Tag silicon_oxide [161 articles] Export

Recent papers classified by the tag silicon_oxide.

	CMOS compatible cost-efficient fabrication of SOI grating couplers [My Copy] Microelectronic Engineering, Vol. 86, No. 4-6. (April 2009), pp. 1114-1116. by Jens Bolten, Jens Hofrichter, Nikolaj Moll, et al.Sophie Schönenberger, Folkert Horst, Bert J. Offrein, Thorsten Wahlbrink, Thomas Mollenhauer, Heinrich Kurz posted to waveguide through_etched silicon_oxide silicon processing photonics optics grating experiment coupler by antelius on 2009-11-23 20:37:05 as along with 1 person kristgy
	Highly Efficient Grating Coupler between Optical Fiber and Silicon Photonic Circuit [My Copy] Conference on Lasers and Electro-Optics/International Quantum Electronics Conference (31 May 2009), CTuC6. by Shankar K. Selvaraja, Diedrik Vermeulen, Marc Schaekers, et al.Erik Sleeckx, Wim Bogaerts, Gunther Roelkens, Pieter Dumon, Dries Van Thourhout, Roel Baets posted to waveguide silicon_oxide silicon photonics grating experiment coupler a-si by antelius on 2009-11-23 20:31:30 as
	Waveguide grating coupler with subwavelength microstructures [My Copy] Opt. Lett., Vol. 34, No. 9. (1 May 2009), pp. 1408-1410. by Robert Halir, Pavel Cheben, Siegfried Janz, Dan-Xia Xu, Íñigo Molina-Fernández, Juan G. Wangüemert-Pérez posted to through_etched soi simulation silicon_oxide silicon grating coupler chirped by antelius on 2009-11-23 15:29:25 as along with 1 person kristgy
	Characterization of silicon-on-insulator waveguide chirped grating for coupling to a vertical optical fiber [My Copy] Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on In Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on (2008), pp. 56-57. by X. Chen, C. Li, H. K. Tsang posted to simulation silicon_oxide silicon grating fiber_optics fdtd experiment coupler by antelius on 2009-11-23 15:26:53 as along with 1 person kristgy
	High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibers [My Copy] Opt. Lett., Vol. 32, No. 11. (1 June 2007), pp. 1495-1497. by Günther Roelkens, Dries V. Thourhout, Roel Baets posted to vertical simulation silicon_oxide silicon grating fiber_optics eigenmode_expansion coupler camfr by antelius on 2009-11-23 15:09:54 as along with 1 person kristgy
	Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides [My Copy] Opt. Express, Vol. 15, No. 15. (23 July 2007), pp. 9625-9630. by Stijn Scheerlinck, Jonathan Schrauwen, Frederik Van Laere, Dirk Taillaert, Dries Van Thourhout, Roel Baets posted to simulation silicon_oxide silicon metal grating gold experiment eigenmode_expansion coupler camfr by antelius on 2009-11-23 15:02:34 as along with 1 person kristgy
	High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay [My Copy] Opt. Express, Vol. 14, No. 24. (27 November 2006), pp. 11622-11630. by Günther Roelkens, Dries Van Thourhout, Roel Baets posted to simulation silicon_oxide silicon polycrystalline grating fdtd eigenmode_expansion coupler camfr by antelius on 2009-11-23 13:59:52 as along with 1 person kristgy
	Embedded slanted grating for vertical coupling between fibers and silicon-on-insulator planar waveguides [My Copy] Photonics Technology Letters, IEEE In Photonics Technology Letters, IEEE, Vol. 17, No. 9. (2005), pp. 1884-1886. by Bin Wang, Jianhua Jiang, G. P. Nordin posted to vertical simulation silicon_oxide silicon grating fiber_optics fdtd coupler blazed by antelius on 2009-11-23 13:54:27 as along with 1 person kristgy
