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Si<sub>x</sub>C<sub>y</sub> Thin Films Deposited at Low Temperature by DC Dual Magnetron Sputtering: Effect of Power Supplied to Si and C Cathode Targets on Film Physicochemical Properties

by: Henrique S. Medeiros, Rodrigo S. Pessoa, Júlio C. Sagás, Mariana A. Fraga, Lúcia V. Santos, Homero S. Maciel, Marcos Massi, A. S. da Silva Sobrinho
Materials Science Forum, Vol. 717-720 (May 2012), pp. 197-201, doi:10.4028/www.scientific.net/msf.717-720.197  Key: citeulike:11464730

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