eyliu's immersion [25 articles] Export

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	Determination of refractive indexes of dielectric films by the use of immersion liquids [My Copy] Kristall und Technik, Vol. 16, No. 4. (1981), pp. 503-512. by B. M. Ayupov, N. P. Sysoeva posted to immersion ellipsometry by eyliu on 2009-08-22 01:20:32 as
	Ellipsometric analysis of inhomogeneous structures on the basis of complex reflection coefficients [My Copy] Surface Science, Vol. 177, No. 3. (02 December 1986), pp. 625-641. by R. Lubinskaya, A. Mardezhov, K. Svitashov, V. Shvets posted to ellipsometry immersion by eyliu on 2009-08-11 06:15:42 as
	Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry [My Copy] J. Opt. Soc. Am., Vol. 58, No. 4. (1 April 1968), pp. 526-532. by K. Vedam, R. Rai, F. Lukes, R. Srinivasan posted to ellipsometry immersion by eyliu on 2009-08-11 05:00:09 as
	An Interface Enhanced Spectroscopic Ellipsometry Technique: Application to Si-SiO[sub 2] [My Copy] Journal of The Electrochemical Society, Vol. 139, No. 5. (1992), pp. 1450-1455. by V. A. Yakovlev, E. A. Irene posted to ellipsometry immersion by eyliu on 2009-08-07 00:16:52 as
	Ellipsometric liquid immersion method for the determination of all the optical parameters of the system: Nonabsorbing film on an absorbing substrate☆ [My Copy] Surface Science, Vol. 16 (August 1969), pp. 112-125. by F. Lukes, W. Knausenberger, K. Vedam posted to ellipsometry immersion by eyliu on 2009-06-18 01:45:36 as
	Accurate Ellipsometric Measurement of Refractive Index and Thickness of Ultrathin Oxide Film [My Copy] Journal of The Electrochemical Society, Vol. 153, No. 12. (2006), pp. F277-F282. by B. M. Ayupov, V. A. Gritsenko, Hei Wong, C. W. Kim posted to ellipsometry immersion by eyliu on 2009-06-18 01:22:28 as
	Immersion lithography at 157 nm [My Copy] The 45th international conference on electron, ion, and photon beam technology and nanofabrication, Vol. 19, No. 6. (2001), pp. 2353-2356. by M. Switkes, M. Rothschild posted to ellipsometry immersion lithography by eyliu on 2009-06-17 17:44:34 as
	Resolution enhancement of 157 nm lithography by liquid immersion [My Copy] Journal of Microlithography, Microfabrication, and Microsystems, Vol. 1, No. 3. (2002), pp. 225-228. by M. Switkes, M. Rothschild posted to ellipsometry immersion lithography by eyliu on 2009-06-17 17:43:22 as
	Limiting Si/SiO[sub 2] interface roughness resulting from thermal oxidation [My Copy] Journal of Applied Physics, Vol. 86, No. 3. (1999), pp. 1729-1735. by L. Lai, E. A. Irene posted to ellipsometry immersion by eyliu on 2009-06-17 17:42:01 as
	Optical constants of TbFeO3 measured by the immersion ellipsometry method at wavelength 0.63 mu m [My Copy] Journal of Physics D: Applied Physics, Vol. 27, No. 9. (1994), pp. 1964-1967. by V. V. Filippov, I. D. Lomako, N. N. Sender posted to ellipsometry immersion by eyliu on 2009-06-17 17:41:10 as
	Applications of spectroscopic ellipsometry to microelectronics [My Copy] Thin Solid Films, Vol. 233, No. 1-2. (12 October 1993), pp. 96-111. by E. Irene posted to ellipsometry immersion by eyliu on 2009-06-17 17:40:29 as
	Immersion ellipsometry of semiconductor surfaces [My Copy] Surface and Interface Analysis, Vol. 16, No. 1-12. (1990), pp. 46-53. by Ivan Ohlídal, Milan Líbezný posted to ellipsometry immersion by eyliu on 2009-06-17 17:39:51 as
	Measurement of N in nitrided oxides using spectroscopic immersion ellipsometry [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, No. 3. (1996), pp. 1697-1701. by E. A. Irene, Q. Liu, W. M. Paulson, P. J. Tobin, R. I. Hegde posted to ellipsometry immersion by eyliu on 2009-06-17 17:39:17 as
