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Applications of MEMS in power sources and circuits Export

by: E. M. Yeatman
Journal of Micromechanics and Microengineering, Vol. 17, No. 7. (2007), pp. S184-S188.

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Power supply for electronics is one of the more recent application areas which has been explored for MEMS devices and techniques. Within this field, the most actively researched application has been MEMS power sources, particularly to replace batteries for portable electronic devices such as wireless sensor nodes. In addition, there are possibilities for MEMS devices in circuit protection, and power conversion and conditioning. This paper reviews these applications. More detailed descriptions are presented of work at Imperial College on motion scavenging power sources and MEMS circuit breakers, and examples of work in power applications by other groups are also given. Finally, some possible future directions are discussed.


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