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On the synthesis of micro-electromechanical filters using structural dynamics Export

Journal of Micromechanics and Microengineering, Vol. 18, No. 12. (2008), 125018.

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electromechanical filters mems

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This paper discusses a new synthesis approach for electromechanical filters. The structural dynamics aspects are emphasized and joined with an inverse problem methodology to shape the spectrum of a signal passing through the device. Using the inverse problem methodology, the poles and zeros of a multi-degree of freedom structure are assigned, thus shaping the filter's frequency response. Several variants are presented for the same topology where the excitation and sensing locations are chosen according to the desired characteristics of the filter. The decomposition of the spatial behaviour of the device provides the designer with the ability to suppress certain structural modes of vibration thus behaving as a bandstop/bandpass filter for periodic signals. A micro-electromechanical filter was fabricated and a laboratory set-up was constructed for characterization of the micro-electromechanical filter. A comparison between the simulated response of the filter and measured response is shown.


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