	Spectroscopic immersion ellipsometry study of the mechanism of Si/SiO[sub 2] interface annealing [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, No. 3. (1992), pp. 427-433. by V. A. Yakovlev, Q. Liu, E. A. Irene posted to ellipsometry immersion by eyliu on 2009-06-17 17:38:39 as
	Si/SiO[sub 2] interface studies by spectroscopic immersion ellipsometry and atomic force microscopy [My Copy] Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 12, No. 5. (1994), pp. 2625-2629. by Q. Liu, J. F. Wall, E. A. Irene posted to ellipsometry immersion by eyliu on 2009-06-17 17:38:14 as
	Immersion ellipsometry [My Copy] Appl. Opt., Vol. 20, No. 22. (15 November 1981), 3821_1. by Jean-Pierre Moy posted to ellipsometry immersion by eyliu on 2009-06-17 17:35:53 as
	A spectroscopic immersion ellipsometry study of SiO2-Si interface roughness for electron cyclotron resonance plasma and thermally oxidized Si surfaces [My Copy] Thin Solid Films, Vol. 313-314, No. 1-2. (13 February 1998), pp. 286-291. by C. Zhao posted to ellipsometry immersion by eyliu on 2009-06-17 17:35:04 as
	Immersion scatterometry for improved nano-scale topography measurements [My Copy] physica status solidi (a), Vol. 205, No. 4. (April 2008), pp. 784-788. by Elson Liu, Fred L. Terry posted to immersion me scatterometry by eyliu on 2008-06-19 18:28:53 as along with 1 person CDivin
	The k[sub 3] coefficient in nonparaxial lambda/NA scaling equations for resolution, depth of focus, and immersion lithography [My Copy] Journal of Microlithography, Microfabrication, and Microsystems, Vol. 1, No. 1. (2002), pp. 7-12. by Burn J. Lin posted to immersion lithography by eyliu on 2007-03-07 15:56:02 as
	Resolution enhancement of 157-nm lithography by liquid immersion [My Copy] Optical Microlithography XV, Vol. 4691, No. 1. (2002), pp. 459-465. by Michael Switkes, Mordechai Rothschild edited by Anthony Yen posted to immersion lithography by eyliu on 2007-02-26 20:37:48 as
	Implications of immersion lithography on 193-nm photoresists [My Copy] Advances in Resist Technology and Processing XXI, Vol. 5376, No. 1. (2004), pp. 34-43. by Christopher J. Taylor, Charles R. Chambers, Ryan Deschner, et al.Robert J. Lesuer, Willard E. Conley, Sean D. Burns, C. G. Willson edited by John L. Sturtevant posted to immersion lithography by eyliu on 2007-02-23 16:56:18 as along with 2 people kewms Pat4TFM
	Extending optics to 50 nm and beyond with immersion lithography [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 6. (2003), pp. 2794-2799. by M. Switkes, R. R. Kunz, M. Rothschild, R. F. Sinta, M. Yeung, S. Y. Baek posted to immersion lithography by eyliu on 2007-02-23 16:53:40 as
	Liquid immersion lithography: Why, how, and when? [My Copy] The 48th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Vol. 22, No. 6. (2004), pp. 2877-2881. by M. Rothschild, T. M. Bloomstein, R. R. Kunz, et al.V. Liberman, M. Switkes, S. T. Palmacci, J. H. C. Sedlacek, D. Hardy, A. Grenville posted to immersion lithography by eyliu on 2007-02-21 18:12:01 as
	The interaction of water with solid surfaces: Fundamental aspects [My Copy] Surface Science Reports, Vol. 7, No. 6-8. (October 1987), pp. 211-385. by Patricia A. Thiel, Theodore E. Madey posted to immersion solid-state water by eyliu on 2007-02-21 17:36:16 as
	Immersion lens microscopy of photonic nanostructures and quantum dots [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 8, No. 5. (2002), pp. 1051-1059. by B. B. Goldberg, S. B. Ippolito, L. Novotny, Zhiheng Liu, M. S. Unlu posted to immersion photonics by eyliu on 2006-05-26 20:22:10 as

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diffraction	34
ellipsometry	34
gratings	33
water	30
computation	29
solid-state	29
multipole	26
immersion	25
scatterometry	25
diffraction-tomography	24
