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In Industrial Technology (ICIT), 2010 IEEE International Conference on (March 2010), pp. 513-516, doi:10.1109/icit.2010.5472747 Key: citeulike:11464763
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In this work, we studied the fabrication and characterization of strain sensors based on semiconductor materials for high temperature applications: non-stoichometric amorphous silicon carbide (a-Si
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