kristgy's mems [55 articles] Export

Recent papers added to kristgy's library classified by the tag mems. You can also see everyone's mems.

	Binary-Coded 4.25-bit W-Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters [My Copy] Microwave Theory and Techniques, IEEE Transactions on, Vol. 57, No. 11. (09 October 2009), pp. 2834-2840. by N. Somjit, G. Stemme, J. Oberhammer posted to silicon phase_shifter mst_papers microwave mems kth_papers by kristgy on 2009-11-19 09:07:38 as
	General treatment of optical forces and potentials in mechanically variable photonic systems [My Copy] Opt. Express, Vol. 17, No. 20. (28 September 2009), pp. 18116-18135. by Peter T. Rakich, Milo? A. Popovic, Zheng Wang posted to waveguide theory opto_mechanical optics mems by kristgy on 2009-09-27 11:24:18 as
	Short-wavelength MEMS-tunable VCSELs [My Copy] Opt. Express, Vol. 16, No. 20. (29 September 2008), pp. 16093-16103. by Garrett D. Cole, Elaine Behymer, Tiziana C. Bond, Lynford L. Goddard posted to bragg_grating cavity_resonator infrared laser mems tunable vertical by kristgy on 2009-05-26 13:58:36 as
	Optical nanomechanical sensor using a silicon photonic crystal cantilever embedded with a nanocavity resonator [My Copy] Appl. Opt., Vol. 48, No. 10. (1 April 2009), pp. 1797-1803. by Chengkuo Lee, Jayaraj Thillaigovindan posted to cavity_resonator mems opto_mechanical photonic_crystal resonant_sensor sensor simulation by kristgy on 2009-05-16 11:57:19 as
	Modal Spectroscopy of Optoexcited Vibrations of a Micron-Scale On-Chip Resonator at Greater than 1 GHz Frequency [My Copy] Physical Review Letters, Vol. 98, No. 12. (2007) by Tal Carmon, Kerry J. Vahala posted to cavity_resonator gigahertz mems opto_mechanical oscillator spherical_resonator by kristgy on 2009-05-09 14:08:54 as along with 1 person eyliu
	Free ultra-high-Q microtoroid: a tool for designing photonic devices [My Copy] Opt. Express, Vol. 15, No. 1. (8 January 2007), pp. 166-175. by Mani Hossein-Zadeh, Kerry J. Vahala posted to cavity_resonator disk_resonator fabrication mems ring_resonator silicon_oxide by kristgy on 2009-05-09 14:02:12 as
	Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator [My Copy] Electron Devices, IEEE Transactions on In Electron Devices, IEEE Transactions on, Vol. 51, No. 1. (2004), pp. 149-155. by J. Oberhammer, G. Stemme posted to kth_papers membrane mems mst_papers by kristgy on 2009-04-13 21:31:32 as
	Harnessing optical forces in integrated photonic circuits [My Copy] Nature, Vol. 456, No. 7221. (27 November 2008), pp. 480-484. by Mo Li, W. H. P. Pernice, C. Xiong, T. Baehr-Jones, M. Hochberg, H. X. Tang posted to experiment mems silicon silicon_oxide vr_prop waveguide by kristgy on 2009-04-06 12:15:36 as along with 1 person JackSankey
	A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator [My Copy] Opt. Express, Vol. 16, No. 19. (15 September 2008), pp. 14421-14428. by Kazunori Takahashi, Yoshiaki Kanamori, Yasuo Kokubun, Kazuhiro Hane posted to electrostatic hf mems ring_resonator silicon silicon_oxide suspended tunable vapor vr_prop waveguide by kristgy on 2009-04-06 09:51:04 as
	Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware [My Copy] Japanese Journal of Applied Physics, Vol. 42, No. Part 1, No. 6A. (15 June 2003), pp. 3690-3694. by Yamato Fukuta, Hiroyuki Fujita, Hiroshi Toshiyoshi posted to etching hf mems processing silicon_oxide vapor by kristgy on 2009-04-06 09:47:55 as
