kristgy's electron_beam [32 articles] Export

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	CMOS compatible cost-efficient fabrication of SOI grating couplers [My Copy] Microelectronic Engineering, Vol. 86, No. 4-6. (April 2009), pp. 1114-1116. by Jens Bolten, Jens Hofrichter, Nikolaj Moll, et al.Sophie Schönenberger, Folkert Horst, Bert J. Offrein, Thorsten Wahlbrink, Thomas Mollenhauer, Heinrich Kurz posted to soi silicon_oxide silicon lithography hsq grating fiber_optics electron_beam coupler by kristgy on 2009-10-20 21:47:20 as along with 1 person antelius
	Label-free biosensor by protein grating coupler on planar optical waveguides [My Copy] Opt. Lett., Vol. 33, No. 15. (1 August 2008), pp. 1735-1737. by Zhian Lai, Yuli Wang, Nancy Allbritton, G. P. Li, Mark Bachman posted to waveguide silicon_nitride protein pmma lithography grating gops electron_beam bsa biosensor by kristgy on 2009-10-13 13:03:34 as
	Fabrication and characterization of low-loss polymeric waveguides and micro-resonators [My Copy] Journal of the European Optical Society: Rapid Publications, Vol. 1 (12 July 2006) by Jacob Scheuer, Amnon Yariv posted to waveguide thesis_theory theory su-8 ring_resonator polymeric lithography hardcopy experiment electron_beam by kristgy on 2009-10-09 15:32:26 as
	High confinement micron-scale silicon nitride high Q ring resonator [My Copy] Opt. Express, Vol. 17, No. 14. (6 July 2009), pp. 11366-11370. by Alexander Gondarenko, Jacob S. Levy, Michal Lipson posted to citing_me electron_beam experiment fabrication lithography lpcvd man-2400 reflow ring_resonator sidewall_roughness silicon_nitride silicon_oxide by kristgy on 2009-07-24 09:28:14 as
	A reflective microring notch filter and sensor [My Copy] Opt. Express, Vol. 17, No. 13. (22 June 2009), pp. 10731-10737. by Haishan Sun, Antao Chen, Larry R. Dalton posted to electron_beam experiment lithography multiplex polymeric ring_resonator simulation su-8 waveguide by kristgy on 2009-07-24 09:11:09 as
	Optimization of HSQ resist e-beam processing technique on GaAs material [My Copy] Microelectronic Engineering, Vol. 75, No. 2. (August 2004), pp. 177-182. by D. Lauvernier posted to electron_beam experiment gallium_arsenide hsq lithography processing by kristgy on 2009-03-29 16:18:32 as
	Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 5. (2003), pp. 2018-2025. by W. Henschel, Y. M. Georgiev, H. Kurz posted to electron_beam experiment hsq lithography processing by kristgy on 2009-03-29 16:15:29 as
	Three-dimensional siloxane resist for the formation of nanopatterns with minimum linewidth fluctuations [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, No. 1. (1998), pp. 69-76. by Hideo Namatsu, Yasuo Takahashi, Kenji Yamazaki, Toru Yamaguchi, Masao Nagase, Kenji Kurihara posted to electron_beam experiment first_paper hsq lithography processing by kristgy on 2009-03-29 16:13:20 as
	Microring resonators fabricated by electron beam bleaching of chromophore doped polymers [My Copy] Applied Physics Letters, Vol. 92, No. 19. (2008) by Haishan Sun, Antao Chen, Benjamin C. Olbricht, et al.Joshua A. Davies, Philip A. Sullivan, Yi Liao, Larry R. Dalton posted to electron_beam experiment lithography optics polymeric processing ring_resonator waveguide by kristgy on 2008-07-05 08:27:41 as
	Trimming of silicon ring resonator by electron beam induced compaction and strain [My Copy] Opt. Express, Vol. 16, No. 6. (17 March 2008), pp. 3738-3743. by J. Schrauwen, D. Van Thourhout, R. Baets posted to electron_beam processing ring_resonator silicon waveguide by kristgy on 2008-04-10 10:18:28 as
	Integrated optics components and devices using periodic structures [My Copy] Quantum Electronics, IEEE Journal of In Quantum Electronics, IEEE Journal of, Vol. 22, No. 6. (1986), pp. 845-867. by T. Suhara, H. Nishihara posted to 100_citations electron_beam lithography optics review theory coupler grating by kristgy on 2007-11-07 15:21:59 as along with 1 person champak
