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In Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS) (2004), pp. 532-535, doi:10.1109/mems.2004.1290639 Key: citeulike:12080955
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This paper reports a micromachined Pirani gauge with dual heat sinks, which can be integrated with MEMS devices inside a vacuum package to monitor long-term pressure changes and stability inside the package. The gauge utilizes small gaps (5 (K/W)/Torr). This gauge can resolve leak rates inside a small sealed cavity as low as 3×10
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