Parylene-based electret power generators Export

@article{lo2008, abstract = {An electret power generator is developed using a new electret made of a charged parylene HT\&\#174; thin-film polymer. Here, parylene HT\&\#174; is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HT\&\#174; is measured as high as 3.69 mC m[?]2. Moreover, it is found that, with annealing at 400 \&\#176;C for 1 h before charge implantation, both the long-term stability and the high-temperature reliability of the electret are improved. For the generator, a new design of the stator/rotor is also developed. The new micro electret generator does not require any sophisticated gap-controlling structure such as tethers. With the conformal coating capability of parylene HT\&\#174;, it is also feasible to have the electret on the rotors, which is made of either a piece of metal or an insulator. The maximum power output, 17.98 \&\#181;W, is obtained at 50 Hz with an external load of 80 MO. For low frequencies, the generator can harvest 7.7 \&\#181;W at 10 Hz and 8.23 \&\#181;W at 20 Hz.}, author = {Lo, Hsi-Wen and Tai, Yu-Chong}, citeulike-article-id = {3378229}, citeulike-linkout-0 = {http://dx.doi.org/10.1088/0960-1317/18/10/104006}, doi = {10.1088/0960-1317/18/10/104006}, journal = {Journal of Micromechanics and Microengineering}, keywords = {capacitive, electret, energy-harvesting, parylene}, number = {10}, pages = {104006+}, posted-at = {2008-10-06 01:07:19}, priority = {2}, title = {Parylene-based electret power generators}, url = {http://dx.doi.org/10.1088/0960-1317/18/10/104006}, volume = {18}, year = {2008} }

TY - JOUR ID - lo2008 L3 - citeulike-article-id:3378229 N2 - An electret power generator is developed using a new electret made of a charged parylene HT® thin-film polymer. Here, parylene HT® is a room-temperature chemical-vapor-deposited thin-film polymer that is MEMS and CMOS compatible. With corona charge implantation, the surface charge density of parylene HT® is measured as high as 3.69 mC m[?]2. Moreover, it is found that, with annealing at 400 °C for 1 h before charge implantation, both the long-term stability and the high-temperature reliability of the electret are improved. For the generator, a new design of the stator/rotor is also developed. The new micro electret generator does not require any sophisticated gap-controlling structure such as tethers. With the conformal coating capability of parylene HT®, it is also feasible to have the electret on the rotors, which is made of either a piece of metal or an insulator. The maximum power output, 17.98 µW, is obtained at 50 Hz with an external load of 80 MO. For low frequencies, the generator can harvest 7.7 µW at 10 Hz and 8.23 µW at 20 Hz. IS - 10 JF - Journal of Micromechanics and Microengineering TI - Parylene-based electret power generators VL - 18 SP - 104006 KW - capacitive KW - electret KW - energy-harvesting KW - parylene AU - Lo, Hsi-Wen AU - Tai, Yu-Chong PY - 2008/// UR - http://dx.doi.org/10.1088/0960-1317/18/10/104006 ER -