hidef's library 31 articles Export

	Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C[sub 4]F[sub 8]- and CF[sub 4]-based discharges [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, No. 3. (2009), pp. 1165-1179. by S. Engelmann, R. L. Bruce, F. Weilnboeck, et al.M. Sumiya, T. Kwon, R. Phaneuf, G. S. Oehrlein, C. Andes, D. Graves, D. Nest, E. A. Hudson posted to no-tag by hidef on 2009-05-25 01:31:17 as
	Wetting Behaviors of Individual Nanostructures [My Copy] Langmuir, Vol. 25, No. 12. (16 June 2009), pp. 6599-6603. by Tak-Sing Wong, Adam P. Huang, Chih-Ming Ho posted to wetting by hidef on 2009-05-25 01:15:27 as along with 1 person JonasGroten
	Adsorption and Desorption of Nonionic Surfactants on Silica from Toluene Studied by ATR-FTIR [My Copy] Langmuir, Vol. 0, No. 0. (0000) by Rico F. Tabor, Julian Eastoe, Peter Dowding posted to adsorption silica surfactant by hidef on 2009-05-18 01:50:57 as
	Estimation of the dielectric properties of low-k materials using optical spectroscopy [My Copy] Applied Physics Letters, Vol. 79, No. 14. (2001), pp. 2231-2233. by K. Postava, T. Yamaguchi, M. Horie posted to low-k se by hidef on 2009-05-11 01:47:35 as
	Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization [My Copy] Journal of Applied Physics, Vol. 94, No. 10. (2003), pp. 6697-6707. by Alfred Grill, Deborah A. Neumayer posted to ftir low-k by hidef on 2009-05-11 01:38:46 as
	Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics [My Copy] Applied Physics Letters, Vol. 93, No. 19. (2008), 192909. by H. Shi, J. Bao, R. S. Smith, et al.H. Huang, J. Liu, P. S. Ho, M. L. Mcswiney, M. Moinpour, G. M. Kloster posted to low-k plazma-damage by hidef on 2009-05-11 01:17:29 as
	The adsorption and volumetric properties of triton x-100 and propanol mixtures [My Copy] Journal of Colloid and Interface Science (4 May 2009) by Anna Zdziennicka posted to miscellaneous by hidef on 2009-05-07 09:41:35 as
	Conductive Silver Patterns via Ethylene Glycol Vapor Reduction of Ink-jet Printed Silver Nitrate Tracks on a Polyimide Substrate [My Copy] Thin Solid Films (4 May 2009) by Jung-Tang Wua, Steve L. Hsu, Ming-Hsiu Tsaia, Weng-Sing Hwang posted to ink-jet-circuit silver by hidef on 2009-05-07 09:37:25 as
	A review of advanced scanning probe microscope analysis of functional films and semiconductor devices [My Copy] Thin Solid Films (23 April 2009) by Günther Benstetter, Roland Biberger, Dongping Liu posted to analysis spm by hidef on 2009-05-07 07:44:24 as
	High Performance Photoresist Planarization Process by CMP with Resin Abrasive for Trench-First Cu/Low-k Dual Damascene Process [My Copy] Journal of The Electrochemical Society, Vol. 156, No. 7. (2009), pp. H548-H554. by Yukiteru Matsui, Satoko Seta, Masako Kinoshita, et al.Yoshikuni Tateyama, Atsushi Shigeta, Takeshi Nishioka, Hiroyuki Yano, Hirotaka Shida, Kazuo Nishimoto, Masabumi Masuko posted to cmp jsr toshiba by hidef on 2009-05-07 07:36:59 as
	General Methodology for Evaluating the Adhesion Force of Drops and Bubbles on Solid Surfaces [My Copy] Langmuir, Vol. 25, No. 11. (2 June 2009), pp. 6143-6154. by C. Antonini, F. J. Carmona, E. Pierce, M. Marengo, A. Amirfazli posted to droplet by hidef on 2009-05-07 07:25:58 as
	Adsorption of Poly(methyl methacrylate) on Concave Al2O3 Surfaces in Nanoporous Membranes [My Copy] Langmuir, Vol. 0, No. 0. (0000) by Grady Nunnery, Eli Hershkovits, Allen Tannenbaum, Rina Tannenbaum posted to adsorption nano-structure by hidef on 2009-05-07 07:24:20 as
	Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO2 Compatible Salt [My Copy] Langmuir, Vol. 0, No. 0. (0000) by Amy E. Zweber, Mark Wagner, James Deyoung, Ruben G. Carbonell posted to developing diffusion by hidef on 2009-05-07 07:21:10 as
	Nonlinear Dependence of Cu Dishing Depth on the Microstructure of Polishing Pads during Chemical Mechanical Polishing [My Copy] Journal of The Electrochemical Society, Vol. 156, No. 7. (2009), pp. H535-H539. by Te M. Kung, Chuan P. Liu, Shih C. Chang, Kei W. Chen, Ying L. Wang posted to cmp by hidef on 2009-05-01 00:04:52 as
	Controlling Scratching in Cu Chemical Mechanical Planarization [My Copy] Journal of The Electrochemical Society, Vol. 156, No. 7. (2009), pp. H528-H534. by T. Eusner, N. Saka, J. H. Chun, S. Armini, M. Moinpour, P. Fischer posted to cmp by hidef on 2009-05-01 00:03:31 as
	Cationic Comb Polymer Superdispersants for Colloidal Silica Suspensions [My Copy] Langmuir, Vol. 0, No. 0. (0000) by Summer K. Rhodes, Robert H. Lambeth, Jaime Gonzales, Jeffrey S. Moore, Jennifer A. Lewis* posted to silica by hidef on 2009-04-30 02:46:13 as
