This study demonstrates the fabrication of a stable superhydrophobic surface with low contact angle hysteresis (CAH) using an arrangement of nanoscale TiO 2 spheres. The control of precursor quantity is selected as the key factor in determining surface roughness that significantly intensifies water contact angle (CA) of TiO 2 films. After surface fluorination treatment, the anatase-type crystalline surfaces exhibit good water repellency (CA 166.1°), low CAH ( 6°), and superhydrophobic stability (>60 min). Enhanced water repellency is attributed to the fact that the higher density of TiO 2 spheres results in more tortuous three-phase contact line, leading to the self-cleaning effect. Such a unique textured surface imparts many promising potentials for engineering and the development of optics devices with robust superhydrophobic materials.