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Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system

by: Xuming Sun, Yang Zheng, Zhongliang Li, Miao Yu, Quan Yuan, Xiuhan Li, Haixia Zhang
In Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on (March 2012), pp. 238-242, doi:10.1109/nems.2012.6196765  Key: citeulike:11902926

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Abstract

Integrated flexible parylene-based MEMS inductors were successfully designed, fabricated and analyzed. By elctrodeposition technique, Ni


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