The development of the [gamma]/[gamma]' microstructure during high-temperature annealing and deformation is investigated in a series of experimental nickel-base superalloys, with varying contents of alloying elements, in particular rhenium, ruthenium and iridium. Some samples were creep-deformed in compression at 950 [deg]C to different plastic strains [epsilon]pl, while others were aged at 1000 [deg]C. By investigating the resulting microstructures one can deduce that the development of the [gamma]' microstructure is influenced in two ways by the alloying elements. The lattice misfit and thereby the coherency stresses between [gamma]' phase and [gamma] matrix are altered but also the rate of diffusion in the [gamma] matrix. While coherency stresses are the driving force for changes of the [gamma]' shape at elevated temperatures, the development of the [gamma]' structure itself is diffusion-controlled. To understand the effects of alloying elements on the development of the [gamma]' structure, the modifications of both the lattice misfit and the modifications of diffusion rate caused by the alloying elements have to be taken into account.