	Accuracy of proximity correction in electron lithography after development [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, No. 6. (1992), pp. 2459-2467. by V. V. Aristov, B. N. Gaifullin, A. A. Svintsov, S. I. Zaitsev, H. F. Raith, R. Jede posted to electron_beam lithography by kristgy on 2007-11-01 15:29:48 as
	Polymer stamps for nanoimprinting [My Copy] Microelectronic Engineering, Vol. 61-62 (July 2002), pp. 393-398. by K. Pfeiffer, M. Fink, G. Ahrens, et al.G. Gruetzner, F. Reuther, J. Seekamp, S. Zankovych, Sotomayor, I. Maximov, M. Beck, M. Graczyk, L. Montelius, H. Schulz, Scheer, F. Steingrueber posted to electron_beam imprint lithography su-8 by kristgy on 2007-10-30 12:23:50 as
	The SOI planar photonic crystal fabrication: patterning of Cr using Cl2/O2 plasma etching [My Copy] Microelectronic Engineering, Vol. 77, No. 2. (February 2005), pp. 139-143. by A. P. Milenin, C. Jamois, R. B. Wehrspohn, M. Reiche posted to chromium electron_beam etching etch_rates lithography pmma by kristgy on 2007-10-09 20:43:19 as
	Design, Realization, and Characterization of 3-D Taper for Fiber/Micro-Waveguide Coupling [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 12, No. 6. (2006), pp. 1354-1358. by L. Vivien, X. L. Roux, S. Laval, E. Cassan, D. Marris-Morini posted to edge_coupling electron_beam experiment fiber_optics lithography optics processing sabio_group_papers silicon silicon_oxide waveguide by kristgy on 2007-05-10 17:31:10 as
	Direct Sub-100-nm Patterning of an Organic Low-k Dielectric for Electrical and Optical Interconnects [My Copy] Journal of Electronic Materials, Vol. 34, No. 3. (March 2005), pp. 322-325. by Jeffrey M. Catchmark, Guy P. Lavallee, Michael Rogosky, Youngchul Lee posted to bcb electron_beam lithography by kristgy on 2006-11-21 15:16:30 as
	Optofluidic third order distributed feedback dye laser [My Copy] Applied Physics Letters, Vol. 89, No. 10. (2006) by Morten Gersborg-Hansen, Anders Kristensen posted to dye electron_beam lab-on-a-chip laser lithography pmma polymeric su-8 by kristgy on 2006-10-24 22:40:15 as
	Comparison of high resolution negative electron beam resists [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 4. (2006), pp. 1776-1779. by B. Bilenberg, M. Scholer, P. Shi, et al.M. S. Schmidt, P. Boggild, M. Fink, C. Schuster, F. Reuther, C. Gruetzner, A. Kristensen posted to electron_beam hardcopy lithography processing su-8 by kristgy on 2006-09-07 09:48:59 as
	Water soluble conducting polyanilines: Applications in lithography [My Copy] Proceedings of the 16th international symposium on electron, ion, and photon beams, Vol. 11, No. 6. (1993), pp. 2794-2797. by Marie Angelopoulos, Niranjan Patel, Jane M. Shaw, Nancy C. Labianca, Stephen A. Rishton posted to 50_citations conducting_polymer discharge_layer electron_beam lithography by kristgy on 2006-09-04 12:49:51 as
	New high resolution and high sensitivity deep UV, x-ray, and electron beam resists [My Copy] Microelectronic Engineering, Vol. 11, No. 1-4. (April 1990), pp. 487-489. by Michael Hatzakis, Kevin J. Stewart, Jane M. Shaw, Stephen A. Rishton posted to electron_beam hardcopy lithography su-8 by kristgy on 2006-08-25 16:48:58 as
	Performance of the Raith 150 electron-beam lithography system [My Copy] The 45th international conference on electron, ion, and photon beam technology and nanofabrication, Vol. 19, No. 6. (2001), pp. 2499-2503. by James G. Goodberlet, Todd J. Hastings, Henry I. Smith posted to electron_beam lithography processing raith by kristgy on 2006-08-25 09:50:25 as
	High resolution 100 kV electron beam lithography in SU-8 [My Copy] Microelectronic Engineering In Micro- and Nano-Engineering MNE 2005, Vol. 83, No. 4-9. ( 2006), pp. 1609-1612. by B. Bilenberg, S. Jacobsen, M. S. Schmidt, et al.L. H. D. Skjolding, P. Shi, P. Boggild, J. O. Tegenfeldt, A. Kristensen posted to electron_beam lithography processing su-8 by kristgy on 2006-07-27 09:12:55 as
