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Fabrication and performance of a fully integrated u-pirani pressure gauge with digital readout

by: C. H. Mastrangelo, R. S. Muller
In International Conference on Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS 91. (June 1991), pp. 245-248, doi:10.1109/sensor.1991.148848  Key: citeulike:12080953

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Abstract

A thermal absolute pressure sensor of the heated microbridge type has been integrated with an active bias circuit and an 8-bit successive-approximation register (SAR) analog-to-digital (A/D) converter. The chip, which contains about 1000 MOSFETs, measures absolute gas pressure between 10 to 10


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