kristgy's deposition [34 articles] Export

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	PECVD for Passive Photonic Applications [My Copy] (July 2003) by Crhis Hodson posted to bpsg deposition hardcopy pecvd silicon_oxide by kristgy on 2007-04-23 17:18:26 as
	Optical properties of LPCVD silicon oxynitride [My Copy] Thin Solid Films, Vol. 337, No. 1-2. (11 January 1999), pp. 82-84. by M. Modreanu, N. Tomozeiu, P. Cosmin, Mariuca Gartner posted to deposition ellipsometry experiment lpcvd processing refractive_index silicon_nitride silicon_oxynitride by kristgy on 2007-02-22 14:54:23 as
	Growth and characterization of silicon nitride films for optoelectronics applications [My Copy] Optical Materials, Vol. 27, No. 2. (November 2004), pp. 139-146. by R. K. Pandey, L. S. Patil, Jaspal P. Bange, D. K. Gautam posted to absorption deposition experiment lpcvd processing refractive_index silicon_nitride stress by kristgy on 2007-02-22 14:48:16 as
	Conformal deposition of LPCVD TEOS [My Copy] Micromachining and Microfabrication Process Technology VII, Vol. 4557, No. 1. (2001), pp. 329-340. by Paul Mccann, Kumar Somasundram, Stephen Byrne, Andrew Nevin edited by Jean M. Karam, John A. Yasaitis posted to teos experiment deposition by kristgy on 2007-01-12 11:43:36 as
	Fluorescent Plasma Nanocomposite Thin Films Containing Nonaggregated Rhodamine 6G Laser Dye Molecules [My Copy] Langmuir, Vol. 22, No. 16. (1 August 2006), pp. 6719-6722. by A. Barranco, P. Groening posted to deposition dye first_paper hardcopy pecvd phodye phodye_group_papers polymeric processing by kristgy on 2006-11-22 15:21:11 as
	Adiabatic 3-dB couplers, filters, and multiplexers made with silica waveguides on silicon [My Copy] Lightwave Technology, Journal of, Vol. 10, No. 1. (1992), pp. 46-50. by R. Adar, C. H. Henry, R. F. Kazarinov, R. C. Kistler, G. R. Weber posted to bpsg deposition experiment lpcvd mach-zehnder processing psg reflow silicon_oxide waveguide by kristgy on 2006-11-21 15:00:20 as
	Large increase of refractive index and compactness in siloxane-type spin-on-glass induced by ion implantation [My Copy] Applied Physics Letters, Vol. 57, No. 2. (1990), pp. 108-110. by N. Moriya, Shacham Y. Diamand, R. Kalish posted to deposition experiment processing refractive_index silicon_oxide spin_on_glass by kristgy on 2006-11-20 11:49:24 as along with 1 person hanss
	Optical waveguide fabrication by combination of spin-on-glass and plasma-enhanced chemical vapor deposition for optoelectronic integration [My Copy] Optical Engineering, Vol. 42, No. 4. (2003), pp. 898-899. by Tomiyuki Arakawa, Tatsushi Hasegawa, Masatoshi Kagawa posted to deposition experiment hardcopy polysilazane processing refractive_index silicon_oxide spin_on_glass by kristgy on 2006-11-20 10:32:51 as along with 1 person hanss
	Photonic circuits integrated with CMOS compatible photodetectors [My Copy] Optical Materials, Vol. 17, No. 1-2. ( 2001), pp. 201-205. by Dana Cristea, F. Craciunoiu, M. Modreanu, M. Caldararu, I. Cernica posted to deposition photodiode processing sabio spin_on_glass waveguide silicon_oxynitride by kristgy on 2006-11-13 15:13:54 as
