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Tag parois [3 articles]

Recent papers classified by the tag parois.
  • Plasma–wall interactions during silicon etching processes in high-density HBr/Cl2/O2 plasmas
    Plasma Sources Science and Technology, Vol. 14, No. 2. (2005), pp. S42-S52.
    by G Cunge, M Kogelschatz, O Joubert, N Sadeghi
    posted to absorption cl2-o2 parois plasma by these_morel on 2008-03-05 09:11:32 as read
  • Influence of the reactor wall composition on radicals' densities and total pressure in Cl[sub 2] inductively coupled plasmas: II. During silicon etching
    Journal of Applied Physics, Vol. 102, No. 9. (2007)
    by G Cunge, N Sadeghi, R Ramos
    posted to absorption cl2 dissociation etching parois plasma silicon xps by these_morel on 2008-03-05 09:18:49 as read
  • Influence of reactor walls on plasma chemistry and on silicon etch product densities during silicon etching processes in halogen-based plasmas
    Plasma Sources Science and Technology, Vol. 13, No. 3. (2004), pp. 522-530.
    by G Cunge, M Kogelschatz, N Sadeghi
    posted to absorption cl2 cl2-o2 dissociation etching parois plasma silicon by these_morel on 2008-03-05 09:13:22 as read
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