msterner's library 65 articles Export

	Reactive ion etching of benzocyclobutene polymer films [My Copy] Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on In Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on, Vol. 20, No. 3. (1997), pp. 199-206. by P. B. Chinoy posted to etching bcb by msterner on 2009-09-03 13:44:20 as
	Application of capillary forces and stiction for lateral displacement, alignment, suspension and locking of self-assembled microcantilevers [My Copy] Journal of Micromechanics and Microengineering, Vol. 16, No. 10. (October 2006), pp. 2077-2085. by Rose, F., Hattori, et al. M., Kobayashi, D., Toshiyoshi, H., Fujita, H., Kawakatsu, H. posted to mems stiction by msterner on 2009-06-11 12:15:13 as
	Surface tension-powered self-assembly of microstructures - the state-of-the-art [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 12, No. 4. (2003), pp. 387-417. by R. R. A. Syms, E. M. Yeatman, V. M. Bright, G. M. Whitesides posted to mems stiction by msterner on 2009-06-10 14:58:46 as
	Full-wave analysis of dielectric waveguides using tangential vector finite elements [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 39, No. 8. (1991), pp. 1262-1271. by J. F. Lee, D. K. Sun, Z. J. Cendes posted to hfss by msterner on 2009-05-28 10:03:18 as
	Theory of the electrolysis of water [My Copy] Protection of Metals, Vol. 44, No. 2. (13 March 2008), pp. 120-125. by R. Salem posted to electrochemistry by msterner on 2009-03-13 10:06:22 as
	Increasing the Performance per Cost of Microsystems by Transfer Bonding Manufacturing Techniques [My Copy] mstnews, No. 2. (2008), pp. 27-28. by W. van der Wijngaart, R. Guerre, M. Despont, et al.D. Bhattacharyya, P. B. Kirby, S. Wilson, R. Jourdain, S. Braun, N. Sandström, J. Barth, T. Grund, M. Kohl, F. Niklaus, M. Lapisa, F. Zimmer posted to 3d integration mems by msterner on 2009-03-13 09:31:30 as
	Wafer-level 3D integration technology [My Copy] IBM Journal of Research and Development, Vol. 52, No. 6. (2008) by S. J. Koester, A. M. Young, R. R. Yu, et al.S. Purushothaman, K. N. Chen, D. C. La Tulipe, N. Rana, L. Shi, M. R. Wordeman, E. J. Sprogis posted to 3d integration by msterner on 2009-03-13 09:02:26 as
	Partial release and detachment of microfabricated metal and polymer structures by anodic metal dissolution [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 14, No. 2. (2005), pp. 383-391. by S. Metz, A. Bertsch, P. Renaud posted to electrochemistry etching mems by msterner on 2009-02-24 09:31:27 as
	Cyanide- and Thiourea-Free Electrochemical Etching of Gold for Microelectronics Applications [My Copy] Journal of The Electrochemical Society, Vol. 154, No. 10. (2007), pp. D543-D549. by Zhongmin Hu, Tom Ritzdorf posted to electrochemistry by msterner on 2008-12-18 07:50:48 as along with 1 person JonD
	Shape Changes during Through-Mask Electrochemical Micromachining of Thin Metal Films [My Copy] posted to electrochemistry by msterner on 2008-12-17 17:59:35 as
	Electrochemical Micromachining [My Copy] Science, Vol. 289, No. 5476. (7 July 2000), pp. 98-101. by Rolf Schuster, Viola Kirchner, Philippe Allongue, Gerhard Ertl posted to electrochemistry by msterner on 2008-12-17 17:48:50 as along with 1 person ImranRaoufMalik
	The LIGA technique-what are the new opportunities [My Copy] Journal of Micromechanics and Microengineering, Vol. 2, No. 3. (1992), pp. 133-140. by A. Rogner, J. Eicher, D. Munchmeyer, Peters, J. Mohr posted to electroc by msterner on 2008-12-17 17:29:39 as
	A path: from electroplating through lithographic masks in electronics to LIGA in MEMS [My Copy] Electrochimica Acta, Vol. 42, No. 20-22. (1997), pp. 2985-3005. by L. Romankiw posted to electrochemistry by msterner on 2008-12-17 17:18:36 as
	Electrodeposition Science and Technology in the Last Quarter of the Twentieth Century [My Copy] Journal of The Electrochemical Society, Vol. 149, No. 3. (2002), pp. S9-S20. by D. Landolt posted to electrochemistry by msterner on 2008-12-17 17:15:37 as
