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A new micro-Pirani vacuum gauge that employs a ladder-shaped structure with two parallel bridges and crosslinks in between has been designed and fabricated. This design enhances the physical performance of the gauge by increasing structural rigidity, thus allowing for longer beams and a wider selection of materials, and by allowing for better heat distribution across the sensor - therefore improving the full-scale range of sensor response. Furthermore, this Pirani gauge can be fabricated in a one-, two-, or three-mask process without postprocessing steps such as KOH etching. In a CMOS-compatible process, poly-Si 4 times 2 times 250-mum and 4 times 2 times 1000-mum Pirani gauges with the ladder structure were fabricated and tested with pressure ranges from 10
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