	An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers [My Copy] Quantum Electronics, IEEE Journal of In Quantum Electronics, IEEE Journal of, Vol. 38, No. 7. (2002), pp. 949-955. by D. Taillaert, W. Bogaerts, P. Bienstman, et al.T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, R. Baets posted to simulation silicon_oxide photonics photonic_crystal grating gallium_arsenide experiment eigenmode_expansion coupler camfr by antelius on 2009-11-23 13:46:12 as along with 1 person kristgy
	Light Injection in SOI Microwaveguides Using High-Efficiency Grating Couplers [My Copy] Lightwave Technology, Journal of, Vol. 24, No. 10. (2006), pp. 3810-3815. by L. Vivien, D. Pascal, S. Lardenois, et al.D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J. M. Fedeli, L. E. Melhaoui posted to waveguide silicon_oxide silicon optics grating experiment coupler by antelius on 2009-11-23 13:31:34 as along with 1 person kristgy
	Compact grating couplers between optical fibers and Silicon-on-Insulator photonic wire waveguides with 69% coupling efficiency [My Copy] Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference (2006), pp. 1-3. by F. van Laere, G. Roelkens, J. Schrauwen, et al.D. Taillaert, P. Dumon, W. Bogaerts, D. van Thourhout, R. Baets posted to waveguide silicon_oxide silicon processing polymeric grating fiber_optics experiment coupler bcb adhesive_bonding by antelius on 2009-11-23 13:15:57 as along with 1 person kristgy
	High efficiency silicon nitride surface grating couplers [My Copy] Opt. Express, Vol. 16, No. 1. (7 January 2008), pp. 328-333. by Guillaume Maire, Laurent Vivien, Guillaume Sattler, et al.Andrzej Kazmierczak, Benito Sanchez, Kristinn B. Gylfason, Amadeu Griol, Delphine Marris-Morini, Eric Cassan, Domenico Giannone, Hans Sohlström, Daniel Hill posted to silicon_oxide silicon_nitride sabio mst_papers kth_papers grating coupler bpm by antelius on 2009-11-23 13:05:37 as along with 1 person kristgy
	Sub-wavelength grating mode transformers in silicon slab waveguides [My Copy] Opt. Express, Vol. 17, No. 21. (12 October 2009), pp. 19120-19133. by Przemek J. Bock, Pavel Cheben, Jens H. Schmid, et al.André Delâge, Dan-Xia Xu, Siegfried Janz, Trevor J. Hall posted to through_etched soi simulation silicon_oxide silicon grating fdtd coupler by antelius on 2009-11-23 12:30:13 as along with 1 person kristgy
	Compact efficient broadband grating coupler for silicon-on-insulator waveguides [My Copy] Opt. Lett., Vol. 29, No. 23. (1 December 2004), pp. 2749-2751. by Dirk Taillaert, Peter Bienstman, Roel Baets posted to theory soi simulation silicon_oxide silicon photonics optics grating eigenmode_expansion coupler camfr by antelius on 2009-11-19 10:32:42 as along with 1 person kristgy
	Angled sidewalls in silicon slot waveguides: conformal filling and mode properties [My Copy] Opt. Express, Vol. 17, No. 23. (9 November 2009), pp. 21066-21076. by A. Säynätjoki, T. Alasaarela, A. Khanna, et al.L. Karvonen, P. Stenberg, M. Kuittinen, A. Tervonen, S. Honkanen posted to waveguide soi slot_waveguide simulation silicon_oxide silicon processing non_linear ddmebt atomic_layer_deposition by kristgy on 2009-11-18 17:03:47 as
	High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode [My Copy] Opt. Express, Vol. 17, No. 24. (23 November 2009), pp. 21986-21991. by F. Y. Gardes, A. Brimont, P. Sanchis, et al.G. Rasigade, D. Marris-Morini, L. O'Faolain, F. Dong, J. M. Fedeli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, J. Martí posted to soi silicon_oxide silicon ring_resonator modulator gigahertz by kristgy on 2009-11-18 08:42:23 as along with 1 person kadisake
