Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range Export

@article{citeulike:1538461, abstract = {In order to calibrate previous secondary ion mass spectrometry (SIMS) measurements on various oxidized metal surfaces in terms of oxygen coverage, quasisimultaneous SIMS, AES, and XPS have been applied to several metal-oxygen systems. First, results are given for the Ti-O system. In this case, the oxygen signals obtained with the three methods show an identical dependence on the oxygen exposure and can therefore be used for establishing a coverage scale. The successive stages of oxidation lead to significant changes of first the AES, then the SIMS signals, and finally a chemical shift in XPS. Applied Physics Letters is copyrighted by The American Institute of Physics. doi:10.1063/1.89692 PACS: 81.60.Bn, 82.80.Pv, 82.80.Ms \ \ \ \ \ \  Additional Information Full Text: \ [\  PDF (273 kB) }, author = {Benninghoven, A. and Bispinck, H. and Ganschow, O. and Wiedmann, L.}, citeulike-article-id = {1538461}, citeulike-linkout-0 = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000031000005000341000001&idtype=cvips&gifs=yes}, citeulike-linkout-1 = {http://link.aip.org/link/?APL/31/341}, citeulike-linkout-2 = {http://dx.doi.org/10.1063/1.89692}, doi = {10.1063/1.89692}, journal = {Applied Physics Letters}, keywords = {oxygen, sims, tof}, number = {5}, pages = {341--343}, posted-at = {2007-08-06 17:24:10}, priority = {2}, publisher = {AIP}, title = {Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range}, url = {http://dx.doi.org/10.1063/1.89692}, volume = {31}, year = {1977} }

TY - JOUR ID - citeulike:1538461 L3 - citeulike-article-id:1538461 N2 - In order to calibrate previous secondary ion mass spectrometry (SIMS) measurements on various oxidized metal surfaces in terms of oxygen coverage, quasisimultaneous SIMS, AES, and XPS have been applied to several metal-oxygen systems. First, results are given for the Ti-O system. In this case, the oxygen signals obtained with the three methods show an identical dependence on the oxygen exposure and can therefore be used for establishing a coverage scale. The successive stages of oxidation lead to significant changes of first the AES, then the SIMS signals, and finally a chemical shift in XPS. Applied Physics Letters is copyrighted by The American Institute of Physics. doi:10.1063/1.89692 PACS: 81.60.Bn, 82.80.Pv, 82.80.Ms        Additional Information Full Text:  [  PDF (273 kB) IS - 5 JF - Applied Physics Letters EP - 343 TI - Quasisimultaneous SIMS-AES-XPS investigation of the oxidation of Ti in the monolayer range PB - AIP VL - 31 SP - 341 KW - oxygen KW - sims KW - tof AU - Benninghoven, A AU - Bispinck, H AU - Ganschow, O AU - Wiedmann, L PY - 1977/// UR - http://dx.doi.org/10.1063/1.89692 ER -