	The flow characteristics of borophosphosilicate (TEOS based) glass [My Copy] VLSI Multilevel Interconnection Conference, 1991, Proceedings., Eighth International IEEE (1991), pp. 68-74. by S. Chittipeddi, A. N. Velaga, A. K. Nanda, W. T. Cochran, R. N. Graver posted to bpsg deposition diborane lpcvd processing silicon_oxide teos by kristgy on 2006-11-10 16:00:22 as
	Growth of borosilicate and borophosphosilicate films at low pressure and temperature [My Copy] Thin Solid Films, Vol. 130, No. 1-2. (16 August 1985), pp. 103-111. by Arthur J. Learn, Bill Baerg posted to bpsg bsg deposition diborane lpcvd phosphine processing psg silicon_oxide teos by kristgy on 2006-11-10 15:20:41 as
	Low-pressure deposition of high-quality SiO[sub 2] films by pyrolysis of tetraethylorthosilicate [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 5, No. 6. (1987), pp. 1555-1563. by F. S. Becker, D. Pawlik, H. Anzinger, A. Spitzer posted to deposition experiment lpcvd processing silicon_oxide teos by kristgy on 2006-11-10 14:53:24 as
	The High Temperature Deposition and Evaluation of Phosphorus- or Boron-Doped Silicon Dioxide Films [My Copy] Journal of The Electrochemical Society, Vol. 126, No. 2. (1979), pp. 313-319. by A. C. Adams, C. D. Capio, S. E. Haszko, G. I. Parisi, E. I. Povilonis, Mcd posted to bsg deposition diborane experiment lpcvd phosphine processing psg silane silicon_oxide by kristgy on 2006-11-10 10:04:24 as
	The Deposition of Silicon Dioxide Films at Reduced Pressure [My Copy] Journal of The Electrochemical Society, Vol. 126, No. 6. (1979), pp. 1042-1046. by A. C. Adams, C. D. Capio posted to 100_citations deposition experiment lpcvd processing psg silicon_oxide teos by kristgy on 2006-11-10 09:58:40 as
	The step coverage of undoped and phosphorus-doped SiO[sub 2] glass films [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 1, No. 1. (1983), pp. 54-61. by R. M. Levin, Evans K. Lutterodt posted to 50_citations deposition experiment hardcopy lpcvd processing psg reflow silicon_oxide teos by kristgy on 2006-11-08 16:13:21 as
	$My PDF heimala_92_refractive.pdf$ Refractive index behaviour of phosphorus-doped planar silica waveguides [My Copy] Journal of Physics D: Applied Physics, Vol. 25, No. 5. (1992), pp. 733-739. by P. Heimala, J. Aarnio posted to deposition experiment lpcvd processing psg reflow refractive_index sabio silicon_oxide waveguide by kristgy on 2006-11-08 15:43:57 as
	Water Absorption and Densification of Phosphosilicate Glass Films [My Copy] Journal of The Electrochemical Society, Vol. 129, No. 8. (1982), pp. 1765-1770. by R. M. Levin posted to 25_citations absorption biosensor deposition experiment hardcopy lpcvd processing psg reflow silicon_oxide teos water waveguide by kristgy on 2006-11-08 15:29:52 as
	Silicon Dioxide Deposition by Atmospheric Pressure and Low-Temperature CVD Using TEOS and Ozone [My Copy] Journal of The Electrochemical Society, Vol. 137, No. 9. (1990), pp. 2883-2887. by K. Fujino, Y. Nishimoto, N. Tokumasu, K. Maeda posted to 50_citations deposition first_paper ozone processing silicon_oxide teos by kristgy on 2006-11-06 12:42:58 as
	Dielectric film deposition by atmospheric pressure and low temperature CVD using TEOS, ozone, and new organometallic doping sources [My Copy] VLSI Multilevel Interconnection Conference, 1989. Proceedings., Sixth International IEEE (1989), pp. 382-389. by Y. Nishimoto, N. Tokumasu, K. Fujino, K. Maeda posted to bpsg deposition processing psg reflow silicon_oxide teos by kristgy on 2006-11-06 12:22:31 as