	A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips [My Copy] Lab Chip (2010) by C. F. Carlborg, K. B. Gylfason, A. Kazmierczak, et al.F. Dortou, M. J. Banuls Polo, A. Maquieira Catala, G. M. Kresbach, H. Sohlstrom, T. Moh, L. Vivien, J. Popplewell, G. Ronan, C. A. Barrios, G. Stemme, Wijngaart posted to waveguide slot_waveguide silicon_oxide silicon_nitride sensor sabio refractometry own_paper mst_papers kth_papers experiment bsa biosensor antibody by kristgy on 2009-11-13 05:18:51 as
	<I>In vitro</I> inflammatory response of nanostructured titania, silicon oxide, and polycaprolactone [My Copy] Journal of Biomedical Materials Research Part A, Vol. 91A, No. 3. (2009), pp. 647-655. by Kristy M. Ainslie, Sarah L. Tao, Ketul C. Popat, et al.Hugh Daniels, Veeral Hardev, Craig A. Grimes, Tejal A. Desai posted to toxicity titania silicon_oxide scanning-electron-microscopy polycaprolactone cell-viability by ml115 on 2009-11-03 19:25:43 as
	Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator [My Copy] Photonics Journal, IEEE, Vol. 1, No. 3. (04 September 2009), pp. 197-204. by T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, P. Bienstman posted to waveguide soi slot_waveguide silicon_oxide silicon sensor ring_resonator refractometry nacl experiment det_lim_comp citing_me biotin biosensor by kristgy on 2009-10-17 21:40:07 as
	Optical properties of highly nonlinear silicon-organic hybrid (SOH) waveguide geometries [My Copy] Opt. Express, Vol. 17, No. 20. (28 September 2009), pp. 17357-17368. by Thomas Vallaitis, Siegwart Bogatscher, Luca Alloatti, et al.Pieter Dumon, Roel Baets, Michelle L. Scimeca, Ivan Biaggio, François Diederich, Christian Koos, Wolfgang Freude, Juerg Leuthold posted to hybrid heterogeneous_integration soi slot_waveguide silicon_oxide silicon polymeric non_linear experiment ddmebt by kristgy on 2009-10-17 21:37:33 as
	Athermal High-Index-Contrast Waveguide Design [My Copy] Photonics Technology Letters, IEEE, Vol. 20, No. 11. (02 May 2008), pp. 885-887. by W. N. Ye, J. Michel, L. C. Kimerling posted to waveguide thesis_theory thermo_optic theory silicon_oxide silicon_nitride silicon polyimide pmma optics hardcopy athermal by kristgy on 2009-10-17 13:09:45 as
	Cancellation of the temperature dependence in SOI photonic wire ring resonator sensors [My Copy] Group IV Photonics, 2008 5th IEEE International Conference on (07 October 2008), pp. 398-400. by D. X. Xu, E. Post, A. Densmore, et al.P. Waldron, S. Janz, J. Lapointe, A. Delage, P. Cheben, J. H. Schmid, B. Lamontagne posted to waveguide thermo_optic su-8 soi silicon_oxide silicon sensor ring_resonator hardcopy experiment biosensor by kristgy on 2009-10-17 13:02:08 as
	A Silicon-on-Insulator Photonic Wire Based Evanescent Field Sensor [My Copy] Photonics Technology Letters, IEEE, Vol. 18, No. 23. (19 December 2006), pp. 2520-2522. by A. Densmore, D. X. Xu, P. Waldron, et al.S. Janz, P. Cheben, J. Lapointe, A. Delage, B. Lamontagne, J. H. Schmid, E. Post posted to waveguide thesis_theory theory soi silicon_oxide silicon sensor mach-zehnder hardcopy experiment biosensor by kristgy on 2009-10-17 12:54:39 as
	Folded cavity SOI microring sensors for highsensitivity and real time measurement ofbiomolecular binding [My Copy] Opt. Express, Vol. 16, No. 19. (15 September 2008), pp. 15137-15148. by D. X. Xu, A. Densmore, A. Delâge, et al.P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, J. H. Schmid posted to waveguide thesis_sota thermo_optic soi silicon_oxide silicon sensor ring_resonator hardcopy experiment det_lim_comp biotin biosensor by kristgy on 2009-10-17 12:36:23 as
	Temperature sensitivity of silica micro-resonators [My Copy] Journal of Physics D: Applied Physics, Vol. 41, No. 24. (2008), 245111. by Qiulin Ma, Tobias Rossmann, Zhixiong Guo posted to thermo_optic spherical_resonator silicon_oxide ring_resonator fiber_optics by kristgy on 2009-10-17 12:15:37 as
