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Precision and sensitivity in electron microprobe analysis Export

Analytical Chemistry, Vol. 39, No. 8. (July 1967), pp. 858-860.

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characterization eds sem

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Sources of variation in microprobe data, other than the obvious fluctuations in x-ray photon emission, are delineated. It is shown that the precision obtained in composition determinations is not generally the same as the precision of x-ray measurements. A convenient method for estimating precision before actually performing an analysis is presented.


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