SiljaSenkbeil's library 17 articles Export Sort

Hide details

	Better than Taguchi orthogonal tables [My Copy] Quality and Reliability Engineering International, Vol. 4, No. 2. (1988), pp. 143-149. by Dorian Shainin, Peter Shainin posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:53 as
	Plasma-Beschichtungsverfahren und Hartstoffschichten [My Copy] In 19 Tabellen /// Mit 19 Tabellen (1992) by Bernd Rother, Jörg Vetter posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:53 as
	Handbook of advanced plasma processing techniques [My Copy] (2000) by Randy J. Shul, Randy J. Shul posted to and circuits constructionplasma design engineeringplasma etchingplasma file-import-09-01-12 plasmatzenpecvd-verfahrenplasmatechnikplasmadiagnostikplasmaphysikelectronic spraying by SiljaSenkbeil on 2009-01-12 14:16:53 as
	Surface tension, adhesion and wetting of materials for photolithographic process [My Copy] Journal of Vacuum Science, Vol. 14, No. 4. (1996), pp. 2485-2492. by J. Bauer, G. Drescher posted to adhesion alloys aluminium angle contact file-import-09-01-12 lithography nitrides oxides photoresists silicon substrates surface tension titanium treatments tungsten wettability by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Model for Interpretation and Correlation of Contact Angle Measurements [My Copy] Journal of Colloid and Interface Science, Vol. 192, No. 2. (15 August 1997), pp. 500-502. by Faruk Civan posted to anglesurface cleaningmodelingcorrelation contact file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Interpretation of contact angle measurements on two different fluoropolymers for the determination of solid surface tension [My Copy] Journal of Colloid and Interface Science, Vol. 291, No. 2. (15 November 2005), pp. 497-506. by H. Tavana, F. Simon, K. Grundke, D. Y. Kwok, M. L. Hair, A. W. Neumann posted to anglefluoropolymersn-alkanesadas-pspecific file-import-09-01-12 interactions solid surface tensioncontact by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Contact angle measurement and contact angle interpretation [My Copy] Advances in Colloid and Interface Science, Vol. 81, No. 3. (7 September 1999), pp. 167-249. by D. Y. Kwok, A. W. Neumann posted to anglesolid componentcombining contact file-import-09-01-12 method ruledrop shape surface tension tensionsurface by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Characterization of SiO2 Surface Treated by HMDS Vapor and O2 Plasma with AFM Tip [My Copy] Journal of Photopolymer Science and Technology, Vol. 16, No. 5. (2003), pp. 665-668. by Akira Kawai, Junko Kawakami posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Wetting Analysis of Hydrophobic Substrate treades by HMDS Primer [My Copy] Journal of Photopolymer Science and Technology, Vol. 20, No. 6. (2007), pp. 815-816. by Akira Kawai, Junko Kawakami posted to anglehydrophobicwettingadhesion file-import-09-01-12 hmdsprimecontact by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Priming of silicon substrates with trimethylsilyl containing compounds [My Copy] Microelectronic Engineering, Vol. 11, No. 1-4. (April 1990), pp. 475-480. by M. C. B. A. Michielsen, V. B. Marriott, J. J. Ponjée, H. van der Wel, F. J. Touwslager, J. A. H. M. Moonen posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Importance of chemistry at the resist-wafer interface for mechanical and lithographic adhesion [My Copy] Proceedings of SPIE, Vol. 2723, No. 1. (1996), pp. 249-260. by Paul M. Dentinger, James W. Taylor posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Adhesion promotion between poly(methylmethacrylate) and metallic surfaces for LiGA evaluated by shear stress measurements [My Copy] Journal of Vacuum Science, Vol. 16, No. 6. (1998), pp. 3543-3546. by Khan, S. S. Das posted to adhesion devices electroforming file-import-09-01-12 films lithography measurement micromechanical oxidation photoresists polymer stress surface topography x-ray by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Topcoat Characterization for Immersion Lithography by Fluoric Acid Etching on Silicon Substrate [My Copy] Journal of Photopolymer Science and Technology, Vol. 19, No. 5. (2006), pp. 601-611. by Mitsuru Sato, Akira Kawai posted to acid coefficient diffusion energy file-import-09-01-12 fluoric silicon surface topcoat by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Photochemical Reaction of Ozone and 1,1,1,3,3,3-Hexamethyldisilazane: Analysis of the Gas Reaction between Precursors in a Photochemical Vapor Deposition Process [My Copy] Jpn. J. Appl. Phys., Vol. 47, No. 9., 7349. by Ken Nakamura, Hidehiko Nonaka, Naoto Kameda, Tetsuya Nishiguchi, Shingo Ichimura posted to absorption cvd file-import-09-01-12 hmds infrared mass organosilane oxide ozone photodissociation photoreaction sio2 spectrometry by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Adhesion model and experimental verification for polymer--SiO2 system [My Copy] Colloids and Surfaces, Vol. 9, No. 2. (January 1984), pp. 133-145. by Hiroshi Yanazawa posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	HMDS Process Characterization [My Copy] by Jason Rim, Www posted to file-import-09-01-12 by SiljaSenkbeil on 2009-01-12 14:16:52 as
	Surface tension, adhesion and wetting of materials for photolithographic process [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, No. 4. (1996), pp. 2485-2492. by J. Bauer, G. Drescher, M. Illig posted to no-tag by SiljaSenkbeil on 2008-12-08 11:43:38 as along with 2 people and 1 group rodney carygallen Kopelman_Group

Note: You may cite this page as: http://www.citeulike.org/user/SiljaSenkbeil

Sort by:
Order:	Default Ascending Descending
Empty fields:	Default First Last

file-import-09-01-12	16
surface	5
contact	3
adhesion	2
lithography	2
silicon	2
photoresists	2
tension	2
oxidation	1
electroforming	1
x-ray	1
componentcombining	1
anglefluoropolymersn-alkanesadas-pspecific	1
mass	1
photoreaction	1
measurement	1
topcoat	1
devices	1
infrared	1
constructionplasma	1
cvd	1
interactions	1
nitrides	1
design	1
spraying	1
anglesolid	1
ruledrop	1
treatments	1
ozone	1
hmdsprimecontact	1
plasmatzenpecvd-verfahrenplasmatechnikplasmadiagnostikplasmaphysikelectronic	1
organosilane	1
tensioncontact	1
etchingplasma	1
anglehydrophobicwettingadhesion	1
aluminium	1
and	1
tungsten	1
acid	1
shape	1
energy	1
films	1
solid	1
wettability	1
angle	1
absorption	1
titanium	1
fluoric	1
anglesurface	1
engineeringplasma	1
sio2	1
polymer	1
topography	1
tensionsurface	1
circuits	1
substrates	1
alloys	1
photodissociation	1
coefficient	1
hmds	1
micromechanical	1
method	1
spectrometry	1
diffusion	1
cleaningmodelingcorrelation	1
oxides	1
oxide	1
stress	1

SiljaSenkbeil's library 17 articles Export Sort

SiljaSenkbeil's tags