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JonasGroten's Elwenspoek:M [2 articles] Export

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A survey on the reactive ion etching of silicon in microtechnology

Journal of Micromechanics and Microengineering, Vol. 6, No. 1. (1996), pp. 14-28.

by Henri Jansen, Han Gardeniers, Meint Boer, Miko Elwenspoek, Jan Fluitman

posted to etching silicon-nanograss by JonasGroten on 2009-04-15 09:45:13 as

The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control

Journal of Micromechanics and Microengineering, Vol. 5, No. 2. (1995), pp. 115-120.

by H. Jansen, De M. Boer, R. Legtenberg, M. Elwenspoek

posted to dorrer etching silicon-nanograss by JonasGroten on 2008-11-19 09:37:26 as

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JonasGroten's Elwenspoek:M [2 articles] Export

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