	Fundamental aspects and applications of electrochemical microfabrication [My Copy] Electrochimica Acta, Vol. 45, No. 15-16. (3 May 2000), pp. 2535-2558. by M. Datta posted to electrochemistry by msterner on 2008-12-17 16:38:08 as
	An In Situ Electrochemical Quartz Crystal Microbalance Study of the Dissolution Process of a Gold Electrode in Perchloric Acid Solution Containing Chloride Ion [My Copy] Journal of The Electrochemical Society, Vol. 145, No. 5. (1998), pp. 1614-1623. by Shen Ye, Chikara Ishibashi, Katsuaki Shimazu, Kohei Uosaki posted to etching by msterner on 2008-12-17 15:40:16 as
	Low-loss lateral micromachined switches for high frequency applications [My Copy] Journal of Micromechanics and Microengineering, Vol. 15, No. 1. (2005), pp. 157-167. by A. Q. Liu, M. Tang, A. Agarwal, A. Alphones posted to mems rf switch by msterner on 2008-12-17 09:45:51 as
	Surface-passivated high-resistivity silicon as a true microwave substrate [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 53, No. 7. (2005), pp. 2340-2347. by M. Spirito, F. M. De Paola, L. K. Nanver, et al.E. Valletta, Bifeng Rong, B. Rejaei, L. C. N. de Vreede, J. N. Burghartz posted to high-resisitivity rf silicon by msterner on 2008-12-08 09:34:54 as
	Wafer bonding for microsystems technologies [My Copy] Sensors and Actuators A: Physical, Vol. 74, No. 1-3. (20 April 1999), pp. 161-168. by U. Gosele, Tong, A. Schumacher, et al.G. Krauter, M. Reiche, A. Plo[ss]l, P. Kopperschmidt, Lee, Kim posted to bonding by msterner on 2008-12-03 17:07:04 as
	Low-loss CPW lines on surface stabilized high-resistivity silicon [My Copy] Microwave and Guided Wave Letters, IEEE In Microwave and Guided Wave Letters, IEEE, Vol. 9, No. 10. (1999), pp. 395-397. by H. S. Gamble, B. M. Armstrong, S. J. N. Mitchell, Y. Wu, V. F. Fusco, J. A. C. Stewart posted to high-resisitivity rf silicon by msterner on 2008-12-03 13:37:51 as
	Thermal expansion of AlN, sapphire, and silicon [My Copy] Journal of Applied Physics, Vol. 45, No. 3. (1974), pp. 1456-1457. by W. M. Yim, R. J. Paff posted to material mems rf by msterner on 2008-11-24 12:28:28 as
	Silicon as an advanced window material for high power gyrotrons [My Copy] International Journal of Infrared and Millimeter Waves, Vol. 16, No. 5. (1 May 1995), pp. 863-877. by V. V. Parshin, R. Heidinger, B. A. Andreev, A. V. Gusev, V. B. Shmagin posted to material mems millimeter rf by msterner on 2008-11-20 21:08:17 as
	Determination of the complex permittivity of packaging materials at millimeter-wave frequencies [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 54, No. 3. (2006), pp. 1001-1010. by T. Zwick, A. Chandrasekhar, C. W. Baks, U. R. Pfeiffer, S. Brebels, B. P. Gaucher posted to material mems millimeter rf by msterner on 2008-11-20 13:57:28 as
	Antenna beam scanning by active impedance loading [My Copy] Antennas and Propagation, IEEE Transactions on In Antennas and Propagation, IEEE Transactions on, Vol. 22, No. 5. (1974), pp. 722-723. by N. Alexopoulos, P. L. Uslenghi, G. Tadler posted to beamsteering phaseshifting rf by msterner on 2008-10-18 15:36:50 as
	Switchable low-loss RF MEMS Ka-band frequency-selective surface [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 52, No. 11. (2004), pp. 2474-2481. by B. Schoenlinner, A. Abbaspour-Tamijani, L. C. Kempel, G. M. Rebeiz posted to mems meta phaseshifting rf by msterner on 2008-10-18 15:24:46 as
	Millimeter-wave diode-grid phase shifters [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 36, No. 5. (1988), pp. 902-907. by W. W. Lam, C. F. Jou, H. Z. Chen, K. S. Stolt, N. C. Luhmann, D. B. Rutledge posted to millimeter phaseshifting wave by msterner on 2008-10-18 11:28:48 as
	Submillimeter receivers for radio astronomy [My Copy] Proceedings of the IEEE In Proceedings of the IEEE, Vol. 80, No. 11. (1992), pp. 1702-1720. by R. Blundell, Tong posted to millimeter wave by msterner on 2008-10-18 10:57:19 as
	Ka-band waveguide phase shifter using tunable electromagnetic crystal sidewalls [My Copy] Microwave Theory and Techniques, IEEE Transactions on In Microwave Theory and Techniques, IEEE Transactions on, Vol. 51, No. 4. (2003), pp. 1281-1288. by J. A. Higgins, Hao Xin, A. Sailer, M. Rosker posted to mems metamaterial rf by msterner on 2008-10-16 12:00:41 as