	Dielectric-fibre surface waveguides for optical frequencies [My Copy] Optoelectronics, IEE Proceedings J, Vol. 133, No. 3. (11 November 2008), pp. 191-198. by K. C. Kao, G. A. Hockham posted to waveguide silicon_oxide optics nobel fiber_optics by kristgy on 2009-10-09 16:24:29 as along with 1 person and 1 group pak nl-optics
	Sensitive label-free and compact biosensor based on concentric silicon-on-insulator microring resonators [My Copy] Appl. Opt., Vol. 48, No. 25. (1 September 2009), pp. F90-F94. by Xiaohui Li, Ziyang Zhang, Shenying Qin, et al.Tao Wang, Fangfei Liu, Min Qiu, Yikai Su posted to soi simulation silicon_oxide silicon sensor ring_resonator kth_papers biosensor by kristgy on 2009-10-09 14:38:33 as
	Bulk sensing experiments using a surface-plasmon interferometer [My Copy] Opt. Lett., Vol. 34, No. 18. (15 September 2009), pp. 2858-2860. by Peter Debackere, Roel Baets, Peter Bienstman posted to surface_plasmon_resonance soi silicon_oxide silicon refractometry nacl interferometer experiment by kristgy on 2009-10-09 14:23:35 as
	Athermalizing and Trimming of Slotted Silicon Microring Resonators With UV-Sensitive PMMA Upper-Cladding [My Copy] Photonics Technology Letters, IEEE, Vol. 21, No. 17. (02 June 2009), pp. 1175-1177. by Linjie Zhou, K. Okamoto, S. J. B. Yoo posted to waveguide thermo_optic slot_waveguide silicon_oxide silicon_on_insulator silicon pmma hardcopy experiment athermal by kristgy on 2009-10-01 15:28:27 as
	Highly Integrated Optical 4<formula formulatype="inline"> <tex Notation="TeX">$,times,$</tex></formula>4 Crossbar in Silicon-on-Insulator Technology [My Copy] Lightwave Technology, Journal of, Vol. 27, No. 16. (17 April 2009), pp. 3317-3323. by A. Kazmierczak, W. Bogaerts, E. Drouard, et al.F. Dortu, P. Rojo-Romeo, F. Gaffiot, D. Van Thourhout, D. Giannone posted to waveguide silicon_oxide silicon_on_insulator silicon sabio_group_papers experiment by kristgy on 2009-09-30 12:40:16 as
	Temperature compensation of optical microresonators using a surface layer with negative thermo-optic coefficient [My Copy] Opt. Lett., Vol. 32, No. 13. (1 July 2007), pp. 1800-1802. by Ming Han, Anbo Wang posted to waveguide toroidial_resonator thermo_optic thermo_mechanic theory spherical_resonator silicon_oxide ring_resonator athermal by kristgy on 2009-09-19 12:39:44 as along with 1 person armani
	Multichannel silicon WDM ring filters fabricated with DUV lithography [My Copy] Optics Communications, Vol. 281, No. 17. (01 September 2008), pp. 4302-4306. by J. Lee, S. Park, G. Kim posted to ultraviolet soi silicon_oxide silicon ring_resonator lithography by kristgy on 2009-09-06 16:12:38 as
	Controlling temperature dependence of silicon waveguide using slot structure [My Copy] Optics Express, Vol. 16, No. 3. (2008), 1645. by Jong-Moo Lee, Duk-Jun Kim, Gwan-Ha Kim, O-Kyun Kwon, Kap-Joong Kim, Gyungock Kim posted to thermo_optic theory soi slot_waveguide silicon_oxide silicon polymeric hardcopy experiment athermal asymmetric by kristgy on 2009-09-06 15:32:47 as
	Electromagnetic Analysis of Ring-Cavity-Assisted Amplified Spontaneous Emission in Er:SiO<formula formulatype="inline"><tex Notation="TeX">$_2$</tex></formula>/a-Si Horizontal Slot Waveguides [My Copy] Quantum Electronics, IEEE Journal of In Quantum Electronics, IEEE Journal of, Vol. 45, No. 7. (2009), pp. 825-829. by B. Redding, Shouyuan Shi, D. W. Prather posted to erbium horizontal light_emission ring_resonator silicon silicon_oxide simulation slot_waveguide theory by kristgy on 2009-07-24 10:17:31 as