	Sliding behavior of liquid droplets on tilted Langmuir–Blodgett surfaces [My Copy] Journal of Colloid and Interface Science, Vol. 317, No. 1. (01 January 2008), pp. 247-254. by Murielle Bouteau, Sophie Cantin, Fewzi Benhabib, Françoise Perrot posted to droplet process by hidef on 2009-04-28 03:50:02 as
	DROP IMPACT DYNAMICS: Splashing, Spreading, Receding, Bouncing [My Copy] Annual Review of Fluid Mechanics, Vol. 38, No. 1. (January 2006), pp. 159-192. by A. L. Yarin posted to droplet review by hidef on 2009-04-28 01:36:56 as
	Drop Impact on Porous Superhydrophobic Polymer Surfaces [My Copy] Langmuir, Vol. 24, No. 24. (16 December 2008), pp. 14074-14077. by R. Rioboo, M. Voué, A. Vaillant, J. De Coninck posted to droplet process by hidef on 2009-04-28 01:27:40 as along with 1 person JonasGroten
	Impact of droplets onto inclined surfaces [My Copy] Journal of Colloid and Interface Science, Vol. 286, No. 2. (15 June 2005), pp. 661-669. by S. Sikalo, C. Tropea, E. Ganic posted to droplet process by hidef on 2009-04-28 01:23:10 as
	Drop impact process on a hydrophobic grooved surface [My Copy] Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 317, No. 1-3. (20 March 2008), pp. 694-704. by R. Kannan, D. Sivakumar posted to droplet process by hidef on 2009-04-28 01:16:12 as
	Dynamic behaviors of droplet impact and spreading—Water on glass and paraffin [My Copy] Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 339, No. 1-3. (01 May 2009), pp. 224-231. by Meng-Jiy Wang, Fang-Hsing Lin, Jun Y. Ong, Shi-Yow Lin posted to droplet process by hidef on 2009-04-28 01:01:01 as
	Hydrophobicity: Two faces of water [My Copy] Nature, Vol. 417, No. 6888. (30 May 2002), pp. 491-491. by David Chandler posted to water by hidef on 2009-04-27 04:03:13 as along with 2 people edws sas
	Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices [My Copy] Journal of The Electrochemical Society, Vol. 156, No. 6. (2009), pp. H487-H494. by Dandu P. R. Veera, A. Natarajan, S. Hegde, S. V. Babu posted to cmp by hidef on 2009-04-27 03:51:38 as
	Degradation of Electromigration Lifetime of Cu/Low-k Interconnects by Postannealing [My Copy] Japanese Journal of Applied Physics, Vol. 48 (20 April 2009), 046507. by Yumi Kakuhara, Kazuyoshi Ueno posted to defect process by hidef on 2009-04-27 03:46:32 as
	Quantification of Water and Silanol Species on Various Silicas by Coupling IR Spectroscopy and in-Situ Thermogravimetry [My Copy] Langmuir, Vol. 0, No. 0. (0000) by Jean-Paul Gallas, Jean-Michel Goupil, Alexandre Vimont, et al.Jean-Claude Lavalley, Barbara Gil, Jean-Pierre Gilson, Olivier Miserque posted to silica by hidef on 2009-04-27 03:31:23 as
	An Empirical Dielectric Erosion Formula in Metal Chemical Mechanical Planarization [My Copy] Journal of The Electrochemical Society, Vol. 153, No. 6. (2006), pp. G582-G586. by Zhan Chen, Fred Sun, Robert Vacassy posted to cmp bacmp wcmp by hidef on 2009-04-27 02:01:49 as
	Wetting of Nanogrooved Polymer Surfaces [My Copy] Langmuir, Vol. 23, No. 14. (1 July 2007), pp. 7724-7729. by Janne T. Hirvi, Tapani A. Pakkanen posted to wetting by hidef on 2009-04-25 17:35:40 as
	Removal characteristics of resists having different chemical structures by using ozone and water [My Copy] Japanese Journal of Applied Physics, Vol. 48, No. 2. (2009), 026505. by Hideo Horibe, Masashi Yamamoto, Yousuke Goto, Toshinori Miura, Seiichi Tagawa posted to stripper by hidef on 2009-04-25 17:32:38 as
	Advances in adsorption of surfactants and their mixtures at solid/solution interfaces [My Copy] Advances in Colloid and Interface Science, Vol. 123-126 (16 November 2006), pp. 213-229. by R. Zhang, P. Somasundaran posted to adsorption review surfactant by hidef on 2009-04-25 17:17:26 as
	A streaming electrification model based on differences of work function between solid materials and insulating oil [My Copy] Journal of Electrostatics, Vol. 63, No. 6-10. (June 2005), pp. 735-741. by H. Kitabayashi, K. Tsuji, K. Itoh posted to electrification process by hidef on 2009-04-25 17:06:37 as

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process	7
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silica	3
wetting	2
review	2
surfactant	2
se	1
developing	1
defect	1
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ink-jet-circuit	1
electrification	1
miscellaneous	1
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plazma-damage	1
silver	1
analysis	1
ftir	1
diffusion	1
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