	Exploring the high sensitivity of SU-8 resist for high resolution electron beam patterning [My Copy] Microelectronic Engineering In Micro and Nano Engineering 2003, Vol. 73-74 (June 2004), pp. 233-237. by A. Pepin, V. Studer, D. Decanini, Y. Chen posted to electron_beam hardcopy lithography processing su-8 by kristgy on 2006-07-27 08:48:04 as
	Lithographic applications of conducting polymers [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, No. 6. (1991), pp. 3428-3431. by Marie Angelopoulos, Jane M. Shaw, Kam L. Lee, Wu S. Huang, Marie A. Lecorre, Michel Tissier posted to conducting_polymer electron_beam lithography processing su-8 by kristgy on 2006-07-19 17:12:38 as
	Tungsten nanotip fabrication by spatially controlled field-assisted reaction with nitrogen [My Copy] The Journal of Chemical Physics, Vol. 124, No. 20. (2006), 204716. by Moh'd Rezeq, Jason Pitters, Robert Wolkow posted to electron_beam fim imaging sem stm by kristgy on 2006-07-12 22:12:48 as along with 3 people gborchardt zeta101 wmppaul
	Single mode solid state distributed feedback dye laser fabricated by gray scale electron beam lithography on a dye doped SU-8 resist [My Copy] Journal of Micromechanics and Microengineering, Vol. 15, No. 12. (December 2005), pp. 2456-2460. by S. Balslev, T. Rasmussen, P. Shi, A. Kristensen posted to dye electron_beam laser lithography optics su-8 by kristgy on 2006-06-12 17:01:01 as
	Exposure characteristics and three-dimensional profiling of SU8C resist using electron beam lithography [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, No. 3. (2001), pp. 732-735. by W. H. Wong, E. Y. B. Pun posted to electron_beam hardcopy lithography su-8 by kristgy on 2006-06-12 15:19:45 as
	Exposure characteristics of high-resolution negative resists [My Copy] The 34th International Symposium on Elecron, Ion, and Photon Beams, Vol. 8, No. 6. (1990), pp. 1447-1453. by Kaolin G. Chiong, Shalom Wind, David Seeger posted to electron_beam hardcopy lithography su-8 by kristgy on 2006-06-12 13:40:19 as
	Electron-beam lithography for thick refractive optical elements in SU-8 [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 4. (2003), pp. 1453-1458. by Eric A. Shields, Fred Williamson, James R. Leger posted to electron_beam hardcopy lithography su-8 by kristgy on 2006-06-12 13:38:38 as
	High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography [My Copy] Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 4. (2003), pp. L5-L7. by Mirwais Aktary, Martin O. Jensen, Kenneth L. Westra, Michael J. Brett, Mark R. Freeman posted to electron_beam hardcopy lithography su-8 by kristgy on 2006-06-12 13:36:51 as
	Surface roughness of hydrogen silsesquioxane as a negative tone electron beam resist [My Copy] Vacuum, Vol. 77, No. 2. (17 January 2005), pp. 117-123. by Y. M. Georgiev, W. Henschel, A. Fuchs, H. Kurz posted to electron_beam optics processing sidewall_roughness by kristgy on 2006-06-07 16:46:04 as
	Electron beam lithography: resolution limits and applications [My Copy] Applied Surface Science, Vol. 164, No. 1-4. (1 September 2000), pp. 111-117. by C. Vieu, F. Carcenac, A. Pepin, et al.Y. Chen, M. Mejias, A. Lebib, L. Manin-Ferlazzo, L. Couraud, H. Launois posted to electron_beam lithography by kristgy on 2006-02-22 21:04:12 as

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waveguide	279
experiment	277
optics	233
hardcopy	174
biosensor	167
silicon	166
silicon_oxide	162
processing	148
ring_resonator	142
theory	126
refractive_index	121
slot_waveguide	100
polymeric	85
review	85
simulation	83
microfluidics	81
sensor	76
silicon_nitride	75
sabio	67
su-8	66
lithography	56
mems	55
laser	51
thermo_optic	47
surface_plasmon_resonance	43
cavity_resonator	39
coupler	35
fiber_optics	35
grating	35
deposition	34
electron_beam	32
photonics	32
water	32
lpcvd	28
photonic_crystal	27
sidewall_roughness	27
absorption	26
dye	26
tunable	26
protein	25
