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In Sensors, 2003. Proceedings of IEEE, Vol. 1 (October 2003), pp. 718-722 Vol.1, doi:10.1109/icsens.2003.1279033 Key: citeulike:12080945
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Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μrn and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10
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