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In International Conference on Solid State Sensors and Actuators, 1997. TRANSDUCERS 97, Vol. 2 (June 1997), pp. 1465-1468 vol.2, doi:10.1109/sensor.1997.635741 Key: citeulike:12080937
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A conventional Pirani vacuum sensor is converted into a device able to measure high gas pressure. By referring to infinite pressure, heat-loss change from the reference to a measured pressure induces electrical signal on the resistive sensor. 0.3 μm shallow gap is formed for the floating microsensors to increase its sensitivity. This results in a measurable range from 10
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