Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces Export

@article{citeulike:2570578, abstract = {We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest. We demonstrate metal resistors with 100-?m-wide traces fabricated on planar and curved surfaces. The surface profile, mechanical gauge factor, and temperature coefficient of resistance have been characterized. Application of the resistors as hot-wire flow sensors has also been demonstrated. {\copyright} 2004 American Institute of Physics.}, address = {Micro and Nanotechnology Laboratory, Univ. Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL 61801}, author = {Goluch, E. D. and Shaikh, K. A. and Ryu, K. and Chen, J. and Engel, J. and Liu, C.}, citeulike-article-id = {2570578}, citeulike-linkout-0 = {http://dx.doi.org/10.1063/1.1808872}, citeulike-linkout-1 = {http://www.scopus.com/record/display.url?view=extended&origin=resultslist&eid=2-s2.0-9744282635}, doi = {10.1063/1.1808872}, journal = {Appl Phys Lett}, keywords = {mems-sensors, microfluidics}, number = {16}, pages = {3629--3631}, posted-at = {2008-03-21 19:38:43}, priority = {0}, title = {Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces}, url = {http://dx.doi.org/10.1063/1.1808872}, volume = {85}, year = {2004} }

TY - JOUR ID - citeulike:2570578 L3 - citeulike-article-id:2570578 N2 - We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest. We demonstrate metal resistors with 100-?m-wide traces fabricated on planar and curved surfaces. The surface profile, mechanical gauge factor, and temperature coefficient of resistance have been characterized. Application of the resistors as hot-wire flow sensors has also been demonstrated. © 2004 American Institute of Physics. IS - 16 JF - Appl Phys Lett AD - Micro and Nanotechnology Laboratory, Univ. Illinois at Urbana-Champaign, 208 North Wright Street, Urbana, IL 61801 EP - 3631 TI - Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces VL - 85 SP - 3629 KW - mems-sensors KW - microfluidics AU - Goluch, ED AU - Shaikh, KA AU - Ryu, K AU - Chen, J AU - Engel, J AU - Liu, C PY - 2004/// UR - http://dx.doi.org/10.1063/1.1808872 ER -