	Low Pressure Deposition of Phosphosilicate Glass Films [My Copy] Journal of The Electrochemical Society, Vol. 129, No. 7. (1982), pp. 1588-1592. by R. M. Levin, A. C. Adams posted to 25_citations deposition experiment hardcopy lpcvd processing psg refractive_index silicon_oxide teos by kristgy on 2006-11-06 12:09:58 as
	Catalytic effect of phosphine on the deposition of phosphosilicate glass from tetraethoxysilane [My Copy] Applied Physics Letters, Vol. 62, No. 7. (1993), pp. 699-701. by Laura L. Tedder, John E. Crowell, Kevin J. Uram, John K. Shugrue, D. Tribula posted to deposition experiment hardcopy lpcvd processing psg silicon_oxide teos by kristgy on 2006-11-06 10:15:51 as
	Gap Fill and Film Reflow Capability of Subatmospheric Chemical Vapor Deposited Borophosphosilicate Glass [My Copy] Journal of The Electrochemical Society, Vol. 143, No. 4. (1996), pp. 1414-1421. by Stuardo Robles, Kathleen Russell, Maria Galiano, V. Siva, Victoria Kithcart, Bang C. Nguyen posted to bpsg deposition experiment hardcopy lpcvd processing reflow silicon_oxide teos by kristgy on 2006-11-06 09:42:24 as
	ULSI Gap Filling with a Thin CVD SiO2-Based Insulator: A Review [My Copy] Russian Microelectronics, Vol. V31, No. 4. (1 July 2002), pp. 224-231. by V. Y. Vassiliev posted to bpsg deposition hardcopy processing reflow review silicon_oxide by kristgy on 2006-11-06 09:16:44 as
	Trends in void-free pre-metal CVD dielectrics [My Copy] Solid State Technology, Vol. 44, No. 3. (March 2001), 129. by V. Y. Vassiliev, J. L. Sudijono, A. Cuthbertson posted to bpsg deposition hardcopy lpcvd reflow review silicon_oxide by kristgy on 2006-11-06 08:44:11 as
	Process and film characterization of low pressure tetraethylorthosilicate--borophosphosilicate glass [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 4, No. 3. (1986), pp. 732-744. by F. S. Becker, D. Pawlik, H. Schafer, G. Staudigl posted to bpsg deposition experiment hardcopy lpcvd reflow silicon_oxide teos by kristgy on 2006-11-05 22:17:59 as
	Low Pressure Deposition of Doped SiO[sub 2] by Pyrolysis of Tetraethylorthosilicate (TEOS) [My Copy] Journal of The Electrochemical Society, Vol. 134, No. 11. (1987), pp. 2923-2931. by F. S. Becker, S. Rohl posted to bpsg deposition experiment hardcopy lpcvd processing reflow silicon_oxide teos by kristgy on 2006-11-05 22:05:54 as
	Planarization Processes and Applications: II. B[sub 2]O[sub 3]/P[sub 2]O[sub 5] Doped GeO[sub 2]-SiO[sub 2] Glasses [My Copy] Journal of The Electrochemical Society, Vol. 146, No. 10. (1999), pp. 3872-3885. by Darrell L. Simpson, Robert T. Croswell, Arnold Reisman, Dorota Temple, Kenneth C. Williams posted to bpsg deposition germanosilicate processing reflow silane silicon_oxide by kristgy on 2006-10-24 14:03:27 as
	Suppression of Water Absorption in Borophosphosilicate Glass Thin Layers with High Boron Concentration [My Copy] Journal of The Electrochemical Society, Vol. 138, No. 8. (1991), pp. 2367-2370. by K. Nauka, Charles Liu posted to absorption bpsg deposition experiment hardcopy lpcvd processing silane water by kristgy on 2006-10-24 13:57:08 as
