Achromatic interferometric lithography for 100-nm-period gratings and grids Export

@article{citeulike:1621512, abstract = {Not Available}, author = {Savas, T. A. and Shah, S. N. and Schattenburg, M. L. and Carter, J. M. and Smith, H. I.}, citeulike-article-id = {1621512}, citeulike-linkout-0 = {http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1995JVSTB..13.2732S}, journal = {Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.2732-2735}, keywords = {achromatic, grids, holographic, lithography, photolithography, submicron}, month = {November}, pages = {2732--2735}, posted-at = {2007-09-04 23:56:25}, priority = {2}, title = {Achromatic interferometric lithography for 100-nm-period gratings and grids}, url = {http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1995JVSTB..13.2732S}, volume = {13}, year = {1995} }

TY - JOUR ID - citeulike:1621512 L3 - citeulike-article-id:1621512 N2 - Not Available JF - Journal of Vacuum Science \amp Technology B: Microelectronics and Nanometer Structures, Volume 13, Issue 6, November 1995, pp.2732-2735 EP - 2735 TI - Achromatic interferometric lithography for 100-nm-period gratings and grids VL - 13 SP - 2732 KW - achromatic KW - grids KW - holographic KW - lithography KW - photolithography KW - submicron AU - Savas, TA AU - Shah, SN AU - Schattenburg, ML AU - Carter, JM AU - Smith, HI PY - 1995/November// UR - http://adsabs.harvard.edu/cgi-bin/nph-bib_query?bibcode=1995JVSTB..13.2732S ER -