High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs Export

@inproceedings{Maxwell-1999-coils, abstract = {This paper reports advances in high-pressure, 3D laser chemical vapor deposition, which may be used to prototype insulating and metallic high-aspect-ratio microstructures. In this case, carbon was grown from ethylene at pressures of 1-11 bar; fine free-standing fibers of diamond-like carbon were grown at linear rates exceeding 120,000 microns per second. This record-setting growth rate allows the computer- controlled prototyping of centimeter-scale structures in only 15-20 minutes. The volumetric growth rate is scalable in pressure and laser power so that, with a single tool, micron-size details may be deposited as readily as large objects. The morphology, diameter, and steady-state growth rate of the carbon fibers were mapped versus the input laser power, the pre-cursor pressure, and the gas flow rate. Using a rotating mandrel, helical, tapered, and folded coils were grown at rates of 10-25 micrometers /s. Flat carbon coils were also grown by steadily increasing the radius of the laser focus from the mandrel while maintaining a constant tangential velocity. Tungsten fibers and single crystals were also grown from WF6 and H2 gas mixtures.}, author = {Maxwell, James L. and Boman, Mats and Williams, Kirk and Larsson, Kajsa and Jaikumar, N. and Saiprasanna, G.}, citeulike-article-id = {6043762}, citeulike-linkout-0 = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PSISDG003874000001000227000001&idtype=cvips&gifs=yes}, citeulike-linkout-1 = {http://link.aip.org/link/?PSI/3874/227}, editor = {Smith, James H. and Karam, Jean M.}, journal = {Micromachining and Microfabrication Process Technology V}, location = {Santa Clara, CA, USA}, number = {1}, pages = {227--235}, posted-at = {2009-10-30 17:43:15}, priority = {2}, publisher = {SPIE}, title = {High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs}, url = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PSISDG003874000001000227000001&idtype=cvips&gifs=yes}, volume = {3874}, year = {1999} }

TY - CONF ID - Maxwell-1999-coils L3 - citeulike-article-id:6043762 N2 - This paper reports advances in high-pressure, 3D laser chemical vapor deposition, which may be used to prototype insulating and metallic high-aspect-ratio microstructures. In this case, carbon was grown from ethylene at pressures of 1-11 bar; fine free-standing fibers of diamond-like carbon were grown at linear rates exceeding 120,000 microns per second. This record-setting growth rate allows the computer- controlled prototyping of centimeter-scale structures in only 15-20 minutes. The volumetric growth rate is scalable in pressure and laser power so that, with a single tool, micron-size details may be deposited as readily as large objects. The morphology, diameter, and steady-state growth rate of the carbon fibers were mapped versus the input laser power, the pre-cursor pressure, and the gas flow rate. Using a rotating mandrel, helical, tapered, and folded coils were grown at rates of 10-25 micrometers /s. Flat carbon coils were also grown by steadily increasing the radius of the laser focus from the mandrel while maintaining a constant tangential velocity. Tungsten fibers and single crystals were also grown from WF6 and H2 gas mixtures. CY - Santa Clara, CA, USA IS - 1 JF - Micromachining and Microfabrication Process Technology V EP - 235 TI - High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs PB - SPIE VL - 3874 SP - 227 AU - Maxwell, James AU - Boman, Mats AU - Williams, Kirk AU - Larsson, Kajsa AU - Jaikumar, N AU - Saiprasanna, G A2 - Smith, James A2 - Karam, Jean PY - 1999/// UR - http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PSISDG003874000001000227000001&idtype=cvips&gifs=yes ER -