	Charge- and size-based separation of macromolecules using ultrathin silicon membranes [My Copy] Nature, Vol. 445, No. 7129. (15 February 2007), pp. 749-753. by Christopher C. Striemer, Thomas R. Gaborski, James L. Mcgrath, Philippe M. Fauchet posted to biosensor bsa membrane mems porous processing silicon by kristgy on 2009-03-29 18:49:02 as along with 1 person flbarroso
	Optical and mechanical design of a ?zipper? photonic crystaloptomechanical cavity [My Copy] Opt. Express, Vol. 17, No. 5. (2 March 2009), pp. 3802-3817. by Jasper Chan, Matt Eichenfield, Ryan Camacho, Oskar Painter posted to mems optics photonic_crystal photonics silicon_nitride tunable vr_prop by kristgy on 2009-03-27 11:41:05 as along with 2 people and 1 group hongtang Max_Ludwig Optomechanics
	Micro- and nanomechanical sensors for environmental, chemical, and biological detection [My Copy] Lab Chip, Vol. 7, No. 10. (October 2007), pp. 1238-1255. by Philip S. Waggoner, Harold G. Craighead posted to biosensor lab-on-a-chip label-free mems review by kristgy on 2009-03-11 16:58:07 as along with 3 people ashishyeri freddan guhjy
	Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist [My Copy] Physica Scripta, Vol. T114 (2004), pp. 223-226. by Santeri Tuomikoski, Sami Franssila posted to adhesive_bonding mems su-8 by kristgy on 2009-02-01 16:20:48 as
	Radiation Pressure Cooling of a Micromechanical Oscillator Using Dynamical Backaction [My Copy] Physical Review Letters, Vol. 97, No. 24. (2006), 243905. by A. Schliesser, P. Del'Haye, N. Nooshi, K. J. Vahala, T. J. Kippenberg posted to cavity_resonator experiment mems optics tunable vr_prop waveguide by kristgy on 2009-01-25 13:35:46 as along with 6 people JackSankey akhuettel nagyd ibschwartz tapnews cgenesprime
	Single virus detection from the reactive shift of a whispering-gallery mode [My Copy] Proceedings of the National Academy of Sciences, Vol. 105, No. 52. (30 December 2008), pp. 20701-20704. by F. Vollmer, S. Arnold, D. Keng posted to biosensor cavity_resonator mems optics spherical_resonator thesis_prevwork virus by kristgy on 2009-01-16 10:34:33 as along with 1 person and 1 group wsjames Oxford Virology
	Microfluidics meets MEMS [My Copy] Proceedings of the IEEE In Proceedings of the IEEE, Vol. 91, No. 6. (2003), pp. 930-953. by E. Verpoorte, N. F. De Rooij posted to mems microfluidics review by kristgy on 2008-09-09 15:54:26 as along with 1 group microfluidics
	Proposition of Atomic Force Probes Based on Silicon Ring-Resonators [My Copy] Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International In Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International (2007), pp. 1529-1532. by M. Faucher, B. Walter, A. S. Rollier, et al.K. Seguini, B. Legrand, G. Couturier, J. P. Aime, C. Bernard, R. Boisgard, L. Buchaillot posted to afm hardcopy mechanical mems ring_resonator silicon by kristgy on 2008-07-09 12:50:25 as
	Intermodulation atomic force microscopy [My Copy] Applied Physics Letters, Vol. 92, No. 15. (2008) by Daniel Platz, Erik A. Tholén, Devrim Pesen, David B. Haviland posted to afm experiment kth_papers mems non_linear resonant_sensor sensor by kristgy on 2008-04-16 13:01:16 as along with 2 people hearoplane wmppaul