	Plasma-deposited silicon oxide barrier films on polyethersulfone substrates: temperature and thickness effects [My Copy] Surface and Coatings Technology, Vol. 197, No. 2-3. (22 July 2005), pp. 253-259. by D. S. Wuu, W. C. Lo, C. C. Chiang, et al.H. B. Lin, L. S. Chang, R. H. Horng, C. L. Huang, Y. J. Gao posted to compensation stress by msterner on 2008-07-24 16:52:23 as
	Flat-band add-drop FIR lattice filter design [My Copy] Selected Topics in Quantum Electronics, IEEE Journal of In Selected Topics in Quantum Electronics, IEEE Journal of, Vol. 5, No. 5. (1999), pp. 1366-1372. by D. di Mola, G. Sanvito, M. Lenzi, E. Fioravanti posted to bonding compensation mems stress by msterner on 2008-07-24 10:27:11 as
	Thermosetting nano-imprint resists: novel materials for adhesive wafer bonding [My Copy] Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on In Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on (2007), pp. 239-242. by M. Populin, A. Decharat, F. Niklaus, G. Stemme posted to bonding mems by msterner on 2008-07-14 13:26:26 as
	Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor [My Copy] Electron Devices, IEEE Transactions on In Electron Devices, IEEE Transactions on, Vol. 50, No. 3. (2003), pp. 730-739. by Jinghong Chen, Jun Zou, Chang Liu, J. E. Schutt-Aine, S. M. K. Kang posted to capacitor mems rf tunable by msterner on 2008-07-14 13:19:09 as
	Development of a wide tuning range MEMS tunable capacitor for wireless communication systems [My Copy] Electron Devices Meeting, 2000. IEDM Technical Digest. International In Electron Devices Meeting, 2000. IEDM Technical Digest. International (2000), pp. 403-406. by Jun Zou, Chang Liu, J. Schutt-Aine, Jinghong Chen, Sung-Mo Kang posted to capacitor mems rf tunable by msterner on 2008-07-14 13:17:09 as
	Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits [My Copy] Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1991. Digest of Papers, IEEE 1991 In Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1991. Digest of Papers, IEEE 1991 (1991), pp. 27-30. by L. E. Larson, R. H. Hackett, M. A. Melendes, R. F. Lohr posted to capacitor mems rf tunable by msterner on 2008-07-14 12:51:34 as
	Micromechanical membrane switches for microwave applications [My Copy] Microwave Symposium Digest, 1995., IEEE MTT-S International In Microwave Symposium Digest, 1995., IEEE MTT-S International (1995), pp. 91-94 vol.1. by C. Goldsmith, Tsen-Hwang Lin, B. Powers, Wen-Rong Wu, B. Norvell posted to capacitor mems rf tunable by msterner on 2008-07-14 10:30:45 as
	MEMS designed for tunable capacitors [My Copy] Microwave Symposium Digest, 1998 IEEE MTT-S International In Microwave Symposium Digest, 1998 IEEE MTT-S International, Vol. 1 (1998), pp. 127-129 vol.1. by H. D. Wu, K. F. Harsh, R. S. Irwin, et al.Wenge Zhang, A. R. Mickelson, Y. C. Lee, J. B. Dobsa posted to capacitor mems rf tunable by msterner on 2008-07-14 10:27:36 as
	A low-voltage lateral MEMS switch with high RF performance [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 13, No. 6. (2004), pp. 902-911. by Ye Wang, Zhihong Li, D. T. Mccormick, N. C. Tien posted to mems rf switch thermal by msterner on 2008-07-12 13:14:49 as
	Low actuation voltage RF MEMS switches with signal frequencies from 0.25 GHz to 40 GHz [My Copy] Electron Devices Meeting, 1999. IEDM Technical Digest. International In Electron Devices Meeting, 1999. IEDM Technical Digest. International (1999), pp. 689-692. by Shyh-Chiang Shen, M. Feng posted to electrostatic mems rf switch by msterner on 2008-07-11 13:35:29 as
	Micromechanical Membrane Switches on Silicon [My Copy] IBM Research (1979) by K. E. Petersen posted to mems switch by msterner on 2008-07-11 13:26:20 as
	Extending the travel range of analog-tuned electrostatic actuators [My Copy] Microelectromechanical Systems, Journal of In Microelectromechanical Systems, Journal of, Vol. 8, No. 4. (1999), pp. 497-505. by E. S. Hung, S. D. Senturia posted to actuator electrostatic mems by msterner on 2008-06-19 10:18:05 as
