Rigorous coupled-wave analysis of multilayered grating structures Export

@article{citeulike:4501751, abstract = {Using a rigorous coupled-wave analysis, a (2 \× 2) matrix method in homogenous layered media is generalized for a grating-embedded multilayer structure with (2M \× 2M) dynamic and propagation matrices in both transverse-electric and transverse-magnetic polarizations, where M is the number of harmonics retained in the field expansion. A numerically stable algorithm to implement the method is described. Numerical results are presented for a diffraction-based optoacoustic sensor that consists of a reflective movable membrane and fixed grating fingers on a transparent quartz substrate and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar approach.}, author = {Lee, Wook and Degertekin, F. L.}, booktitle = {Lightwave Technology, Journal of}, citeulike-article-id = {4501751}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/JLT.2004.833278}, citeulike-linkout-1 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1341489}, doi = {10.1109/JLT.2004.833278}, journal = {Lightwave Technology, Journal of}, keywords = {coupled-wave, diffraction, gratings}, number = {10}, pages = {2359--2363}, posted-at = {2009-05-11 03:22:53}, priority = {2}, title = {Rigorous coupled-wave analysis of multilayered grating structures}, url = {http://dx.doi.org/10.1109/JLT.2004.833278}, volume = {22}, year = {2004} }

TY - JOUR ID - citeulike:4501751 L3 - citeulike-article-id:4501751 N2 - Using a rigorous coupled-wave analysis, a (2 × 2) matrix method in homogenous layered media is generalized for a grating-embedded multilayer structure with (2M × 2M) dynamic and propagation matrices in both transverse-electric and transverse-magnetic polarizations, where M is the number of harmonics retained in the field expansion. A numerically stable algorithm to implement the method is described. Numerical results are presented for a diffraction-based optoacoustic sensor that consists of a reflective movable membrane and fixed grating fingers on a transparent quartz substrate and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar approach. IS - 10 JF - Lightwave Technology, Journal of EP - 2363 TI - Rigorous coupled-wave analysis of multilayered grating structures VL - 22 T2 - Lightwave Technology, Journal of SP - 2359 KW - coupled-wave KW - diffraction KW - gratings AU - Lee, Wook AU - Degertekin, FL PY - 2004/// UR - http://dx.doi.org/10.1109/JLT.2004.833278 ER -