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Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks [My Copy]

Photon Processing in Microelectronics and Photonics IV, Vol. 5713, No. 1. (2005), pp. 247-258.

by Glenn H. Chapman, James Dykes, David Poon, et al.Chinheng Choo, Jun Wang, Jun Peng, Yuqiang Tu

edited by Jim Fieret, Peter R. Herman, Tatsuo Okada, et al.Craig B. Arnold, Friedrich G. Bachmann, Willem Hoving, Kunihiko Washio, Yongfeng Lu, David B. Geohegan, Frank Trager, Jan J. Dubowski

posted to 3-d bimetallic citedby1 grayscale lasers lithography masks metallic microstructures photoresist resist thermal by rodney on 2009-01-12 04:47:47 as

Note: You may cite this page as: http://www.citeulike.org/user/rodney/author/Bachmann:FG

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