A silicon-glass based DNA micro analysis system is demonstrated. This biochip is able to amplify and detect specific DNA. First a PCR is run in a micro chamber to generate DNA copies from a specific target gene (16 rRNA). Afterwards the PCR solution is put on a capacitive DNA sensing area where target DNA hybridization is detected. The sensor consists of functionalized nanoscaled interdigitated electrodes for label-free DNA recognition. This biochemical analysis system is able to detect pathogenic bacteria in a miniaturized, cost effective and fast way.