	Fundamental limits to force detection using quartz tuning forks [My Copy] Review of Scientific Instruments, Vol. 71, No. 7. (2000), pp. 2776-2780. by Robert D. Grober, Jason Acimovic, Jim Schuck, et al.Dan Hessman, Peter J. Kindlemann, Joao Hespanha, Stephen A. Morse, Khaled Karrai, Ingo Tiemann, Stephan Manus posted to experiment mems quartz resonant_sensor theory by kristgy on 2008-04-16 12:49:05 as
	A low-temperature wafer bonding technique using patternable materials [My Copy] Journal of Micromechanics and Microengineering, Vol. 12, No. 5. (2002), pp. 611-615. by C. T. Pan, H. Yang, S. C. Shen, M. C. Chou, H. P. Chou posted to adhesive_bonding experiment mems processing su-8 by kristgy on 2008-03-25 12:52:48 as
	A review of MEMS external-cavity tunable lasers [My Copy] Journal of Micromechanics and Microengineering, Vol. 17, No. 1. (January 2007), pp. R1-R13. by Liu, A.Q., Zhang, X.M. posted to laser mems review tunable by kristgy on 2008-03-20 16:50:48 as
	Silicon in mechanical sensors [My Copy] Journal of Physics E: Scientific Instruments, Vol. 21, No. 12. (1988), pp. 1114-1128. by J. C. Greenwood posted to mems review sensor silicon thermo_mechanic by kristgy on 2008-01-14 14:31:37 as
	Fabrication of single-crystal diamond microcomponents [My Copy] Applied Physics Letters, Vol. 65, No. 24. (1994), pp. 3072-3074. by John D. Hunn, S. P. Withrow, C. W. White, R. E. Clausing, L. Heatherly, Paul C. Christensen posted to diamond laser mems processing by kristgy on 2007-10-11 23:09:58 as
	Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 13, No. 2. (2007), pp. 202-208. by J. Yao, D. Leuenberger, Lee, M. C. Wu posted to hardcopy mems ring_resonator silicon silicon_oxide tunable vr_prop by kristgy on 2007-06-22 17:56:48 as
	Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection [My Copy] Microelectromechanical Systems, Journal of, Vol. 15, No. 6. (2006), pp. 1466-1476. by T. P. Burg, A. R. Mirza, N. Milovic, et al.C. H. Tsau, G. A. Popescu, J. S. Foster, S. R. Manalis posted to biosensor mems microfluidics by kristgy on 2007-03-02 15:10:46 as along with 1 person and 1 group cdppublications CDP
	Wavelength tunable thermo-optic filter using buckling effect of etalon composed poly-Si/SiO2 multi-layers [My Copy] Optical Materials In Si-based Photonics: Towards True Monolithic Integration, Vol. 27, No. 5. (February 2005), pp. 787-791. by Hun-Yong Park, Chong-Hun Park, Byung-Chul Hwang, et al.Seung G. Lee, Beom-Hoan, El-Hang Lee, Doo-Sun Choi, Se-Geun Park posted to cavity_resonator experiment hardcopy mems optics refractive_index silicon silicon_oxide thermal_actuator thermo_optic tunable by kristgy on 2006-11-19 20:42:06 as
	An all-dielectric tunable optical filter based on the thermo-optic effect [My Copy] Journal of Optics A: Pure and Applied Optics, Vol. 6, No. 6. (2004), pp. 504-511. by Dennis Hohlfeld, Hans Zappe posted to cavity_resonator experiment fiber_optics mems optics refractive_index silicon silicon_nitride silicon_oxide thermal_actuator thermo_optic tunable by kristgy on 2006-11-19 20:29:28 as along with 1 person champak
	Surface micromachining for microelectromechanical systems [My Copy] Proceedings of the IEEE, Vol. 86, No. 8. (1998), pp. 1552-1574. by J. M. Bustillo, R. T. Howe, R. S. Muller posted to mems review by kristgy on 2006-11-10 16:07:51 as along with 1 person z3phyr
	Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch [My Copy] Microelectromechanical Systems, Journal of, Vol. 13, No. 3. (2004), pp. 421-428. by J. Oberhammer, G. Stemme posted to kth_papers mems mst_papers by kristgy on 2006-11-08 13:23:32 as
	Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography [My Copy] Vol. 23, No. 6. (2005), pp. 2944-2949. by B. Bilenberg, M. Hansen, D. Johansen, et al.V. Ozkapici, C. Jeppesen, P. Szabo, I. M. Obieta, O. Arroyo, J. O. Tegenfeldt, A. Kristensen posted to biosensor imprint mems microfluidics polymeric processing by kristgy on 2006-09-07 09:55:53 as
	Adhesive wafer bonding [My Copy] Journal of Applied Physics, Vol. 99, No. 3. (2006), 031101. by F. Niklaus, G. Stemme, J. Q. Lu, R. J. Gutmann posted to adhesive_bonding bcb hardcopy kth_papers mems mst_papers polymeric processing by kristgy on 2006-09-07 09:21:54 as along with 1 person ImranRaoufMalik
	SU-8: a low-cost negative resist for MEMS [My Copy] Journal of Micromechanics and Microengineering, Vol. 7, No. 3. (1997), pp. 121-124. by H. Lorenz, M. Despont, N. Fahrni, N. Labianca, P. Renaud, P. Vettiger posted to 100_citations lithography mems su-8 by kristgy on 2006-09-04 13:30:48 as
	Chemical Amplification Resists for Microlithography [My Copy] In Microlithography, Vol. 172 (2005), pp. 37-245. by Hiroshi Ito posted to lithography mems processing su-8 by kristgy on 2006-08-24 16:26:32 as
	Simple negative resist for deep ultraviolet, electron beam, and x-ray lithography [My Copy] International symposium on electron, ion, and photon beams, Vol. 7, No. 6. (1989), pp. 1734-1739. by K. J. Stewart, M. Hatzakis, J. M. Shaw, D. E. Seeger, E. Neumann posted to hardcopy lithography mems processing su-8 by kristgy on 2006-08-24 14:27:29 as
	Micromachining applications of a high resolution ultrathick photoresist [My Copy] The 38th International symposium on electron, ion, and photon beams In The 38th International symposium on electron, ion, and photon beams, Vol. 13, No. 6. (1995), pp. 3012-3016. by K. Y. Lee, N. Labianca, S. A. Rishton, et al.S. Zolgharnain, J. D. Gelorme, J. Shaw, T. H. P. Chang posted to 100_citations lithography mems su-8 by kristgy on 2006-06-12 15:41:21 as
	The VAMP -- a new device for handling liquids or gases [My Copy] Sensors and Actuators A: Physical In Ninth International Workshop on Micro Electro Mechanical System, Vol. 57, No. 2. (November 1996), pp. 153-157. by M. Stehr, S. Messner, H. Sandmaier, R. Zengerle posted to mems microfluidics by kristgy on 2006-05-11 09:40:33 as
	Monolithic MEMS quadrupole mass spectrometers by deep silicon etching [My Copy] Microelectromechanical Systems, Journal of, Vol. 14, No. 5. (2005), pp. 1156-1166. by M. Geear, R. R. A. Syms, S. Wright, A. S. Holmes posted to mass_spectrometry mems by kristgy on 2006-05-08 18:27:21 as
	MOEMS modeling for opto-electro-mechanical co-simulation [My Copy] Journal of Modeling and Simulation of Microsystems, Vol. 1, No. 1. (1999), pp. 39-48. by G. Jacquemod, K. Vuorinen, F. Gaffiot, et al.A. Spisser, C. Seassal, Jl, P. Rojoromeo, P. Viktorovitch posted to mems resonant_sensor by kristgy on 2006-04-09 19:11:00 as
	Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition [My Copy] (13 March 2002) by Marc J. Madou posted to mems processing by kristgy on 2006-04-09 19:05:41 as
	HF ETCHING OF SI-OXIDES AND SI-NITRIDES FOR SURFACE MICROMACHINING [My Copy] by Du B. Bois, G. Vereecke, A. Witvrouw, et al.De P. Moor, Van C. Hoof, De A. Caussemaeker, A. Verbist posted to mems processing sabio silicon_nitride silicon_oxide by kristgy on 2006-04-05 09:56:38 as
