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Opt. Express, Vol. 20, No. 9. (23 April 2012), pp. 9777-9783, doi:10.1364/oe.20.009777 Key: citeulike:11892289
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Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
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