A wet release process for fabricating slender and compliant suspended micro-mechanical structures Export

@article{citeulike:3035484, abstract = {This paper reports on the development of a generic wet release process for the fabrication of suspended slender and compliant micro-mechanical structures of poly-SiGe, poly-Si and aluminium with thickness values in the range 0.5-2 [mu]m and gap spacing from 0.5 to 2 [mu]m, respectively. A self-assembled monolayer (SAM) of n-decyltrichlorosilane (DTS) is used as an anti-stiction material. Process characterisation studies include DTS SAM characterisation, release of polycrystalline silicon germanium test structures, polycrystalline silicon device structures on silicon substrate and Aluminium test structures on AF45 glass substrate. We have obtained work of adhesion values of 0.06, 11, and 1 [mu]J/m2, slenderness ratio (SR) values of 3464, 752.2, and 2061, compliance (C) of 2100, 12, and 120 m/N, and contact angle of 129°, 126°, and 110.3°, for poly-SiGe, poly-Si and aluminium cantilevers respectively. Our results compare favourably well with results from the literature.}, author = {Pamidighantam, S. and Laureyn, W. and Rusu, C. and Baert, K. and Puers, R. and Tilmans, H. A. C.}, citeulike-article-id = {3035484}, citeulike-linkout-0 = {http://dx.doi.org/10.1016/S0924-4247(02)00350-3}, citeulike-linkout-1 = {http://www.sciencedirect.com/science/article/B6THG-47F7C3N-9/1/9712467047bf50a1147e67bcc60929f3}, day = {15}, doi = {10.1016/S0924-4247(02)00350-3}, journal = {Sensors and Actuators A: Physical}, keywords = {ca, dtes, ftir}, month = {January}, number = {1-2}, pages = {202--212}, posted-at = {2008-07-22 23:33:16}, priority = {2}, title = {A wet release process for fabricating slender and compliant suspended micro-mechanical structures}, url = {http://dx.doi.org/10.1016/S0924-4247(02)00350-3}, volume = {103}, year = {2003} }

TY - JOUR ID - citeulike:3035484 L3 - citeulike-article-id:3035484 N2 - This paper reports on the development of a generic wet release process for the fabrication of suspended slender and compliant micro-mechanical structures of poly-SiGe, poly-Si and aluminium with thickness values in the range 0.5-2 [mu]m and gap spacing from 0.5 to 2 [mu]m, respectively. A self-assembled monolayer (SAM) of n-decyltrichlorosilane (DTS) is used as an anti-stiction material. Process characterisation studies include DTS SAM characterisation, release of polycrystalline silicon germanium test structures, polycrystalline silicon device structures on silicon substrate and Aluminium test structures on AF45 glass substrate. We have obtained work of adhesion values of 0.06, 11, and 1 [mu]J/m2, slenderness ratio (SR) values of 3464, 752.2, and 2061, compliance (C) of 2100, 12, and 120 m/N, and contact angle of 129°, 126°, and 110.3°, for poly-SiGe, poly-Si and aluminium cantilevers respectively. Our results compare favourably well with results from the literature. IS - 1-2 JF - Sensors and Actuators A: Physical EP - 212 TI - A wet release process for fabricating slender and compliant suspended micro-mechanical structures VL - 103 SP - 202 KW - ca KW - dtes KW - ftir AU - Pamidighantam, S AU - Laureyn, W AU - Rusu, C AU - Baert, K AU - Puers, R AU - Tilmans, HAC PY - 2003/01/15/ UR - http://dx.doi.org/10.1016/S0924-4247(02)00350-3 ER -