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Tag optical-emission-spectroscopy [3 articles]

Recent papers classified by the tag optical-emission-spectroscopy.
  • notes Investigation of etching properties of metal nitride/high-k gate stacks using inductively coupled plasma
    Vol. 23, No. 4. (2005), pp. 964-970.
    by Wan S Hwang, Jinghao Chen, Won J Yoo, Vladimir Bliznetsov
    posted to volatility tin tan optical-emission-spectroscopy nitrogen icp hfn hbr-cl2-o2 etching by these_morel on 2006-02-17 15:42:40 as read along with 1 group LTM_LETI_etching
  • notes Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
    Journal of Applied Physics, Vol. 51, No. 6. (1980), pp. 3134-3136.
    by JW Coburn, M Chen
    posted to actinometry optical-emission-spectroscopy plasmas by these_morel on 2006-12-14 13:48:38 as read along with 1 group LTM_LETI_etching
  • Inductively coupled Cl2/O2 plasma: experimental investigation and modelling
    Vacuum, Vol. 75, No. 11-12. (2004), pp. 237-246.
    by Efremov, Dong-Pyo Kim, Chang-Il Kim
    posted to cl2-o2 icp optical-emission-spectroscopy by these_morel to the group LTM_LETI_etching on 2008-01-30 13:06:03 as read
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