kth_papers	24
resonant_sensor	24
50_citations	23
lab-on-a-chip	23
first_paper	22
polarization	22
citing_me	21
mst_papers	21
sabio_group_papers	20
100_citations	19
disk_resonator	19
fabrication	19
pdms	19
reflow	19
biotas	18
bpsg	17
non_linear	17
pmma	17
soi	17
adhesive_bonding	16
heterogeneous_integration	16
light_emission	16
teos	16
electrodynamics	15
ellipsometry	15
spectroscopy	15
sputtering	15
thesis_theory	15
electro_optic	14
kerr_effect	14
magnetron	14
psg	14
compound_semiconductor	12
diamond	12
gallium_arsenide	12
imaging	12
mach-zehnder	12
own_paper	12
spin_on_glass	12
thermo_mechanic	12
thesis_prevwork	12
25_citations	11
antibody	11
det_lim_comp	11
eigenmode_expansion	11
etching	11
fluid_dynamics	11
hybrid	11
infrared	11
modulator	11
silicon_oxynitride	11
stress	11
bcb	10
camfr	10
dispersion	10
hipims	10
label-free	10
pecvd	10
slow_light	10
athermal	9
etch_rates	9
ethanol	9
indium_phosphide	9
nanoimprint	9
wafer_bonding	9
afm	8
dna	8
erbium	8
kthb	8
photodiode	8
silane	8
surface_functionalization	8
vertical	8
vr_prop	8
250_citations	7
biotin	7
bsa	7
chromium	7
cytop	7
liquid_core	7
metal	7
molecular_simulation	7
optical_trapping	7
physics	7
resistivity	7
rhodamine	7
spherical_resonator	7
young	7
500_citations	6
biology	6
cell	6
nanoparticles	6
plasma	6
visible	6
diffusion	5
electrophoresis	5
farfield	5
germanium	5
gold	5
gyroscope	5
hsq	5
imprint	5
methanol	5
microwave_absorption	5
multiplex	5
nitrobenzene	5
not_online	5
planar_inductor	5
porous	5
raman	5
splitting	5
sucrose	5
terahertz	5
thermal_actuator	5
titanium_oxide	5
biacore	4
bragg_grating	4
bsg	4
course_material	4
density	4
errata	4
finite_element	4
fluorescence	4
hi_paper	4
horizontal	4
multimode	4
nabiose	4
nacl	4
opto_mechanical	4
polycrystalline	4
refractometry	4
solitary_waves	4
statistics	4
thermal_oxidation	4
toroidial_resonator	4
ultraviolet	4
1000_citations	3
diborane	3
difference_interferometer	3
etch-back	3
frequency_domain	3
isopropanol	3
liquid_crystal	3
microlens	3
multi_slot	3
oxygen	3
pedestal	3
rate_constant	3
refutal	3
thermal_conductivity	3
wetting	3
wishlist	3
antireflection	2
author_guidelines	2
capillary	2
chirped	2
conducting_polymer	2
ddmebt	2
detector	2
edge_coupling	2
eit	2
electrochemistry	2
electrowetting	2
energy	2
erroneous	2
frequency_comb	2
gas	2
germanosilicate	2
gigahertz	2
hf	2
indium_tin_oxide	2
interferometer	2
kramers-kronig	2
mach_zehnder_interferometer	2
mass_spectrometry	2
mass_transport	2
mathematics	2
mechanical	2
membrane	2
microwave	2
native_oxide	2
optically_pumped	2
oscillator	2
patent	2
peag	2
phosphine	2
pml	2
polyimide	2
quartz	2
replication	2
sem	2
silicon_on_insulator	2
snom	2
symmetric	2
thesis_sota	2
through_etched	2
under_etch	2
vapor	2
10_citations	1
acetone	1
asymmetric	1
atmosspheric_plasma	1
atomic_layer_deposition	1
bioinformatics	1
blazed	1
bonding	1
carbon_nanotubes	1
c_band	1
ccd	1
chalcogenide	1
chromatography	1
citeulike	1
cmp	1
comsol	1
crow	1
direct_bonding	1
discharge_layer	1
dpi	1
electronics	1
electrostatic	1
etch-stop	1
failure_analysis	1
fdtd	1
fib	1
fim	1
gallium_nitride	1
genetics	1
geometry	1
german	1
glucose	1
gops	1
handbook	1
history	1
hydrogen	1
immunoassay	1
impedance	1
information	1
inverted_taper	1
kinetics	1
linkage_analysis	1
man-2400	1
molecular_imprinting	1
nanohole	1
nitrotoluene	1
nobel	1
noise	1
optic	1
optofluidic	1
organization	1
ozone	1
peg	1
phase_detection	1
phase_shifter	1
phodye	1
phodye_group_papers	1
photodetector	1
photomixing	1
platinum	1
polycarbonate	1
polysilazane	1
qcm	1
quantum_information	1
raith	1
refuted	1
science	1
second_harmonic_generation	1
sidewall_transfer	1
signal_processing	1
size	1
sol_gel	1
standard	1
stm	1
suspended	1
switch	1
tantalum_oxide	1
tem	1
test	1
thermal_nitridation	1
third_harmonic	1
time_domain	1
titanium_nitride	1
ultrasonic	1
vcsel	1
v_groves	1
virus	1
ytterbium	1
zinc_oxide	1

kristgy's electron_beam [32 articles] Export

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