elections	15
social-networks	15
optical-properties	14
photonic-crystals	14
coupled-wave	13
lithography	12
metrology	12
particle-physics	12
phase-retrieval	12
photonics	12
book	11
silicon	11
image-reconstruction	10
biophysics	9
climate-change	9
mathematics	9
optics	9
friends	8
nonlinear-optics	8
optimization	8
quantum-optics	8
superresolution	8
band-structure	7
citation	7
effective-medium	7
negative-refraction	7
synthetic-aperture	7
graphene	6
optical-coherence	6
superconductivity	6
degassing	5
microscopy	5
surface-plasmons	5
terahertz	5
transistor	5
confocal	4
density-functional-theory	4
diffuse-optical-tomography	4
energy	4
fft	4
inverse-problems	4
matrix	4
microfabrication	4
molecular-dynamics	4
optical-coherence-tomography	4
scattering	4
signal-processing	4
tomography	4
transport-of-intensity	4
chemical-synthesis	3
communication-theory	3
computer-science	3
control-theory	3
convex-optimization	3
curved-focal-plane	3
electrical-engineering	3
environment	3
fiber	3
filter-diagonalization	3
fluid-mechanics	3
gecko	3
glaucoma	3
harmonic-inversion	3
image-processing	3
laser	3
magnetic-resonance	3
microfluidics	3
microwave	3
music	3
near-field	3
optical-design	3
quantum-information	3
quantum-mechanics	3
science	3
scotch-tape	3
solar	3
subwavelength-diffraction	3
tamiflu	3
temperature	3
wigner-distribution	3
absolute-pitch	2
angular-spectrum	2
apocalypse	2
asymptotic-methods	2
biography	2
cancer	2
cell-phones	2
cellular	2
coincidence-imaging	2
compressed-sensing	2
computer-vision	2
continuous-enrollment	2
crystallography	2
education	2
electron-microscopy	2
goto	2
gravitation	2
greens-function	2
holographic-principle	2
holography	2
integral-equations	2
interaction-free-measurement	2
interference	2
kkr	2
me	2
measurement	2
meniscus	2
modulation-instability	2
neuroscience	2
optical-polarization	2
optical-sectioning	2
optical-tomography	2
optical-tweezers	2
pattern-recognition	2
phase-space	2
photon-density-waves	2
plane-wave-expansion	2
polymer	2
population	2
programming	2
quantum-measurement	2
scientometrics	2
sonoluminescence	2
speckle	2
statistics	2
string-theory	2
vacuum	2
wigner-seitz	2
woods-anomalies	2
accidents	1
air	1
ambiguity-function	1
ammonia	1
atomic-force-microscopy	1
audio	1
augmented-plane-wave	1
beer	1
born-approximation	1
casimir	1
chemical	1
coherent-control	1
coherent-states	1
combinatorics	1
computational-imaging	1
computed-tomography	1
condensed-matter	1
coupled-mode	1
culture	1
dantzig	1
daylight-saving-time	1
detector	1
displays	1
dna	1
drug	1
engineering-education	1
epidemiology	1
ethanol	1
fdtd	1
feedback	1
feynman	1
finance	1
flu	1
food	1
frequency-comb	1
fusion	1
gender	1
geometry	1
graph	1
gun-control	1
homing-pigeons	1
image-restoration	1
independent-component-analysis	1
infrared	1
iraq	1
language	1
life-expectancy	1
lighting	1
lightning	1
linguistics	1
materials	1
matlab	1
mechanics	1
memory	1
mesh-generation	1
moments	1
monte-carlo	1
nanotube	1
navigation	1
nobel	1
noise	1
orthogonalized-plane-wave	1
parthenogenesis	1
particle-in-cell	1
perturbation-theory	1
physics-education	1
polarimetry	1
politics	1
potential-theory	1
psychology	1
quantum-computation	1
regularization	1
remote-sensing	1
resonance	1
roads	1
robot	1
rubiks-cube	1
rytov-approximation	1
sampling	1
segmentation	1
signal-reconstruction	1
smoking	1
solar-concentrator	1
solid-immersion	1
source-coding	1
stem-cells	1
stimulated-emission-depletion	1
structured-illumination	1
supercontinuum	1
superluminal	1
technology	1
tight-binding	1
traffic	1
tunneling	1
unsolved-problems	1
vampires	1
vibrations	1
vision	1
visualization	1
wavefront-coding	1
waveguide	1
waveguides	1
x-rays	1

eyliu's immersion [25 articles] Export

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