Tag submicron [13 articles] Export Sort

Recent papers classified by the tag submicron.

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	Leakage current mechanisms and leakage reduction techniques in deep-submicrometer CMOS circuits [My Copy] Proceedings of the IEEE In Proceedings of the IEEE, Vol. 91, No. 2. (29 April 2003), pp. 305-327. by K. Roy, S. Mukhopadhyay, H. Mahmoodi-Meimand posted to cmos leakage power reduction submicrometer submicron by philip-eecs on 2008-12-23 17:57:21 as along with 1 person phlip
	In situ end-point detection during development of submicrometer grating structures in photoresist [My Copy] Optical Engineering, Vol. 34, No. 2. (1995), pp. 474-479. by Jerald A. Britten, Robert D. Boyd, Bruce W. Shore posted to detection development diffraction submicron insitu photoresist resist by rodney on 2008-07-27 23:10:35 as
	Rapid rotation of micron and submicron dielectric particles measured using optical tweezers [My Copy] pp. 1539-1554. by A. D. Rowe posted to dielectric optical submicron trap tweezers lasers microparticles microspheres rotational by rodney on 2007-11-09 19:39:15 as
	Micron and submicron Nb/Al-AlO<sub>x</sub>/Nb tunnel junctions with high critical current densities [My Copy] Applied Superconductivity, IEEE Transactions on In Applied Superconductivity, IEEE Transactions on, Vol. 11, No. 1. (2001), pp. 365-368. by Xiaofan Meng, L. Zheng, A. Wong, T. Van Duzer posted to highjc josephson junction nbaloxnb submicron by denisamparo on 2007-11-02 16:40:46 as along with 1 person Ronalddonald
	Generation of subquarter-micron resist structures using optical interference lithography and image reversal [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 15, Issue 6, November 1997, pp.1949-1953, Vol. 15 (November 1997), pp. 1949-1953. by J. Y. Decker, A. Fernandez, D. W. Sweeney posted to fabrication image lithography optical photolithography reversal submicron holographic photoresist resist by rodney on 2007-09-05 00:08:46 as along with 1 group Kopelman_Group
	Use of interference lithography to pattern arrays of submicron resist structures for field emission flat panel displays [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 15, Issue 3, May 1997, pp.729-735, Vol. 15 (May 1997), pp. 729-735. by A. Fernandez, H. T. Nguyen, J. A. Britten, et al.R. D. Boyd, M. D. Perry, D. R. Kania, A. M. Hawryluk posted to submicron resist photoresist pattern panel lithography interference holography flat field fed fabrication emission displays arrays by rodney to the group Kopelman_Group on 2007-09-05 00:06:03 as
	Large-area achromatic interferometric lithography for 100 nm period gratings and grids [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 14, Issue 6, November 1996, pp.4167-4170, Vol. 14 (November 1996), pp. 4167-4170. by T. A. Savas, M. L. Schattenburg, J. M. Carter, H. I. Smith posted to submicron photolithography lithography large-field interferometry interference grids gratings fabrication achromatic by rodney to the group Kopelman_Group on 2007-09-05 00:04:27 as
	Interferometric lithography of sub-micrometer sparse hole arrays for field-emission display applications [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 14, Issue 5, September 1996, pp.3339-3349, Vol. 14 (September 1996), pp. 3339-3349. by X. Chen, S. H. Zaidi, S. R. J. Brueck, D. J. Devine posted to display emission fabrication field lithography photolithography submicron arrays holes holographic fe iron by rodney on 2007-09-05 00:02:40 as along with 1 group Kopelman_Group
	Fabrication of sub-0.5 micron diameter cobalt dots on silicon substrates and photoresist pedestals on 50 cm × 50 cm glass substrates using laser interference lithograph [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 14, Issue 3, May 1996, pp.2005-2007, Vol. 14 (May 1996), pp. 2005-2007. by J. P. Spallas, R. D. Boyd, J. A. Britten, et al.A. Fernandez, A. M. Hawryluk, M. D. Perry, D. R. Kania posted to cobalt dots fabrication glass large-field lithography pedestals photolithography silicon submicron substrates arrays holographic photoresist resist by rodney on 2007-09-05 00:00:08 as along with 1 group Kopelman_Group
	Achromatic interferometric lithography for 100-nm-period gratings and grids [My Copy] Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.2732-2735, Vol. 13 (November 1995), pp. 2732-2735. by T. A. Savas, S. N. Shah, M. L. Schattenburg, J. M. Carter, H. I. Smith posted to achromatic grids lithography photolithography submicron holographic by rodney on 2007-09-04 23:56:25 as along with 1 group Kopelman_Group
	Sub-0.1 micron patterning with high aspect ratio of 5 achieved by preventing pattern collapse [My Copy] Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, Vol. 35, No. 4 A. (1996), pp. 2385-2386. by Y. Yamashita posted to submicron photolithography pattern lithography fabrication collapse aspect-ratio by rodney to the group Kopelman_Group on 2007-09-03 21:36:31 as
	Dry development of sub-0.25 mu m features patterned with 193 nm silylation resist [My Copy] The 42nd national symposium of the American Vacuum Society, Vol. 14, No. 3. (1996), pp. 1132-1136. by S. C. Palmateer, A. R. Forte, R. R. Kunz, M. W. Horn posted to submicron silylation resist photoresist photolithography pattern lithography fabrication dry development 193nm by rodney to the group Kopelman_Group on 2007-09-03 21:29:55 as
	Submicroscopic pattern replication with visible light [My Copy] Journal of Vacuum Science and Technology, Vol. 19, No. 4. (1981), pp. 881-885. by Ch, H. P. Zingsheim posted to visible submicron pattern monolayer fabrication by rodney to the group Kopelman_Group on 2007-08-06 03:54:21 as

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fabrication	16
lithography	16
photolithography	14
photoresist	9
resist	9
interference	6
arrays	5
holographic	5
holography	5
achromatic	4
emission	4
field	4
grids	4
large-field	4
pattern	4
patterns	4
compression	3
development	3
interferometry	3
optical	3
plasticity	3
size_effect	3
193nm	2
aspect-ratio	2
cobalt	2
collapse	2
dislocation	2
display	2
displays	2
dots	2
dry	2
fe	2
fed	2
flat	2
glass	2
gratings	2
image	2
insitu	2
iron	2
panel	2
pedestals	2
pillar	2
reversal	2
silicon	2
silylation	2
substrates	2
visible	2
array	1
cmos	1
detection	1
dielectric	1
diffraction	1
gold	1
highjc	1
hole	1
holes	1
josephson	1
junction	1
lasers	1
layers	1
leakage	1
microparticles	1
microspheres	1
monolayer	1
nbaloxnb	1
nucleation	1
observation	1
power	1
reduction	1
rotational	1
simulation	1
starvation	1
submicrometer	1
trap	1
tweezers	1

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