	Transverse mode electrostatic microactuator for MEMS-based HDD slider [My Copy] Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The Ninth Annual International Workshop on In Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, The Ninth Annual International Workshop on (1996), pp. 216-221. by T. Imamura, T. Koshikawa, M. Katayama posted to actuator electrostatic mems by msterner on 2008-06-19 10:17:24 as
	The Adhesion of Evaporated Metal Films on Glass [My Copy] Proceedings of the Royal Society of London. Series A, Mathematical and Physical Sciences, Vol. 261, No. 1307. (1961), pp. 516-531. by P. Benjamin, C. Weaver posted to evaporation fabrication mems by msterner on 2007-11-21 08:29:04 as
	A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches [My Copy] Sensors and Actuators A: Physical, Vol. 121, No. 1. (31 May 2005), pp. 187-196. by M. Tang, A. Q. Liu, A. Agarwal, Z. S. Liu, C. Lu posted to mems rf spdt switch waveguide by msterner on 2007-10-04 18:46:20 as
	RF-MEMS SPDT switch on silicon substrate for space applications [My Copy] Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on In Silicon Monolithic Integrated Circuits in RF Systems, 2004. Digest of Papers. 2004 Topical Meeting on (2004), pp. 151-154. by P. Farinelli, F. Giacomozzi, G. Mannocchi, et al.R. Marcelli, B. Margesin, P. Mezzanotte, S. Di Nardo, P. Russer, R. Sorrentino, F. Vitulli, L. Vietzorreck posted to mems rf spdt switch by msterner on 2007-10-04 17:45:14 as
	Low temperature IC-compatible wafer-to-wafer bonding with embedded micro channels for integrated sensing systems [My Copy] Circuits and Systems, 1995., Proceedings., Proceedings of the 38th Midwest Symposium on In Circuits and Systems, 1995., Proceedings., Proceedings of the 38th Midwest Symposium on, Vol. 1 (1995), pp. 505-508 vol.1. by A. B. Frazier posted to fabrication polyimide by msterner on 2007-09-04 13:31:47 as
	Tungsten (W) as electrode material: Electrode potential and small-signal impedances [My Copy] Medical and Biological Engineering and Computing, Vol. 16, No. 5. (1978), pp. 483-488. by T. Zeuthen posted to etching mems by msterner on 2007-06-26 11:48:55 as
	RF MEMS waveguide switch [My Copy] Microwave Theory and Techniques, IEEE Transactions on, Vol. 52, No. 12. (2004), pp. 2651-2657. by M. Daneshmand, R. R. Mansour, N. Sarkar posted to funny mems rf waveguide by msterner on 2007-05-15 09:24:00 as
	Surface-micromachined RF MEMs switches on GaAs substrates [My Copy] International Journal of RF and Microwave Computer-Aided Engineering, Vol. 9, No. 4. (1999), pp. 348-361. by Daniel Hyman, Juan Lam, Brett Warneke, et al.Adele Schmitz, T. Y. Hsu, Julia Brown, James Schaffner, Andy Walston, Robert Y. Loo, Mehran Mehregany, Jae Lee posted to mems rf switch by msterner on 2007-05-14 17:53:18 as
	Low-loss micromachined inverted overlay CPW lines with wide impedance ranges and inherent airbridge connection capability [My Copy] Microwave and Wireless Components Letters, IEEE, Vol. 11, No. 2. (2001), pp. 59-61. by Youngwoo Kwon, Hong-Teuk Kim, Jae-Hyoung Park, Yong-Kweon Kim posted to mems rf waveguide by msterner on 2007-05-14 15:35:45 as
	A new micromachined overlay CPW structure with low attenuation over wide impedance ranges and its application to low-pass filters [My Copy] Microwave Theory and Techniques, IEEE Transactions on, Vol. 49, No. 9. (2001), pp. 1634-1639. by Hong-Teuk Kim, Sanghwa Jung, Jae-Hyoung Park, Chang-Wook Baek, Yong-Kweon Kim, Youngwoo Kwon posted to mems rf waveguide by msterner on 2007-05-14 15:31:27 as along with 1 person z3phyr

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mems	45
rf	36
waveguide	17
electrochemistry	8
switch	7
capacitor	5
tunable	5
etching	5
millimeter	4
fabrication	3
material	3
electrostatic	3
phaseshifting	3
bonding	3
integration	2
actuator	2
spdt	2
stress	2
wave	2
stiction	2
compensation	2
3d	2
silicon	2
high-resisitivity	2
metamaterial	1
evaporation	1
thermal	1
electroc	1
funny	1
beamsteering	1
bcb	1
polyimide	1
meta	1
hfss	1

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