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Graphene Transistors Fabricated via Transfer-Printing In Device Active-Areas on Large Wafer Export

Nano Letters, Vol. 7, No. 12. (1 December 2007), pp. 3840-3844.

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graphene graphene-applications graphene-fabrication

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We demonstrate a method that uses the pillars on a stamp to cut and exfoliate graphene islands from a graphite and then uses transfer printing to place the islands from the stamp into the device active-areas on a substrate with a placement accuracy potentially in nanometers. The process can be repeated to cover all device active-areas over an entire wafer. We also report the transistors fabricated from the printed graphene. The transistors show a hole and electron mobility of 3735 and 795 cm2/V-s, respectively, and a maximum drive-current of 1.7 mA/mum (at VDS = 1 V), which are among the highest reported for room temperature. The effects of various transferring and fixing layers on sticking graphenes to a stamp and to a substrate, respectively, were also investigated.


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