	Kinetics and Uniformity of Deposition of Borophosphosilicate Glass from Silane and Oxygen in a Single-Wafer Reactor [My Copy] Journal of The Electrochemical Society, Vol. 139, No. 9. (1992), pp. 2573-2579. by Daniel M. Dobkin posted to bpsg deposition experiment hardcopy lpcvd processing silane silicon_oxide by kristgy on 2006-10-24 13:53:27 as
	Effects of borophosilicate film post-growth treatments on the flow angle [My Copy] Thin Solid Films, Vol. 185, No. 2. (March 1990), pp. 363-371. by Y. H. Tsai, S. L. Hsu, F. C. Tseng, C. S. Yoo posted to bpsg deposition experiment hardcopy lpcvd processing reflow silane silicon_oxide by kristgy on 2006-10-24 13:47:33 as
	Properties of borophosphosilicate glass films deposited by different chemical vapor deposition techniques [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, No. 2. (1992), pp. 633-642. by S. Rojas, R. Gomarasca, L. Zanotti, et al.A. Borghesi, A. Sassella, G. Ottaviani, L. Moro, P. Lazzeri posted to bpsg deposition experiment hardcopy lpcvd pecvd processing reflow silicon_oxide by kristgy on 2006-10-24 13:21:44 as
	CVD of SiO<SUB><FONT SIZE='-1'>2</FONT></SUB> and related materials: An overview [My Copy] Advanced Materials for Optics and Electronics, Vol. 6, No. 2. (1996), pp. 101-114. by Andrew R. Barron posted to bpsg bsg deposition hardcopy processing psg reflow review silicon_oxide by kristgy on 2006-10-24 13:04:48 as
	Planarization Processes and Applications: I. Undoped GeO[sub 2]-SiO[sub 2] Glasses [My Copy] Journal of The Electrochemical Society, Vol. 146, No. 10. (1999), pp. 3860-3871. by Darrell L. Simpson, Robert T. Croswell, Arnold Reisman, Dorota Temple, Kenneth C. Williams posted to deposition germanosilicate processing reflow silane silicon_oxide by kristgy on 2006-10-24 12:38:07 as
	Plasma-Activated Deposition and Properties of Phosphosilicate Glass Film [My Copy] Journal of The Electrochemical Society, Vol. 131, No. 8. (1984), pp. 1865-1870. by Akira Takamatsu, Miyoko Shibata, Hideo Sakai, Takeo Yoshimi posted to deposition experiment hardcopy processing psg reflow silane silicon_oxide by kristgy on 2006-10-24 11:44:25 as

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waveguide	279
experiment	277
optics	233
hardcopy	174
biosensor	167
silicon	166
silicon_oxide	162
processing	148
ring_resonator	142
theory	126
refractive_index	121
slot_waveguide	100
polymeric	85
review	85
simulation	83
microfluidics	81
sensor	76
silicon_nitride	75
sabio	67
su-8	66
lithography	56
mems	55
laser	51
thermo_optic	47
surface_plasmon_resonance	43
cavity_resonator	39
coupler	35
fiber_optics	35
grating	35
deposition	34
electron_beam	32
photonics	32
water	32
lpcvd	28
photonic_crystal	27
sidewall_roughness	27
absorption	26
dye	26
tunable	26
protein	25
kth_papers	24
resonant_sensor	24
50_citations	23
lab-on-a-chip	23
first_paper	22
polarization	22
citing_me	21
mst_papers	21
sabio_group_papers	20
100_citations	19
disk_resonator	19
fabrication	19
pdms	19
reflow	19
biotas	18
bpsg	17
non_linear	17
pmma	17
soi	17
adhesive_bonding	16
heterogeneous_integration	16
light_emission	16
teos	16
electrodynamics	15
ellipsometry	15
spectroscopy	15
sputtering	15
thesis_theory	15
electro_optic	14
kerr_effect	14
magnetron	14
psg	14
compound_semiconductor	12
diamond	12
gallium_arsenide	12
imaging	12
mach-zehnder	12
own_paper	12
spin_on_glass	12
thermo_mechanic	12
thesis_prevwork	12
25_citations	11
antibody	11
det_lim_comp	11
eigenmode_expansion	11
etching	11
