Magnetic induction machines integrated into bulk-micromachined silicon Magnetic induction machines integrated into bulk-micromachined silicon Export

@article{arnold2006c, abstract = {This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni/sub 80/Fe/sub 20/, Co/sub 65/Fe/sub 18/Ni/sub 17/) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 /spl mu/N/spl middot/m.}, author = {Arnold, D. P. and Arnold, D. P. and Das, S. and Das, S. and Cros, F. and Cros, F. and Zana, I. and Allen, M. G. and Lang, J. H.}, booktitle = {Microelectromechanical Systems, Journal of}, citeulike-article-id = {2112472}, citeulike-linkout-0 = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1618726}, journal = {Microelectromechanical Systems, Journal of}, keywords = {afpm, magnetic, pm}, number = {2}, pages = {406--414}, posted-at = {2008-12-10 07:50:45}, priority = {2}, title = {Magnetic induction machines integrated into bulk-micromachined silicon Magnetic induction machines integrated into bulk-micromachined silicon}, url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1618726}, volume = {15}, year = {2006} }

TY - JOUR ID - arnold2006c L3 - citeulike-article-id:2112472 N2 - This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni/sub 80/Fe/sub 20/, Co/sub 65/Fe/sub 18/Ni/sub 17/) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 /spl mu/N/spl middot/m. IS - 2 JF - Microelectromechanical Systems, Journal of EP - 414 TI - Magnetic induction machines integrated into bulk-micromachined silicon Magnetic induction machines integrated into bulk-micromachined silicon VL - 15 T2 - Microelectromechanical Systems, Journal of SP - 406 KW - afpm KW - magnetic KW - pm AU - Arnold, DP AU - Arnold, DP AU - Das, S AU - Das, S AU - Cros, F AU - Cros, F AU - Zana, I AU - Allen, MG AU - Lang, JH PY - 2006/// UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1618726 ER -