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In International Conference on Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS 91. (June 1991), pp. 245-248, doi:10.1109/sensor.1991.148848 Key: citeulike:12080953
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A thermal absolute pressure sensor of the heated microbridge type has been integrated with an active bias circuit and an 8-bit successive-approximation register (SAR) analog-to-digital (A/D) converter. The chip, which contains about 1000 MOSFETs, measures absolute gas pressure between 10 to 10
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