp. 387-417. by R. R. A. Syms, E. M. Yeatman, V. M. Bright, G. M. Whitesides posted to mems stiction by msterner on 2009-06-10 14:58:46 as
	Anelastic Stress Relaxation in Gold Films and Its Impact on Restoring Forces in MEMS Devices [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 18, No. 3. (14 April 2009), pp. 570-576. by X. Yan, W. L. Brown, Y. Li, et al.J. Papapolymerou, C. Palego, J. C. M. Hwang, R. P. Vinci posted to creep mems rf-mems by z3phyr on 2009-06-05 03:27:54 as
	SURFACE CHEMISTRY AND TRIBOLOGY OF MEMS [My Copy] Annual Review of Physical Chemistry, Vol. 55, No. 1. (2004), pp. 35-54. by Roya Maboudian, Carlo Carraro posted to friction mems by Boxus on 2009-05-28 11:24:11 as along with 1 person ngosvami
	Evaluation of platinum as a structural thin film material for RF-MEMS devices [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 6. (2009), 065010. by P. Ekkels, X. Rottenberg, R. Puers, H. A. C. Tilmans posted to materials mems mems-switch rf-mems by z3phyr on 2009-05-26 17:03:46 as
	Short-wavelength MEMS-tunable VCSELs [My Copy] Opt. Express, Vol. 16, No. 20. (29 September 2008), pp. 16093-16103. by Garrett D. Cole, Elaine Behymer, Tiziana C. Bond, Lynford L. Goddard posted to bragg_grating cavity_resonator infrared laser mems tunable vertical by kristgy on 2009-05-26 13:58:36 as
	Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator [My Copy] Appl. Opt., Vol. 48, No. 10. (1 April 2009), pp. 1797-1803. by Chengkuo Lee, Jayaraj Thillaigovindan posted to cavity_resonator mems opto_mechanical photonic_crystal resonant_sensor sensor simulation by kristgy on 2009-05-16 11:57:19 as
	Modal Spectroscopy of Optoexcited Vibrations of a Micron-Scale On-Chip Resonator at Greater than 1 GHz Frequency [My Copy] Physical Review Letters, Vol. 98, No. 12. (2007) by Tal Carmon, Kerry J. Vahala posted to cavity_resonator gigahertz mems opto_mechanical oscillator spherical_resonator by kristgy on 2009-05-09 14:08:54 as along with 1 person eyliu
	Free ultra-high-Q microtoroid: a tool for designing photonic devices [My Copy] Opt. Express, Vol. 15, No. 1. (8 January 2007), pp. 166-175. by Mani Hossein-Zadeh, Kerry J. Vahala posted to cavity_resonator disk_resonator fabrication mems ring_resonator silicon_oxide by kristgy on 2009-05-09 14:02:12 as
	Folding assembly of micro-actuators [My Copy] CIRP Annals - Manufacturing Technology, Vol. 57, No. 1. (2008), pp. 29-32. by S. Kim, Z. Traina, H. Lee posted to 2008 axiomatic-design mems microactuator microfabrication microsystems by whutabarat on 2009-05-01 16:37:43 as
	Explosives: A microsensor for trinitrotoluene vapour [My Copy] Nature, Vol. 425, No. 6957. (2 October 2003), pp. 474-474. by L. A. Pinnaduwage, A. Gehl, D. L. Hedden, et al.G. Muralidharan, T. Thundat, R. T. Lareau, T. Sulchek, L. Manning, B. Rogers, M. Jones, J. D. Adams posted to cantilever chemical_sensors explosive explosive_detection mechanical_sensors mems microfabrication nanofabrication by GerardC on 2009-05-01 10:37:44 as
	Spontaneous mechanical oscillation of a DC driven single crystal [My Copy] ArXiv e-prints (April 2009) by K. L. phan, P. G. steeneken, M. J. goossens, G. E. J. koops, G. J. A. M. verheijden, van J. T. M. Beek posted to mems nanomechanics nems by Max_Ludwig on 2009-04-27 09:34:43 as
	Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator [My Copy] Electron Devices, IEEE Transactions on In Electron Devices, IEEE Transactions on, Vol. 51, No. 1. (2004), pp. 149-155. by J. Oberhammer, G. Stemme posted to kth_papers membrane mems mst_papers by kristgy on 2009-04-13 21:31:32 as
	Harnessing optical forces in integrated photonic circuits [My Copy] Nature, Vol. 456, No. 7221. (27 November 2008), pp. 480-484. by Mo Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, H. X. Tang posted to experiment mems silicon silicon_oxide vr_prop waveguide by kristgy on 2009-04-06 12:15:36 as along with 1 person JackSankey
	A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator [My Copy] Opt. Express, Vol. 16, No. 19. (15 September 2008), pp. 14421-14428. by Kazunori Takahashi, Yoshiaki Kanamori, Yasuo Kokubun, Kazuhiro Hane posted to electrostatic hf mems ring_resonator silicon silicon_oxide suspended tunable vapor vr_prop waveguide by kristgy on 2009-04-06 09:51:04 as
	Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware [My Copy] Japanese Journal of Applied Physics, Vol. 42, No. Part 1, No. 6A. (15 June 2003), pp. 3690-3694. by Yamato Fukuta, Hiroyuki Fujita, Hiroshi Toshiyoshi posted to etching hf mems processing silicon_oxide vapor by kristgy on 2009-04-06 09:47:55 as
	Stroke saturation on a MEMS deformable mirror for woofer-tweeter adaptive optics [My Copy] (31 Mar 2009) by Katie Morzinski, Bruce Macintosh, Donald Gavel, Daren Dillon posted to ao mems by mxhf on 2009-04-01 09:20:44 as
	Charge- and size-based separation of macromolecules using ultrathin silicon membranes [My Copy] Nature, Vol. 445, No. 7129. (15 February 2007), pp. 749-753. by Christopher C. Striemer, Thomas R. Gaborski, James L. Mcgrath, Philippe M. Fauchet posted to biosensor bsa membrane mems porous processing silicon by kristgy on 2009-03-29 18:49:02 as along with 1 person flbarroso
	Optical and mechanical design of a ?zipper? photonic crystaloptomechanical cavity [My Copy] Opt. Express, Vol. 17, No. 5. (2 March 2009), pp. 3802-3817. by Jasper Chan, Matt Eichenfield, Ryan Camacho, Oskar Painter posted to mems optics photonic_crystal photonics silicon_nitride tunable vr_prop by kristgy on 2009-03-27 11:41:05 as along with 2 people and 1 group hongtang Max_Ludwig Optomechanics
	MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems [My Copy] Opt. Lett., Vol. 33, No. 3. (1 February 2008), pp. 273-275. by Caleb Knoernschild, Changsoon Kim, Bin Liu, Felix P. Lu, Jungsang Kim posted to 2-d beam computing mems optical qip quantum steering trap by rodney on 2009-03-19 18:39:38 as
	Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of In Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 13, No. 2. (2007), pp. 322-329. by Changsoon Kim, C. Knoernschild, Bin Liu, Jungsang Kim posted to ions computing mems microscale mirrors optics qip quantum trap by rodney on 2009-03-19 18:18:32 as
	DNA mediated sequential self-assembly of nano/micro components [My Copy] Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on In Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on (2008), pp. 1052-1055. by T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata posted to mems origami origami-alternatives by dna on 2009-03-18 13:27:14 as
	Micro- and nanomechanical sensors for environmental, chemical, and biological detection [My Copy] Lab Chip, Vol. 7, No. 10. (October 2007), pp. 1238-1255. by Philip S. Waggoner, Harold G. Craighead posted to biosensor lab-on-a-chip label-free mems review by kristgy on 2009-03-11 16:58:07 as along with 3 people ashishyeri freddan guhjy
	A planar capacitive sensor for angular measurement [My Copy] Instrumentation and Measurement Technology Conference, 2001. IMTC 2001. Proceedings of the 18th IEEE, Vol. 2 (2001), pp. 1393-1396 vol.2. by S. Cermak, G. Brasseur, P. Fulmek posted to mems by krzykalu on 2009-03-08 07:12:38 as along with 1 person homer123
	Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems [My Copy] Journal of Micromechanics and Microengineering, Vol. 19, No. 3. (2009), 035008. by K. Das, R. C. Batra posted to dynamics electrostatic-actuation mems pullin-voltage snap-through by z3phyr on 2009-02-26 19:44:54 as

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review	37
rf	33
benchmarking	31
microfabrication	31
waveguide	21
microsystems	19
microfluidics	17
silicon	16
waferbonding	15
mst_papers	14
thin-film	14
tensile	13
tunable	13
notes	11
biomedical	10
micromachining	10
packaging	10
processing	10
wafer_stack	10
biomems	9
comb-drive	9
optics	9
rf-mems	9
sensor	9
strain	9
applications	8
cavity_resonator	8
electrostatic	8
etching	8
project	8
cmos	7
experiment	7
imaging	7
optical	7
pvdf	7
resistive	7
silicon_oxide	7
3d_integration	6
biology	6
chemical_sensors	6
creep	6
force	6
fusionbonding	6
implant	6
interconnects	6
microchannels	6
microfluidic	6
microsensors	6
su-8	6
switch	6
wireless	6
actuation	5
anodic_bonding	5
biosensor	5
cantilever	5
capacitor	5
design	5
friction	5
hardcopy	5
kth_papers	5
laser	5
nems	5
quantum	5
stress	5
vr_prop	5
afm	4
aluminum	4
beads	4
biophysics	4
biosensors	4
capacitive	4
carbon	4
cmos_mems_integration	4
computing	4
dihm	4
fabrication	4
fabry-perot	4
magnetic	4
microspheres	4
physics	4
qip	4
ring_resonator	4
storage	4
thermal	4
thermal_actuator	4
trap	4
actuator	3
characterization	3
detection	3
displacements	3
integrated_sensor	3
lithography	3
material	3
nanotube	3
opto_mechanical	3
parylene	3
pm	3
relaxation	3
resonant_sensor	3
ryw	3

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