A Delta–Sigma Interface Circuit for Capacitive Sensors With an Automatically Calibrated Zero Point

We present a low-complexity interface circuit for capacitive sensors that are integrated into sensor microsystems. To reduce hardware cost while keeping high resolution, a first-order delta-sigma modulator (DSM), which balances the charge from the capacitive difference between sense and reference capacitors with the charge from a fixed-quantity capacitor, is employed. A charge-mode digital-to-analog converter and a successive approximation register are utilized to automatically calibrate the zero point of the interface circuit, which may shift further than a dynamic range. A prototype circuit fabricated in a 0.35-μm CMOS process has an active area of 0.048 mm