Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates Export

@article{citeulike:3125735, abstract = {Self-assembling materials are the building blocks of bottom-up nanofabrication processes, but they need to be templated to impose long-range order and eliminate defects. In this work, the self-assembly of a thin film of a spherical-morphology block copolymer is templated using an array of nanoscale topographical elements that act as surrogates for the minority domains of the block copolymer. The orientation and periodicity of the resulting array of spherical microdomains are governed by the commensurability between the block copolymer period and the template period and is accurately described by a free-energy model. This method, which forms high-spatial-frequency arrays using a lower-spatial-frequency template, will be useful in nanolithography applications such as the formation of high-density microelectronic structures. 10.1126/science.1159352}, author = {Bita, Ion and Yang, Joel K. W. and Jung, Yeon S. and Ross, Caroline A. and Thomas, Edwin L. and Berggren, Karl K.}, citeulike-article-id = {3125735}, citeulike-linkout-0 = {http://dx.doi.org/10.1126/science.1159352}, citeulike-linkout-1 = {http://www.sciencemag.org/content/321/5891/939.abstract}, citeulike-linkout-2 = {http://www.sciencemag.org/content/321/5891/939.full.pdf}, citeulike-linkout-3 = {http://www.sciencemag.org/cgi/content/abstract/321/5891/939}, citeulike-linkout-4 = {http://view.ncbi.nlm.nih.gov/pubmed/18703736}, citeulike-linkout-5 = {http://www.hubmed.org/display.cgi?uids=18703736}, day = {15}, doi = {10.1126/science.1159352}, journal = {Science}, keywords = {block\_copolymer, block\_copolymers, building\_blocks, periodicity, self-assembly, self\_assembly, template, template\_applications}, month = {August}, number = {5891}, pages = {939--943}, posted-at = {2009-10-01 19:12:28}, priority = {5}, title = {Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates}, url = {http://dx.doi.org/10.1126/science.1159352}, volume = {321}, year = {2008} }

TY - JOUR ID - citeulike:3125735 L3 - citeulike-article-id:3125735 N2 - Self-assembling materials are the building blocks of bottom-up nanofabrication processes, but they need to be templated to impose long-range order and eliminate defects. In this work, the self-assembly of a thin film of a spherical-morphology block copolymer is templated using an array of nanoscale topographical elements that act as surrogates for the minority domains of the block copolymer. The orientation and periodicity of the resulting array of spherical microdomains are governed by the commensurability between the block copolymer period and the template period and is accurately described by a free-energy model. This method, which forms high-spatial-frequency arrays using a lower-spatial-frequency template, will be useful in nanolithography applications such as the formation of high-density microelectronic structures. 10.1126/science.1159352 IS - 5891 JF - Science EP - 943 TI - Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates VL - 321 SP - 939 KW - block_copolymer KW - block_copolymers KW - building_blocks KW - periodicity KW - self-assembly KW - self_assembly KW - template KW - template_applications AU - Bita, Ion AU - Yang, Joel AU - Jung, Yeon AU - Ross, Caroline AU - Thomas, Edwin AU - Berggren, Karl PY - 2008/08/15/ UR - http://dx.doi.org/10.1126/science.1159352 ER -