fluid_dynamics	11
hybrid	11
infrared	11
modulator	11
silicon_oxynitride	11
stress	11
bcb	10
camfr	10
dispersion	10
hipims	10
label-free	10
pecvd	10
slow_light	10
athermal	9
etch_rates	9
ethanol	9
indium_phosphide	9
nanoimprint	9
wafer_bonding	9
afm	8
dna	8
erbium	8
kthb	8
photodiode	8
silane	8
surface_functionalization	8
vertical	8
vr_prop	8
250_citations	7
biotin	7
bsa	7
chromium	7
cytop	7
liquid_core	7
metal	7
molecular_simulation	7
optical_trapping	7
physics	7
resistivity	7
rhodamine	7
spherical_resonator	7
young	7
500_citations	6
biology	6
cell	6
nanoparticles	6
plasma	6
visible	6
diffusion	5
electrophoresis	5
farfield	5
germanium	5
gold	5
gyroscope	5
hsq	5
imprint	5
methanol	5
microwave_absorption	5
multiplex	5
nitrobenzene	5
not_online	5
planar_inductor	5
porous	5
raman	5
splitting	5
sucrose	5
terahertz	5
thermal_actuator	5
titanium_oxide	5
biacore	4
bragg_grating	4
bsg	4
course_material	4
density	4
errata	4
finite_element	4
fluorescence	4
hi_paper	4
horizontal	4
multimode	4
nabiose	4
nacl	4
opto_mechanical	4
polycrystalline	4
refractometry	4
solitary_waves	4
statistics	4
thermal_oxidation	4
toroidial_resonator	4
ultraviolet	4
1000_citations	3
diborane	3
difference_interferometer	3
etch-back	3
frequency_domain	3
isopropanol	3
liquid_crystal	3
microlens	3
multi_slot	3
oxygen	3
pedestal	3
rate_constant	3
refutal	3
thermal_conductivity	3
wetting	3
wishlist	3
antireflection	2
author_guidelines	2
capillary	2
chirped	2
conducting_polymer	2
ddmebt	2
detector	2
edge_coupling	2
eit	2
electrochemistry	2
electrowetting	2
energy	2
erroneous	2
frequency_comb	2
gas	2
germanosilicate	2
gigahertz	2
hf	2
indium_tin_oxide	2
interferometer	2
kramers-kronig	2
mach_zehnder_interferometer	2
mass_spectrometry	2
mass_transport	2
mathematics	2
mechanical	2
membrane	2
microwave	2
native_oxide	2
optically_pumped	2
oscillator	2
patent	2
peag	2
phosphine	2
pml	2
polyimide	2
quartz	2
replication	2
sem	2
silicon_on_insulator	2
snom	2
symmetric	2
thesis_sota	2
through_etched	2
under_etch	2
vapor	2
10_citations	1
acetone	1
asymmetric	1
atmosspheric_plasma	1
atomic_layer_deposition	1
bioinformatics	1
blazed	1
bonding	1
carbon_nanotubes	1
c_band	1
ccd	1
chalcogenide	1
chromatography	1
citeulike	1
cmp	1
comsol	1
crow	1
direct_bonding	1
discharge_layer	1
dpi	1
electronics	1
electrostatic	1
etch-stop	1
failure_analysis	1
fdtd	1
fib	1
fim	1
gallium_nitride	1
genetics	1
geometry	1
german	1
glucose	1
gops	1
handbook	1
history	1
hydrogen	1
immunoassay	1
impedance	1
information	1
inverted_taper	1
kinetics	1
linkage_analysis	1
man-2400	1
molecular_imprinting	1
nanohole	1
nitrotoluene	1
nobel	1
noise	1
optic	1
optofluidic	1
organization	1
ozone	1
peg	1
phase_detection	1
phase_shifter	1
phodye	1
phodye_group_papers	1
photodetector	1
photomixing	1
platinum	1
polycarbonate	1
polysilazane	1
qcm	1
quantum_information	1
raith	1
refuted	1
science	1
second_harmonic_generation	1
sidewall_transfer	1
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size	1
sol_gel	1
standard	1
stm	1
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switch	1
tantalum_oxide	1
tem	1
test	1
thermal_nitridation	1
third_harmonic	1
time_domain	1
titanium_nitride	1
ultrasonic	1
vcsel	1
v_groves	1
virus	1
ytterbium	1
zinc_oxide	1

kristgy's deposition [34 articles] Export

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