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MEMS-Based Selective Preconcentration of Trace Level Breath Analytes

by: B. Alfeeli, M. Agah
Sensors Journal, IEEE, Vol. 9, No. 9. (2009), pp. 1068-1075, doi:10.1109/jsen.2009.2025822  Key: citeulike:11921180

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Abstract

This paper presents high-performance micropreconcentrators (muPCs) aimed at breath analysis and a method for eliminating unwanted species from breath samples by using a two-step preconcentration procedure. The muPC consists of embedded high aspect-ratio three-dimensional (3-D) micro pillars coated with an adsorbent polymer. The silicon-glass die has outer dimensions of 7 mm times 7 mm, total inner surface area of ~ 10 m


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