Scattering by a one-dimensional rough surface, and surface profile reconstruction by confocal imaging Export

@article{citeulike:531880, abstract = {It is demonstrated that scattering by a rough surface can be described in terms of the coherent transfer function, which was first developed to describe the process of imaging. The two-dimensional (one transverse and one longitudinal) coherent transfer function for confocal imaging is presented for a high-angle theory. From this an effective transfer function for imaging of rough surfaces is developed, based on the Kirchhoff approximation. It is described how confocal imaging can be used to investigate various scattering mechanisms, and can be used for reconstruction of surface profiles in the Kirchhoff approximation.}, author = {Sheppard, C. J. R. and Connolly, T. J. and Gu, Min}, citeulike-article-id = {531880}, citeulike-linkout-0 = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PRLTAO000070000010001409000001&idtype=cvips&gifs=yes}, citeulike-linkout-1 = {http://link.aps.org/abstract/PRL/v70/p1}, citeulike-linkout-2 = {http://dx.doi.org/10.1103/PhysRevLett.70.1409}, doi = {10.1103/PhysRevLett.70.1409}, journal = {Physical Review Letters}, keywords = {confocal, metrology, scattering}, number = {10}, pages = {1409--1412}, posted-at = {2006-03-06 20:27:29}, priority = {3}, publisher = {APS}, title = {Scattering by a one-dimensional rough surface, and surface profile reconstruction by confocal imaging}, url = {http://dx.doi.org/10.1103/PhysRevLett.70.1409}, volume = {70}, year = {1993} }

TY - JOUR ID - citeulike:531880 L3 - citeulike-article-id:531880 N2 - It is demonstrated that scattering by a rough surface can be described in terms of the coherent transfer function, which was first developed to describe the process of imaging. The two-dimensional (one transverse and one longitudinal) coherent transfer function for confocal imaging is presented for a high-angle theory. From this an effective transfer function for imaging of rough surfaces is developed, based on the Kirchhoff approximation. It is described how confocal imaging can be used to investigate various scattering mechanisms, and can be used for reconstruction of surface profiles in the Kirchhoff approximation. IS - 10 JF - Physical Review Letters EP - 1412 TI - Scattering by a one-dimensional rough surface, and surface profile reconstruction by confocal imaging PB - APS VL - 70 SP - 1409 KW - confocal KW - metrology KW - scattering AU - Sheppard, CJR AU - Connolly, TJ AU - Gu, Min PY - 1993/// UR - http://dx.doi.org/10.1103/PhysRevLett.70.1409 ER -