	Etch rates for micromachining processing-Part II [My Copy] Microelectromechanical Systems, Journal of, Vol. 12, No. 6. (07 January 2004), pp. 761-778. by K. R. Williams, K. Gupta, M. Wasilik posted to etch_rates mems processing by kristgy on 2006-03-24 16:25:09 as along with 1 person Buntworthy
	Etch rates for micromachining processing [My Copy] Microelectromechanical Systems, Journal of, Vol. 5, No. 4. (1996), pp. 256-269. by K. R. Williams, R. S. Muller posted to etch_rates mems processing by kristgy on 2006-03-24 16:24:02 as along with 3 people z3phyr aloks msterner
	Thermally excited silicon microactuators [My Copy] Electron Devices, IEEE Transactions on, Vol. 35, No. 6. (1988), pp. 758-763. by W. Riethmuller, W. Benecke posted to mems thermal_actuator by kristgy on 2006-03-20 14:55:18 as
	Modeling of two-hot-arm horizontal thermal actuator [My Copy] Journal of Micromechanics and Microengineering, Vol. 13, No. 2. (2003), pp. 312-322. by Dong Yan, Amir Khajepour, Raafat Mansour posted to mems thermal_actuator by kristgy on 2006-03-20 12:38:46 as
	Side-opened out-of-plane microneedles for microfluidic transdermal liquid transfer [My Copy] Microelectromechanical Systems, Journal of, Vol. 12, No. 3. (2003), pp. 296-301. by P. Griss, G. Stemme posted to mems mst_papers by kristgy on 2006-01-15 22:49:48 as
	Micromachined electrodes for biopotential measurements [My Copy] Microelectromechanical Systems, Journal of, Vol. 10, No. 1. (2001), pp. 10-16. by P. Griss, P. Enoksson, H. K. Tolvanen-Laakso, P. Merilainen, S. Ollmar, G. Stemme posted to mems mst_papers by kristgy on 2006-01-15 22:48:55 as
	A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure [My Copy] Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 200-206. by W. van der Wijngaart, A. Thorsen, G. Stemme posted to mems mst_papers by kristgy on 2006-01-15 22:47:38 as
	BCB contact printing for patterned adhesive full-wafer bonded 0-level packages [My Copy] Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 419-425. by J. Oberhammer, G. Stemme posted to mems mst_papers by kristgy on 2006-01-15 22:46:33 as
	Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements [My Copy] Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 254-260. by S. Haasl, D. Mucha, V. Chernoray, et al.T. Ebefors, P. Enoksson, L. Lofdahl, G. Stemme posted to mems mst_papers by kristgy on 2006-01-15 22:46:04 as

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waveguide	279
experiment	277
optics	233
hardcopy	174
biosensor	167
silicon	166
silicon_oxide	162
processing	148
ring_resonator	142
theory	126
refractive_index	121
slot_waveguide	100
polymeric	85
review	85
simulation	83
microfluidics	81
sensor	76
silicon_nitride	75
sabio	67
su-8	66
lithography	56
mems	55
laser	51
thermo_optic	47
surface_plasmon_resonance	43
cavity_resonator	39
coupler	35
fiber_optics	35
grating	35
deposition	34
electron_beam	32
photonics	32
water	32
lpcvd	28
photonic_crystal	27
sidewall_roughness	27
absorption	26
dye	26
tunable	26
protein	25
kth_papers	24
resonant_sensor	24
50_citations	23
lab-on-a-chip	23
first_paper	22
polarization	22
citing_me	21
mst_papers	21
sabio_group_papers	20
100_citations	19
disk_resonator	19
fabrication	19
pdms	19
reflow	19
biotas	18
bpsg	17
non_linear	17
pmma	17
soi	17
adhesive_bonding	16
heterogeneous_integration	16
light_emission	16
teos	16
electrodynamics	15
ellipsometry	15
spectroscopy	15
sputtering	15
thesis_theory	15
electro_optic	14
kerr_effect	14
magnetron	14
psg	14