	High confinement micron-scale silicon nitride high Q ring resonator [My Copy] Opt. Express, Vol. 17, No. 14. (6 July 2009), pp. 11366-11370. by Alexander Gondarenko, Jacob S. Levy, Michal Lipson posted to citing_me electron_beam experiment fabrication lithography lpcvd man-2400 reflow ring_resonator sidewall_roughness silicon_nitride silicon_oxide by kristgy on 2009-07-24 09:28:14 as
	Integrated microring resonator biosensors for monitoring cell growth and detection of toxic chemicals in water [My Copy] Biosensors and Bioelectronics, Vol. 24, No. 10. (15 June 2009), pp. 3061-3066. by Shaopeng Wang, Akhilesh Ramachandran, Shiou-Jyh Ja posted to biosensor cell experiment hardcopy ring_resonator silicon_oxide by kristgy on 2009-07-10 12:24:20 as
	Ultracompact low-loss coupler between strip and slot waveguides [My Copy] Opt. Lett., Vol. 34, No. 10. (15 May 2009), pp. 1498-1500. by Zhechao Wang, Ning Zhu, Yongbo Tang, Lech Wosinski, Daoxin Dai, Sailing He posted to coupler experiment hsq kth_papers optics silicon silicon_oxide simulation slot_waveguide spin_on_glass waveguide by kristgy on 2009-07-03 08:35:56 as along with 1 person akriesch
	Electro-optic polymer assisted optical switch based on silicon slot structure [My Copy] Optics Communications, Vol. 282, No. 13. (01 July 2009), pp. 2506-2510. by Simiao Xiao, Fan Wang, Xiang Wang, et al.Yinlei Hao, Xiaoqing Jiang, Minghua Wang, Jianyi Yang posted to coupler multimode non_linear polymeric silicon silicon_oxide simulation slot_waveguide waveguide by kristgy on 2009-06-26 12:29:40 as
	Spatial solitons in periodic nanostructures [My Copy] Physical Review A (Atomic, Molecular, and Optical Physics), Vol. 79, No. 5. (2009), 053812. by A. V. Gorbach, D. V. Skryabin posted to citing_me dispersion silicon silicon_oxide simulation slot_waveguide solitary_waves theory by kristgy on 2009-06-26 12:15:26 as
	A compact refractometric sensor based on grated silicon photonic wires [My Copy] Sensors and Actuators B: Chemical, Vol. 139, No. 1. (20 May 2009), pp. 194-198. by L. J. Kauppinen, H. J. W. M. Hoekstra, R. M. de Ridder posted to experiment grating refractive_index sensor silicon silicon_oxide waveguide by kristgy on 2009-06-19 09:24:47 as
	Broadband enhancement of light emission insilicon slot waveguides [My Copy] Opt. Express, Vol. 17, No. 9. (27 April 2009), pp. 7479-7490. by Young C. Jun, Ryan M. Briggs, Harry A. Atwater, Mark L. Brongersma posted to erbium light_emission silicon silicon_oxide simulation slot_waveguide theory by kristgy on 2009-06-12 08:35:53 as
	SOI optical microring resonator with poly(ethylene glycol) polymer brush for label-free biosensor applications [My Copy] Biosensors and Bioelectronics, Vol. 24, No. 8. (15 April 2009), pp. 2528-2533. by Katrien De Vos, Jordi Girones, Stepan Popelka, Etienne Schacht, Roel Baets, Peter Bienstman posted to biosensor biotin experiment peg ring_resonator silicon silicon_oxide by kristgy on 2009-05-28 14:59:05 as
	Yb-doped glass microcavity laser operation in water [My Copy] Opt. Lett., Vol. 34, No. 8. (15 April 2009), pp. 1153-1155. by Eric P. Ostby, Kerry J. Vahala posted to cavity_resonator experiment first_paper infrared laser ring_resonator silicon_oxide sol_gel water ytterbium by kristgy on 2009-05-09 15:26:59 as along with 1 person linq
	Free ultra-high-Q microtoroid: a tool for designing photonic devices [My Copy] Opt. Express, Vol. 15, No. 1. (8 January 2007), pp. 166-175. by Mani Hossein-Zadeh, Kerry J. Vahala posted to cavity_resonator disk_resonator fabrication mems ring_resonator silicon_oxide by kristgy on 2009-05-09 14:02:12 as
