A method for precision patterning of silicone elastomer and its applications Export

@article{citeulike:2570580, abstract = {This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets. {\copyright} 2004 IEEE.}, address = {Micro Actuators Sensors/Syst. Grp., Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL 61801, United States}, author = {Ryu, K. S. and Wang, X. and Shaikh, K. and Liu, C.}, citeulike-article-id = {2570580}, citeulike-linkout-0 = {http://dx.doi.org/10.1109/JMEMS.2004.832188}, citeulike-linkout-1 = {http://www.scopus.com/record/display.url?view=extended&origin=resultslist&eid=2-s2.0-4344680330}, doi = {10.1109/JMEMS.2004.832188}, journal = {J Microelectromech Syst}, keywords = {microfluidics}, number = {4}, pages = {568--575}, posted-at = {2008-03-21 19:40:18}, priority = {0}, title = {A method for precision patterning of silicone elastomer and its applications}, url = {http://dx.doi.org/10.1109/JMEMS.2004.832188}, volume = {13}, year = {2004} }

TY - JOUR ID - citeulike:2570580 L3 - citeulike-article-id:2570580 N2 - This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets. © 2004 IEEE. IS - 4 JF - J Microelectromech Syst AD - Micro Actuators Sensors/Syst. Grp., Micro and Nanotechnology Laboratory, University of Illinois, Urbana, IL 61801, United States EP - 575 TI - A method for precision patterning of silicone elastomer and its applications VL - 13 SP - 568 KW - microfluidics AU - Ryu, KS AU - Wang, X AU - Shaikh, K AU - Liu, C PY - 2004/// UR - http://dx.doi.org/10.1109/JMEMS.2004.832188 ER -