Scanning probe metrology Export

by: J. E. Griffith, D. A. Grigg, M. J. Vasile, P. E. Russell, E. A. Fitzgerald

38th National Symposium of the American Vacuum Society, Vol. 10, No. 4. (1992), pp. 674-679.

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Abstract

The high resolution, three-dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better than 10 nm. To achieve this level of performance, the nonlinear behavior of the piezoceramic actuators and of the probe–sample interaction must be carefully controlled. Positioning of the actuators can be addressed in a straightforward manner. The probe–sample interaction is, on the other hand, a difficult problem, which depends on the topography being measured.

@inproceedings{citeulike:3047123, abstract = {The high resolution, three-dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better than 10 nm. To achieve this level of performance, the nonlinear behavior of the piezoceramic actuators and of the probe\&\#150;sample interaction must be carefully controlled. Positioning of the actuators can be addressed in a straightforward manner. The probe\&\#150;sample interaction is, on the other hand, a difficult problem, which depends on the topography being measured.}, author = {Griffith, J. E. and Grigg, D. A. and Vasile, M. J. and Russell, P. E. and Fitzgerald, E. A.}, citeulike-article-id = {3047123}, citeulike-linkout-0 = {http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTAD6000010000004000674000001&idtype=cvips&gifs=yes}, citeulike-linkout-1 = {http://link.aip.org/link/?JVA/10/674}, citeulike-linkout-2 = {http://dx.doi.org/10.1116/1.577708}, doi = {10.1116/1.577708}, journal = {38th National Symposium of the American Vacuum Society}, keywords = {afm}, location = {Seattle, Washington (USA)}, number = {4}, pages = {674--679}, posted-at = {2008-07-28 02:57:02}, priority = {2}, publisher = {AVS}, title = {Scanning probe metrology}, url = {http://dx.doi.org/10.1116/1.577708}, volume = {10}, year = {1992} }

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TY - CONF ID - citeulike:3047123 L3 - citeulike-article-id:3047123 N2 - The high resolution, three-dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better than 10 nm. To achieve this level of performance, the nonlinear behavior of the piezoceramic actuators and of the probesample interaction must be carefully controlled. Positioning of the actuators can be addressed in a straightforward manner. The probesample interaction is, on the other hand, a difficult problem, which depends on the topography being measured. CY - Seattle, Washington (USA) IS - 4 JF - 38th National Symposium of the American Vacuum Society EP - 679 TI - Scanning probe metrology PB - AVS VL - 10 SP - 674 KW - afm AU - Griffith, JE AU - Grigg, DA AU - Vasile, MJ AU - Russell, PE AU - Fitzgerald, EA PY - 1992/// UR - http://dx.doi.org/10.1116/1.577708 ER -

Scanning probe metrology Export

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