	Slot waveguides with polycrystalline silicon for electrical injection [My Copy] Opt. Express, Vol. 17, No. 3. (2 February 2009), pp. 1527-1534. by Kyle Preston, Michal Lipson posted to experiment horizontal polycrystalline ring_resonator silicon silicon_oxide slot_waveguide theory thermal_oxidation waveguide by kristgy on 2009-05-03 13:55:32 as
	Embossing technique for fabricating integrated optical components in hard inorganic waveguiding materials [My Copy] Opt. Lett., Vol. 8, No. 10. (1 October 1983), pp. 537-539. by W. Lukosz, K. Tiefenthaler posted to processing silicon_oxide titanium_oxide waveguide coupler grating by kristgy on 2009-04-27 17:57:00 as
	Efficient coupling of a semiconductor laser to an optical fiber by means of a tapered waveguide on silicon [My Copy] Applied Physics Letters, Vol. 55, No. 23. (1989), pp. 2389-2391. by Y. Shani, C. H. Henry, R. C. Kistler, K. J. Orlowsky, D. A. Ackerman posted to fiber_optics inverted_taper optics silicon_nitride silicon_oxide waveguide by kristgy on 2009-04-25 17:31:47 as
	Laser emission and photodetection in an InP/InGaAsP layer integrated on and coupled to a Silicon-on-Insulator waveguide circuit [My Copy] Opt. Express, Vol. 14, No. 18. (4 September 2006), pp. 8154-8159. by G. Roelkens, D. Van Thourhout, R. Baets, R. Nötzel, M. Smit posted to waveguide silicon_oxide silicon laser indium_phosphide heterogeneous_integration gallium_arsenide compound_semiconductor bcb adhesive_bonding by kristgy on 2009-04-25 17:16:16 as
	Surface plasmon interferometer in silicon-on-insulator: novel concept for an integrated biosensor: Reply [My Copy] Opt. Express, Vol. 15, No. 21. (17 October 2007), pp. 13651-13653. by Peter Debackere, Stijn Scheerlinck, Peter Bienstman, Roel Baets posted to errata silicon silicon_oxide surface_plasmon_resonance waveguide by kristgy on 2009-04-24 12:42:24 as
	Silicon microring resonators with 1.5-?m radius [My Copy] Opt. Express, Vol. 16, No. 6. (17 March 2008), pp. 4309-4315. by Qianfan Xu, David Fattal, Raymond G. Beausoleil posted to ring_resonator silicon silicon_oxide by kristgy on 2009-04-09 14:36:11 as along with 1 person hongtang

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silicon	102
experiment	98
waveguide	74
optics	49
processing	44
coupler	43
grating	42
hardcopy	42
ring_resonator	39
silicon_nitride	38
simulation	35
refractive_index	30
deposition	28
slot_waveguide	28
biosensor	26
lpcvd	21
soi	21
thermo_optic	20
fiber_optics	19
theory	18
reflow	16
sabio	16
teos	15
bpsg	14
psg	14
sabio_group_papers	13
camfr	11
eigenmode_expansion	11
sensor	10
kth_papers	9
photonics	9
athermal	8
cavity_resonator	8
own_paper	8
through_etched	8
50_citations	7
disk_resonator	7
mems	7
polymeric	7
silane	7
thermo_mechanic	7
fdtd	6
light_emission	6
mst_papers	6
pecvd	6
pmma	6
sidewall_roughness	6
spin_on_glass	6
vertical	6
ellipsometry	5
erbium	5
fabrication	5
laser	5
metal	5
polycrystalline	5
waferbonding	5
100_citations	4
absorption	4
biotin	4
bsg	4
det_lim_comp	4
etching	4
lithography	4
mach-zehnder	4
protein	4
silicon_oxynitride	4
spectroscopy	4
sputtering	4
stress	4
thermal_oxidation	4
titanium_oxide	4
tunable	4
25_citations	3
blazed	3
chirped	3
citing_me	3
diborane	3
dielectric	3
electron_beam	3
first_paper	3
fusionbonding	3
gallium_arsenide	3
gold	3
heterogeneous_integration	3
horizontal	3
infrared	3
microfabrication	3
non_linear	3
photonic_crystal	3
refractometry	3
review	3
silicon_on_insulator	3
surface_plasmon_resonance	3
thesis_theory	3
vr_prop	3
wafer_stack	3
anisotropic_etching	2
resonant_sensor	2
rie_etching	2
thermal_actuator	2

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