compound_semiconductor	12
diamond	12
gallium_arsenide	12
imaging	12
mach-zehnder	12
own_paper	12
spin_on_glass	12
thermo_mechanic	12
thesis_prevwork	12
25_citations	11
antibody	11
det_lim_comp	11
eigenmode_expansion	11
etching	11
fluid_dynamics	11
hybrid	11
infrared	11
modulator	11
silicon_oxynitride	11
stress	11
bcb	10
camfr	10
dispersion	10
hipims	10
label-free	10
pecvd	10
slow_light	10
athermal	9
etch_rates	9
ethanol	9
indium_phosphide	9
nanoimprint	9
wafer_bonding	9
afm	8
dna	8
erbium	8
kthb	8
photodiode	8
silane	8
surface_functionalization	8
vertical	8
vr_prop	8
250_citations	7
biotin	7
bsa	7
chromium	7
cytop	7
liquid_core	7
metal	7
molecular_simulation	7
optical_trapping	7
physics	7
resistivity	7
rhodamine	7
spherical_resonator	7
young	7
500_citations	6
biology	6
cell	6
nanoparticles	6
plasma	6
visible	6
diffusion	5
electrophoresis	5
farfield	5
germanium	5
gold	5
gyroscope	5
hsq	5
imprint	5
methanol	5
microwave_absorption	5
multiplex	5
nitrobenzene	5
not_online	5
planar_inductor	5
porous	5
raman	5
splitting	5
sucrose	5
terahertz	5
thermal_actuator	5
titanium_oxide	5
biacore	4
bragg_grating	4
bsg	4
course_material	4
density	4
errata	4
finite_element	4
fluorescence	4
hi_paper	4
horizontal	4
multimode	4
nabiose	4
nacl	4
opto_mechanical	4
polycrystalline	4
refractometry	4
solitary_waves	4
statistics	4
thermal_oxidation	4
toroidial_resonator	4
ultraviolet	4
1000_citations	3
diborane	3
difference_interferometer	3
etch-back	3
frequency_domain	3
isopropanol	3
liquid_crystal	3
microlens	3
multi_slot	3
oxygen	3
pedestal	3
rate_constant	3
refutal	3
thermal_conductivity	3
wetting	3
wishlist	3
antireflection	2
author_guidelines	2
capillary	2
chirped	2
conducting_polymer	2
ddmebt	2
detector	2
edge_coupling	2
eit	2
electrochemistry	2
electrowetting	2
energy	2
erroneous	2
frequency_comb	2
gas	2
germanosilicate	2
gigahertz	2
hf	2
indium_tin_oxide	2
interferometer	2
kramers-kronig	2
mach_zehnder_interferometer	2
mass_spectrometry	2
mass_transport	2
mathematics	2
mechanical	2
membrane	2
microwave	2
native_oxide	2
optically_pumped	2
oscillator	2
patent	2
peag	2
phosphine	2
pml	2
polyimide	2
quartz	2
replication	2
sem	2
silicon_on_insulator	2
snom	2
symmetric	2
thesis_sota	2
through_etched	2
under_etch	2
vapor	2
10_citations	1
acetone	1
asymmetric	1
atmosspheric_plasma	1
atomic_layer_deposition	1
bioinformatics	1
blazed	1
bonding	1
carbon_nanotubes	1
c_band	1
ccd	1
chalcogenide	1
chromatography	1
citeulike	1
cmp	1
comsol	1
crow	1
direct_bonding	1
discharge_layer	1
dpi	1
electronics	1
electrostatic	1
etch-stop	1
failure_analysis	1
fdtd	1
fib	1
fim	1
gallium_nitride	1
genetics	1
geometry	1
german	1
glucose	1
gops	1
handbook	1
history	1
hydrogen	1
immunoassay	1
impedance	1
information	1
inverted_taper	1
kinetics	1
linkage_analysis	1
man-2400	1
molecular_imprinting	1
nanohole	1
nitrotoluene	1
nobel	1
noise	1
optic	1
optofluidic	1
organization	1
ozone	1
peg	1
phase_detection	1
phase_shifter	1
phodye	1
phodye_group_papers	1
photodetector	1
photomixing	1
platinum	1
polycarbonate	1
polysilazane	1
qcm	1
quantum_information	1
raith	1
refuted	1
science	1
second_harmonic_generation	1
sidewall_transfer	1
signal_processing	1
size	1
sol_gel	1
standard	1
stm	1
suspended	1
switch	1
tantalum_oxide	1
tem	1
test	1
thermal_nitridation	1
third_harmonic	1
time_domain	1
titanium_nitride	1
ultrasonic	1
vcsel	1
v_groves	1
virus	1
ytterbium	1
zinc_oxide	1

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