Microcontact printing of indium metal using salt solution "ink" Export

@article{citeulike:1916182, abstract = {Poly(dimethlysiloxane) stamps were made from Si masters fabricated using photolithography and anisotropic etching. GaCl3 and In(NO3)3 were microcontact printed onto Si substrates, creating arrays of micron size metal salt deposits. The In(NO3)3 deposits were further processed by annealing in an N2 :H2 (9:1) forming gas environment at 600 [degree sign]C which converted the deposits into In metal. The ability to inexpensively pattern metal arrays on semiconductor surfaces has implications for ohmic contacts and, with additional processing, arrays of semiconductor crystallites for optoelectronic applications.}, author = {Allen, C. G. and Dorr, J. C. and Khandekar, A. A. and Beach, J. D. and Schick, I. C. and Schick, E. J. and Collins, R. T. and Kuech, T. F.}, citeulike-article-id = {1916182}, citeulike-linkout-0 = {http://dx.doi.org/10.1016/j.tsf.2007.02.070}, citeulike-linkout-1 = {http://www.sciencedirect.com/science/article/B6TW0-4N43RMC-6/2/cd5613afd066da47106d407b3f60f70c}, day = {13}, doi = {10.1016/j.tsf.2007.02.070}, journal = {Thin Solid Films}, keywords = {cary\_author, mcp}, month = {June}, number = {17}, pages = {6812--6816}, posted-at = {2007-11-14 21:50:34}, priority = {2}, title = {Microcontact printing of indium metal using salt solution "ink"}, url = {http://dx.doi.org/10.1016/j.tsf.2007.02.070}, volume = {515}, year = {2007} }

TY - JOUR ID - citeulike:1916182 L3 - citeulike-article-id:1916182 N2 - Poly(dimethlysiloxane) stamps were made from Si masters fabricated using photolithography and anisotropic etching. GaCl3 and In(NO3)3 were microcontact printed onto Si substrates, creating arrays of micron size metal salt deposits. The In(NO3)3 deposits were further processed by annealing in an N2 :H2 (9:1) forming gas environment at 600 [degree sign]C which converted the deposits into In metal. The ability to inexpensively pattern metal arrays on semiconductor surfaces has implications for ohmic contacts and, with additional processing, arrays of semiconductor crystallites for optoelectronic applications. IS - 17 JF - Thin Solid Films EP - 6816 TI - Microcontact printing of indium metal using salt solution "ink" VL - 515 SP - 6812 KW - cary_author KW - mcp AU - Allen, CG AU - Dorr, JC AU - Khandekar, AA AU - Beach, JD AU - Schick, IC AU - Schick, EJ AU - Collins, RT AU - Kuech, TF PY - 2007/06/13/ UR - http://dx.doi.org/10.1016/j.tsf.2007.02.070 ER -